RAVI; Jallepally

Patent Applications and Registrations

Patent applications and USPTO patent grants for RAVI; Jallepally.The latest application filed is for "substrate position calibration for substrate supports in substrate processing systems".

Company Profile

5.15.21

RAVI; Jallepally - San Ramon CA
Ravi; Jallepally - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Position Calibration For Substrate Supports In Substrate Processing Systems App 20220099426 - MATSUSHITA; Tomoharu ; et al.	2022-03-31
Low-temperature Plasma Pre-clean For Selective Gap Fill App 20210398850 - Xu; Yi ; et al.	2021-12-23
Substrate position calibration for substrate supports in substrate processing systems Grant 11,201,078 - Matsushita , et al. December 14, 2	2021-12-14
Gas Distribution Ceramic Heater For Deposition Chamber App 20210176831 - LEI; Pingyan ; et al.	2021-06-10
Dual Plasma Pre-clean For Selective Gap Fill App 20210159070 - Xu; Yi ; et al.	2021-05-27
Processing Chamber With Multiple Plasma Units App 20210159052 - Daito; Kazuya ; et al.	2021-05-27
High Temperature Dual Chamber Showerhead App 20210130956 - LEI; Pingyan ; et al.	2021-05-06
Methods And Apparatus For Dual Channel Showerheads App 20210032753 - RAVI; Jallepally ; et al.	2021-02-04
Lift pin assembly Grant 10,892,180 - Chia , et al. January 12, 2	2021-01-12
Methods and apparatus for rapidly cooling a substrate Grant 10,312,116 - Ravi , et al.	2019-06-04
Target retaining apparatus Grant 10,199,204 - Yedla , et al. Fe	2019-02-05
Substrate support with improved RF return Grant 10,134,615 - Kamath , et al. November 20, 2	2018-11-20
Substrate Position Calibration For Substrate Supports In Substrate Processing Systems App 20180233396 - MATSUSHITA; TOMOHARU ; et al.	2018-08-16
Dual PVD Chamber And Hybrid PVD-CVD Chambers App 20180197760 - Jadhav; Deepak ; et al.	2018-07-12
Substrate support with multiple heating zones Grant 9,888,528 - Matsushita , et al. February 6, 2	2018-02-06
Methods And Apparatus For Rapidly Cooling A Substrate App 20180025924 - Ravi; Jallepally ; et al.	2018-01-25
Methods and apparatus for rapidly cooling a substrate Grant 9,779,971 - Ravi , et al. October 3, 2	2017-10-03
Substrate Support With Improved Rf Return App 20160240426 - KAMATH; ARAVIND MIYAR ; et al.	2016-08-18
Substrate Support With Multiple Heating Zones App 20160192444 - MATSUSHITA; TOMOHARU ; et al.	2016-06-30
Substrate Support With More Uniform Edge Purge App 20160002778 - RAVI; JALLEPALLY ; et al.	2016-01-07
Lift Pin Assembly App 20150348823 - CHIA; BONNIE T. ; et al.	2015-12-03
Methods And Apparatus For Rapidly Cooling A Substrate App 20150294886 - Ravi; Jallepally ; et al.	2015-10-15
Target Retaining Apparatus App 20150203960 - YEDLA; SRINIVASA ; et al.	2015-07-23
Temperature uniformity measurement during thermal processing Grant 8,109,669 - Aderhold , et al. February 7, 2	2012-02-07
Atomic layer deposition processes for non-volatile memory devices Grant 8,043,907 - Ma , et al. October 25, 2	2011-10-25
Atomic Layer Deposition Processes for Non-Volatile Memory Devices App 20100102376 - Ma; Yi ; et al.	2010-04-29
Atomic layer deposition processes for non-volatile memory devices Grant 7,659,158 - Ma , et al. February 9, 2	2010-02-09
Atomic Layer Deposition Processes For Non-volatile Memory Devices App 20090242957 - Ma; Yi ; et al.	2009-10-01
Method for monitoring and calibrating temperature in semiconductor processing chambers Grant 7,572,052 - Ravi , et al. August 11, 2	2009-08-11
Novel Method For Monitoring And Calibrating Temperature In Semiconductor Processing Chambers App 20090016406 - Ravi; Jallepally ; et al.	2009-01-15
Thermally matched support ring for substrate processing chamber Grant 6,888,104 - Ranish , et al. May 3, 2	2005-05-03
Process conditions and precursors for atomic layer deposition (ALD) of AL2O3 Grant 6,620,670 - Song , et al. September 16, 2	2003-09-16
Gas jet deposition with multiple ports App 20020197416 - Majewski, Robert B. ; et al.	2002-12-26
Method and apparatus for monitoring and/or end point detecting a process Grant 6,374,150 - Redinbo , et al. April 16, 2	2002-04-16
Method And Apparatus For Monitoring And/or End Point Detecting A Process App 20020013637 - REDINBO, GREGORY F. ; et al.	2002-01-31
Silicon and oxygen ion co-implantation for metallic gettering in epitaxial wafers Grant 6,022,793 - Wijaranakula , et al. February 8, 2	2000-02-08

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