| Patent | Date |
|---|
Precursor formulations for polishing pads produced by an additive manufacturing process
Grant 11,446,788 - Bajaj , et al. September 20, 2 | 2022-09-20 |
Structures Formed Using An Additive Manufacturing Process For Regenerating Surface Texture In Situ
App 20220250203 - JAWALI; Puneet Narendra ; et al. | 2022-08-11 |
Retaining Ring Design
App 20220055181 - Khanna; Aniruddh Jagdish ; et al. | 2022-02-24 |
Integrating 3D printing into multi-process fabrication schemes
Grant 11,241,839 - McClintock , et al. February 8, 2 | 2022-02-08 |
Correction Of Fabricated Shapes In Additive Manufacturing
App 20220001507 - Yamamura; Mayu Felicia ; et al. | 2022-01-06 |
Additive Manufacturing of Polishing Pads
App 20210379725 - Sridhar; Uma ; et al. | 2021-12-09 |
Additive Manufacturing of Polishing Pads
App 20210379726 - Sridhar; Uma ; et al. | 2021-12-09 |
Polishing Pad With Window And Manufacturing Methods Thereof
App 20210347005 - FU; Boyi ; et al. | 2021-11-11 |
Correction of fabricated shapes in additive manufacturing
Grant 11,154,961 - Yamamura , et al. October 26, 2 | 2021-10-26 |
Correction of fabricated shapes in additive manufacturing using modified edge
Grant 11,084,143 - Redfield August 10, 2 | 2021-08-10 |
Polishing pad with window and manufacturing methods thereof
Grant 11,072,050 - Fu , et al. July 27, 2 | 2021-07-27 |
Correction of fabricated shapes in additive manufacturing using initial layer
Grant 11,059,149 - Redfield , et al. July 13, 2 | 2021-07-13 |
Methods And Precursor Formulations For Forming Advanced Polishing Pads By Use Of An Additive Manufacturing Process
App 20210205951 - GANAPATHIAPPAN; Sivapackia ; et al. | 2021-07-08 |
Using Sacrificial Material In Additive Manufacturing Of Polishing Pads
App 20210114172 - Redfield; Daniel ; et al. | 2021-04-22 |
Polishing Pads Produced By An Additive Manufacturing Process
App 20210107116 - BAJAJ; Rajeev ; et al. | 2021-04-15 |
Fabrication of polishing pad by additive manufacturing onto mold
Grant 10,967,482 - Redfield April 6, 2 | 2021-04-06 |
Apparatus and method of forming a polishing pads by use of an additive manufacturing process
Grant 10,953,515 - Ganapathiappan , et al. March 23, 2 | 2021-03-23 |
Additive Manufacturing Of Polishing Pads
App 20210054222 - Luo; Yingdong ; et al. | 2021-02-25 |
Piezo-electric end-pointing for 3D printed CMP pads
Grant 10,919,123 - Hariharan , et al. February 16, 2 | 2021-02-16 |
Correction of fabricated shapes in additive manufacturing using sacrificial material
Grant 10,882,160 - Redfield , et al. January 5, 2 | 2021-01-05 |
Advanced polishing pad materials and formulations
Grant 10,875,153 - Bajaj , et al. December 29, 2 | 2020-12-29 |
Polishing pads produced by an additive manufacturing process
Grant 10,875,145 - Bajaj , et al. December 29, 2 | 2020-12-29 |
Polishing pads produced by an additive manufacturing process
Grant 10,821,573 - Bajaj , et al. November 3, 2 | 2020-11-03 |
Anionic Polishing Pads Formed By Printing Processes
App 20200325353 - SRIDHAR; Uma ; et al. | 2020-10-15 |
Pad structure and fabrication methods
Grant 10,773,509 - Ng , et al. Sept | 2020-09-15 |
Polishing Pads Formed Using An Additive Manufacturing Process And Methods Related Thereto
App 20200230781 - CHOCKALINGAM; Ashwin ; et al. | 2020-07-23 |
Cmp Pad Construction With Composite Material Properties Using Additive Manufacturing Processes
App 20200147750 - BAJAJ; Rajeev ; et al. | 2020-05-14 |
Correction Of Fabricated Shapes In Additive Manufacturing
App 20200139507 - Yamamura; Mayu Felicia ; et al. | 2020-05-07 |
Techniques For Combining Cmp Process Tracking Data With 3d Printed Cmp Consumables
App 20200135517 - FUNG; Jason G. ; et al. | 2020-04-30 |
Apparatus for forming a polishing article that has a desired zeta potential
Grant 10,618,141 - Chockalingam , et al. | 2020-04-14 |
Polishing Articles And Integrated System And Methods For Manufacturing Chemical Mechanical Polishing Articles
App 20200101657 - KRISHNAN; Kasiraman ; et al. | 2020-04-02 |
Techniques for combining CMP process tracking data with 3D printed CMP consumables
Grant 10,593,574 - Fung , et al. | 2020-03-17 |
Textured small pad for chemical mechanical polishing
Grant 10,589,399 - Oh , et al. | 2020-03-17 |
Formulations For Advanced Polishing Pads
App 20200070302 - GANAPATHIAPPAN; Sivapackia ; et al. | 2020-03-05 |
Apparatus And Method Of Forming A Polishing Article That Has A Desired Zeta Potential
App 20200055161 - CHOCKALINGHAM; Ashwin ; et al. | 2020-02-20 |
Correction of fabricated shapes in additive manufacturing
Grant 10,537,973 - Yamamura , et al. Ja | 2020-01-21 |
CMP pad construction with composite material properties using additive manufacturing processes
Grant 10,537,974 - Bajaj , et al. Ja | 2020-01-21 |
Precursor Formulations For Polishing Pads Produced By An Additive Manufacturing Process
App 20200001433 - BAJAJ; Rajeev ; et al. | 2020-01-02 |
Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
Grant 10,493,691 - Krishnan , et al. De | 2019-12-03 |
Hydrophilic And Zeta Potential Tunable Chemical Mechanical Polishing Pads
App 20190337117 - GANAPATHIAPPAN; Sivapackia ; et al. | 2019-11-07 |
Porous chemical mechanical polishing pads
Grant 10,456,886 - Ganapathiappan , et al. Oc | 2019-10-29 |
Printed Chemical Mechanical Polishing Pad
App 20190299357 - ORILALL; Mahendra Christopher ; et al. | 2019-10-03 |
Integrating 3d Printing Into Multi-process Fabrication Schemes
App 20190299537 - MCCLINTOCK; William H. ; et al. | 2019-10-03 |
Advanced polishing pads having compositional gradients by use of an additive manufacturing process
Grant 10,399,201 - Ganapathiappan , et al. Sep | 2019-09-03 |
Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
Grant 10,391,605 - Ganapathiappan , et al. A | 2019-08-27 |
Polishing pads produced by an additive manufacturing process
Grant 10,384,330 - Bajaj , et al. A | 2019-08-20 |
Piezo-electric End-pointing For 3d Printed Cmp Pads
App 20190240802 - HARIHARAN; Venkat ; et al. | 2019-08-08 |
Porous Chemical Mechanical Polishing Pads
App 20190224809 - GANAPATHIAPPAN; Sivapackia ; et al. | 2019-07-25 |
Method And Apparatus For Forming Porous Advanced Polishing Pads Using An Additive Manufacturing Process
App 20190202024 - GANAPATHIAPPAN; Sivapackia ; et al. | 2019-07-04 |
Printed chemical mechanical polishing pad
Grant 10,322,491 - Orilall , et al. | 2019-06-18 |
Absorbing reflector for semiconductor processing chamber
Grant 10,306,708 - Lo , et al. | 2019-05-28 |
Polishing Pad With Window And Manufacturing Methods Thereof
App 20190047112 - FU; Boyi ; et al. | 2019-02-14 |
Abrasive Delivery Polishing Pads And Manufacturing Methods Thereof
App 20190039204 - CHOCKALINGAM; Ashwin ; et al. | 2019-02-07 |
Integrated Abrasive Polishing Pads And Manufacturing Methods
App 20190030678 - KUMAR; Ashavani ; et al. | 2019-01-31 |
Correction Of Fabricated Shapes In Additive Manufacturing Using Modified Edge
App 20180339447 - Redfield; Daniel | 2018-11-29 |
Correction Of Fabricated Shapes In Additive Manufacturing Using Initial Layer
App 20180339401 - Redfield; Daniel ; et al. | 2018-11-29 |
Correction Of Fabricated Shapes In Additive Manufacturing Using Sacrificial Material
App 20180339402 - Redfield; Daniel ; et al. | 2018-11-29 |
Fabrication of Polishing Pad by Additive Manufacturing Onto Mold
App 20180339397 - Redfield; Daniel | 2018-11-29 |
Cmp Pad Construction With Composite Material Properties Using Additive Manufacturing Processes
App 20180161954 - BAJAJ; Rajeev ; et al. | 2018-06-14 |
Absorbing Reflector For Semiconductor Processing Chamber
App 20180084610 - LO; Kin Pong ; et al. | 2018-03-22 |
Polishing Articles And Integrated System And Methods For Manufacturing Chemical Mechanical Polishing Articles
App 20180043613 - KRISHNAN; Kasiraman ; et al. | 2018-02-15 |
CMP pad construction with composite material properties using additive manufacturing processes
Grant 9,873,180 - Bajaj , et al. January 23, 2 | 2018-01-23 |
Absorbing reflector for semiconductor processing chamber
Grant 9,832,816 - Lo , et al. November 28, 2 | 2017-11-28 |
Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
Grant 9,776,361 - Krishnan , et al. October 3, 2 | 2017-10-03 |
Textured Small Pad For Chemical Mechanical Polishing
App 20170274498 - Oh; Jeonghoon ; et al. | 2017-09-28 |
Correction Of Fabricated Shapes In Additive Manufacturing
App 20170259396 - Yamamura; Mayu Felicia ; et al. | 2017-09-14 |
Pad Structure And Fabrication Methods
App 20170259499 - NG; Hou T. ; et al. | 2017-09-14 |
Porous Chemical Mechanical Polishing Pads
App 20170203406 - GANAPATHIAPPAN; Sivapackia ; et al. | 2017-07-20 |
Method And Apparatus For Forming Porous Advanced Polishing Pads Using An Additive Manufacturing Process
App 20170203408 - GANAPATHIAPPAN; Sivapackia ; et al. | 2017-07-20 |
Apparatus And Method Of Forming A Polishing Pads By Use Of An Additive Manufacturing Process
App 20170136603 - GANAPATHIAPPAN; Sivapackia ; et al. | 2017-05-18 |
Techniques For Combining Cmp Process Tracking Data With 3d Printed Cmp Consumables
App 20170133252 - FUNG; Jason G. ; et al. | 2017-05-11 |
Apparatus And Method Of Forming A Polishing Article That Has A Desired Zeta Potential
App 20170120416 - CHOCKALINGAM; Ashwin ; et al. | 2017-05-04 |
Advanced Polishing Pads Having Compositional Gradients By Use Of An Additive Manufacturing Process
App 20170100817 - GANAPATHIAPPAN; Sivapackia ; et al. | 2017-04-13 |
Advanced Polishing Pad Materials And Formulations
App 20160136787 - Bajaj; Rajeev ; et al. | 2016-05-19 |
Polishing Pads Produced By An Additive Manufacturing Process
App 20160114458 - BAJAJ; Rajeev ; et al. | 2016-04-28 |
Polishing Pads Produced By An Additive Manufacturing Process
App 20160107295 - BAJAJ; Rajeev ; et al. | 2016-04-21 |
Printed Chemical Mechanical Polishing Pad
App 20160107288 - ORILALL; Mahendra Christopher ; et al. | 2016-04-21 |
Polishing Pads Produced By An Additive Manufacturing Process
App 20160107287 - BAJAJ; Rajeev ; et al. | 2016-04-21 |
Polishing Articles And Integrated System And Methods For Manufacturing Chemical Mechanical Polishing Articles
App 20160107381 - KRISHNAN; Kasiraman ; et al. | 2016-04-21 |
Cmp Pad Construction With Composite Material Properties Using Additive Manufacturing Processes
App 20160107290 - BAJAJ; Rajeev ; et al. | 2016-04-21 |
Chemical Mechanical Polishing Pad With Internal Channels
App 20160101500 - FUNG; Jason Garcheung ; et al. | 2016-04-14 |
Absorbing Reflector For Semiconductor Processing Chamber
App 20140376898 - Lo; Kin Pong ; et al. | 2014-12-25 |
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