Reddy; Sirish

Patent Applications and Registrations

Patent applications and USPTO patent grants for Reddy; Sirish.The latest application filed is for "deposition of metal dielectric film for hardmasks".

Company Profile

1.15.14

Reddy; Sirish - Tualatin OR
Reddy; Sirish - Hillsboro OR
Reddy; Sirish - Hills Boro OR
Reddy; Sirish - Boulder CO

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Carrier ring structure and chamber systems including the same Grant 10,242,848 - Jeon , et al.	2019-03-26
Methods for decreasing carbon-hydrogen content of amorphous carbon hardmask films Grant 9,928,994 - Shaikh , et al. March 27, 2	2018-03-27
Deposition of metal dielectric film for hardmasks Grant 9,875,890 - Shaikh , et al. January 23, 2	2018-01-23
Method for supplying vaporized precursor Grant 9,637,821 - Slevin , et al. May 2, 2	2017-05-02
Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems Grant 9,520,295 - Shaikh , et al. December 13, 2	2016-12-13
Deposition Of Metal Dielectric Film For Hardmasks App 20160284541 - Shaikh; Fayaz ; et al.	2016-09-29
Metal Doping Of Amorphous Carbon And Silicon Films Used As Hardmasks In Substrate Processing Systems App 20160225632 - Shaikh; Fayaz ; et al.	2016-08-04
Systems And Methods For Decreasing Carbon-hydrogen Content Of Amorphous Carbon Hardmask Films App 20160225588 - Shaikh; Fayaz ; et al.	2016-08-04
Carrier Ring Structure and Chamber Systems Including the Same App 20160172165 - Jeon; Eli ; et al.	2016-06-16
Method for forming a mask by etching conformal film on patterned ashable hardmask Grant 9,362,133 - Shamma , et al. June 7, 2	2016-06-07
Oxygen-containing ceramic hard masks and associated wet-cleans Grant 9,337,068 - Antonelli , et al. May 10, 2	2016-05-10
PECVD deposition of smooth silicon films Grant 9,117,668 - Hollister , et al. August 25, 2	2015-08-25
Carbon deposition-etch-ash gap fill process Grant 9,023,731 - Ji , et al. May 5, 2	2015-05-05
Oxygen-containing Ceramic Hard Masks And Associated Wet-cleans App 20140175617 - Antonelli; George Andrew ; et al.	2014-06-26
Image Reversal With Ahm Gap Fill For Multiple Patterning App 20140170853 - Shamma; Nader ; et al.	2014-06-19
Method For Supplying Vaporized Precursor App 20140096834 - Slevin; Damien ; et al.	2014-04-10
Carbon Deposition-etch-ash Gap Fill Process App 20140094035 - Ji; Chunhai ; et al.	2014-04-03
Precursor vapor generation and delivery system with filters and filter monitoring system Grant 8,628,618 - Slevin , et al. January 14, 2	2014-01-14
Pecvd Deposition Of Smooth Silicon Films App 20130316518 - HOLLISTER; Alice ; et al.	2013-11-28
High compressive stress carbon liners for MOS devices Grant 8,362,571 - Wu , et al. January 29, 2	2013-01-29
Increasing Etch Selectivity Of Carbon Films With Lower Absorption Co-efficient And Stress App 20120258261 - Reddy; Sirish ; et al.	2012-10-11
Precursor Vapor Generation And Delivery System With Filters And Filter Monitoring System App 20110111136 - Slevin; Damien ; et al.	2011-05-12
High compressive stress carbon liners for MOS devices Grant 7,906,817 - Wu , et al. March 15, 2	2011-03-15
Photolytic Polymer Surface Modification App 20080274335 - Bowman; Christopher N. ; et al.	2008-11-06
Polymer derived ceramic materials App 20060069176 - Bowman; Christopher N. ; et al.	2006-03-30

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