| Patent | Date |
|---|
Position and temperature monitoring of ALD platen susceptor
Grant 11,430,680 - Ravid , et al. August 30, 2 | 2022-08-30 |
Particle detection for substrate processing
Grant 11,119,051 - Egan , et al. September 14, 2 | 2021-09-14 |
Particle Detection For Substrate Processing
App 20210018449 - EGAN; Todd ; et al. | 2021-01-21 |
Particle detection for substrate processing
Grant 10,845,317 - Egan , et al. November 24, 2 | 2020-11-24 |
Color Imaging For Cmp Monitoring
App 20200151868 - Benvegnu; Dominic J. ; et al. | 2020-05-14 |
Color imaging for CMP monitoring
Grant 10,565,701 - Benvegnu , et al. Feb | 2020-02-18 |
Position And Temperature Monitoring Of ALD Platen Susceptor
App 20190244842 - Ravid; Abraham ; et al. | 2019-08-08 |
Position and temperature monitoring of ALD platen susceptor
Grant 10,312,120 - Ravid , et al. | 2019-06-04 |
Electroplating tool with feedback of metal thickness distribution and correction
Grant 10,260,855 - Egan , et al. | 2019-04-16 |
Particle Detection For Substrate Processing
App 20190072497 - EGAN; Todd ; et al. | 2019-03-07 |
Wafer placement and gap control optimization through in situ feedback
Grant 10,196,741 - Griffin , et al. Fe | 2019-02-05 |
Methods and apparatus to determine parameters in metal-containing films
Grant 9,880,233 - Ravid January 30, 2 | 2018-01-30 |
Non-Contact Sheet Resistance Measurement of Barrier and/or Seed Layers Prior to Electroplating
App 20170226655 - Ravid; Abraham ; et al. | 2017-08-10 |
Color Imaging For Cmp Monitoring
App 20170140525 - Benvegnu; Dominic J. ; et al. | 2017-05-18 |
Non-contact sheet resistance measurement of barrier and/or seed layers prior to electroplating
Grant 9,631,919 - Ravid , et al. April 25, 2 | 2017-04-25 |
Method of aligning substrate-scale mask with substrate
Grant 9,490,154 - Ravid , et al. November 8, 2 | 2016-11-08 |
Apparatus and method for optical calibration of wafer placement by a robot
Grant 9,405,287 - Ravid , et al. August 2, 2 | 2016-08-02 |
Substrate-scale Mask Alignment
App 20160211185 - Ravid; Abraham ; et al. | 2016-07-21 |
Position And Temperature Monitoring Of ALD Platen Susceptor
App 20160027675 - Ravid; Abraham ; et al. | 2016-01-28 |
Wafer Placement And Gap Control Optimization Through In Situ Feedback
App 20150376782 - Griffin; Kevin ; et al. | 2015-12-31 |
Electroplating Tool With Feedback Of Metal Thickness Distribution And Correction
App 20140367267 - Egan; Todd J. ; et al. | 2014-12-18 |
Non-contact Sheet Resistance Measurement Of Barrier And/or Seed Layers Prior To Electroplating
App 20140367265 - Ravid; Abraham ; et al. | 2014-12-18 |
Metrology system for imaging workpiece surfaces at high robot transfer speeds
Grant 8,698,889 - Ravid , et al. April 15, 2 | 2014-04-15 |
Metrology for GST film thickness and phase
Grant 8,639,377 - Xu , et al. January 28, 2 | 2014-01-28 |
Method for imaging workpiece surfaces at high robot transfer speeds with reduction or prevention of motion-induced distortion
Grant 08620064 - | 2013-12-31 |
Method for imaging workpiece surfaces at high robot transfer speeds with reduction or prevention of motion-induced distortion
Grant 8,620,064 - Ravid , et al. December 31, 2 | 2013-12-31 |
Method for imaging workpiece surfaces at high robot transfer speeds with correction of motion-induced distortion
Grant 8,452,077 - Ravid , et al. May 28, 2 | 2013-05-28 |
Methods And Apparatus To Determine Parameters In Metal-containing Films
App 20120274318 - RAVID; ABRAHAM | 2012-11-01 |
Methods and apparatus for measuring substrate edge thickness during polishing
Grant 8,125,654 - Benvegnu , et al. February 28, 2 | 2012-02-28 |
Determining Physical Property of Substrate
App 20110294400 - Ravid; Abraham ; et al. | 2011-12-01 |
Determining physical property of substrate
Grant 8,014,004 - Ravid , et al. September 6, 2 | 2011-09-06 |
Metrology System For Imaging Workpiece Surfaces At High Robot Transfer Speeds
App 20110199476 - Ravid; Abraham ; et al. | 2011-08-18 |
Method For Imaging Workpiece Surfaces At High Robot Transfer Speeds With Reduction Or Prevention Of Motion-induced Distortion
App 20110199477 - Ravid; Abraham ; et al. | 2011-08-18 |
Method For Imaging Workpiece Surfaces At High Robot Transfer Speeds With Correction Of Motion-induced Distortion
App 20110200247 - Ravid; Abraham ; et al. | 2011-08-18 |
High throughput measurement system
Grant 7,952,708 - Ravid , et al. May 31, 2 | 2011-05-31 |
Methods And Apparatus For Generating A Library Of Spectra
App 20110046918 - Ravid; Abraham ; et al. | 2011-02-24 |
Methods and apparatus for generating a library of spectra
Grant 7,840,375 - Ravid , et al. November 23, 2 | 2010-11-23 |
Determining Physical Property of Substrate
App 20100261413 - Ravid; Abraham ; et al. | 2010-10-14 |
Determining physical property of substrate
Grant 7,746,485 - Ravid , et al. June 29, 2 | 2010-06-29 |
Metrology For Gst Film Thickness And Phase
App 20100116990 - Xu; Kun ; et al. | 2010-05-13 |
Methods And Apparatus For Measuring Substrate Edge Thickness During Polishing
App 20090262353 - Benvegnu; Dominic J. ; et al. | 2009-10-22 |
Determining Physical Property of Substrate
App 20090033942 - Ravid; Abraham ; et al. | 2009-02-05 |
Determining physical property of substrate
Grant 7,444,198 - Ravid , et al. October 28, 2 | 2008-10-28 |
High Throughput Measurement System
App 20080239308 - Ravid; Abraham ; et al. | 2008-10-02 |
Methods And Apparatus For Generating A Library Of Spectra
App 20080243433 - Ravid; Abraham ; et al. | 2008-10-02 |
Determining Physical Property Of Substrate
App 20080146120 - Ravid; Abraham ; et al. | 2008-06-19 |
Continuous in-line monitoring and qualification of polishing rates
App 20070123046 - Ravid; Abraham ; et al. | 2007-05-31 |
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