| Patent | Date |
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Carbon Based Depositions Used For Critical Dimension Control During High Aspect Ratio Feature Etches And For Forming Protective Layers
App 20220199417 - HENRI; Jon ; et al. | 2022-06-23 |
Selective Deposition Of Etch-stop Layer For Enhanced Patterning
App 20210358753 - Shankar; Nagraj ; et al. | 2021-11-18 |
Selective deposition of etch-stop layer for enhanced patterning
Grant 11,094,542 - Shankar , et al. August 17, 2 | 2021-08-17 |
Selective deposition with atomic layer etch reset
Grant 10,998,187 - Reddy , et al. May 4, 2 | 2021-05-04 |
Deposition of aluminum oxide etch stop layers
Grant 10,804,144 - Rainville , et al. October 13, 2 | 2020-10-13 |
Showerhead with air-gapped plenums and overhead isolation gas distributor
Grant 10,745,806 - Shankar , et al. A | 2020-08-18 |
Deposition Of Aluminum Oxide Etch Stop Layers
App 20200251384 - Kind Code | 2020-08-06 |
Selective Deposition Of Etch-stop Layer For Enhanced Patterning
App 20200168466 - Shankar; Nagraj ; et al. | 2020-05-28 |
Deposition of Aluminum oxide etch stop layers
Grant 10,665,501 - Rainville , et al. | 2020-05-26 |
Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing
Grant 10,651,080 - Rainville , et al. | 2020-05-12 |
Pre-treatment method to improve selectivity in a selective deposition process
Grant 10,643,889 - Hausmann , et al. | 2020-05-05 |
Selective Deposition With Atomic Layer Etch Reset
App 20200118809 - Reddy; Kapu Sirish ; et al. | 2020-04-16 |
Showerhead With Air-gapped Plenums And Overhead Isolation Gas Distributor
App 20200063261 - Shankar; Nagraj ; et al. | 2020-02-27 |
Selective deposition of etch-stop layer for enhanced patterning
Grant 10,566,194 - Shankar , et al. Feb | 2020-02-18 |
Selective deposition with atomic layer etch reset
Grant 10,559,461 - Reddy , et al. Feb | 2020-02-11 |
Pre-treatment Method To Improve Selectivity In A Selective Deposition Process
App 20200043776 - HAUSMANN; Dennis ; et al. | 2020-02-06 |
Showerhead With Air-gapped Plenums And Overhead Isolation Gas Distributor
App 20190352777 - Shankar; Nagraj ; et al. | 2019-11-21 |
Showerhead with air-gapped plenums and overhead isolation gas distributor
Grant 10,472,716 - Shankar , et al. Nov | 2019-11-12 |
Selective Deposition Of Etch-stop Layer For Enhanced Patterning
App 20190341256 - Shankar; Nagraj ; et al. | 2019-11-07 |
Composite dielectric interface layers for interconnect structures
Grant 10,418,236 - Reddy , et al. Sept | 2019-09-17 |
Composite Dielectric Interface Layers For Interconnect Structures
App 20180342389 - Reddy; Kapu Sirish ; et al. | 2018-11-29 |
Selective Deposition With Atomic Layer Etch Reset
App 20180308680 - Reddy; Kapu Sirish ; et al. | 2018-10-25 |
Composite dielectric interface layers for interconnect structures
Grant 10,049,869 - Reddy , et al. August 14, 2 | 2018-08-14 |
Deposition Of Aluminum Oxide Etch Stop Layers
App 20180197770 - Rainville; Meliha Gozde ; et al. | 2018-07-12 |
Composite Dielectric Interface Layers For Interconnect Structures
App 20180096886 - Reddy; Kapu Sirish ; et al. | 2018-04-05 |
Deposition of aluminum oxide etch stop layers
Grant 9,859,153 - Rainville , et al. January 2, 2 | 2018-01-02 |
Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing
Grant 9,847,221 - McLaughlin , et al. December 19, 2 | 2017-12-19 |
Oxidizing Treatment Of Aluminum Nitride Films In Semiconductor Device Manufacturing
App 20170309514 - Rainville; Meliha Gozde ; et al. | 2017-10-26 |
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