Rathsack; Benjamen M.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Rathsack; Benjamen M..The latest application filed is for "chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists".

Company Profile

3.30.35

Rathsack; Benjamen M. - Austin TX
Rathsack; Benjamen M - Austin TX
Rathsack; Benjamen M. - Richardson TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Facilitation of spin-coat planarization over feature topography during substrate fabrication Grant 10,622,267 - Burns , et al.	2020-04-14
Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes Grant 10,534,266 - Carcasi , et al. Ja	2020-01-14
Photo-sensitized chemically amplified resist (PS-CAR) simulation Grant 10,429,745 - Carcasi , et al. O	2019-10-01
Subtractive methods for creating dielectric isolation structures within open features Grant 10,170,354 - Somervell , et al. J	2019-01-01
Chemical Amplification Methods And Techniques For Developable Bottom Anti-reflective Coatings And Dyed Implant Resists App 20180315596 - Scheer; Steven ; et al.	2018-11-01
Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists Grant 10,020,195 - Scheer , et al. July 10, 2	2018-07-10
Facilitation Of Spin-coat Planarization Over Feature Topography During Substrate Fabrication App 20180096905 - Burns; Ryan L. ; et al.	2018-04-05
Use of grapho-epitaxial directed self-assembly applications to precisely cut logic lines Grant 9,793,137 - Somervell , et al. October 17, 2	2017-10-17
Photo-sensitized Chemically Amplified Resist (PS-CAR) simulation App 20170242342 - Carcasi; Michael ; et al.	2017-08-24
Controlling cleaning of a layer on a substrate using nozzles Grant 9,735,026 - Brown , et al. August 15, 2	2017-08-15
Use of topography to direct assembly of block copolymers in grapho-epitaxial applications Grant 9,715,172 - Rathsack , et al. July 25, 2	2017-07-25
Substrate backside texturing Grant 9,711,419 - Fonseca , et al. July 18, 2	2017-07-18
Methods And Techniques To Use With Photosensitized Chemically Amplified Resist Chemicals And Processes App 20170192357 - Carcasi; Michael A. ; et al.	2017-07-06
Using sub-resolution openings to aid in image reversal, directed self-assembly, and selective deposition Grant 9,633,847 - Rathsack , et al. April 25, 2	2017-04-25
Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes Grant 9,618,848 - Carcasi , et al. April 11, 2	2017-04-11
Integration of absorption based heating bake methods into a photolithography track system Grant 9,613,801 - Carcasi , et al. April 4, 2	2017-04-04
Line Pattern Collapse Mitigation Through Gap-fill Material Application App 20160363868 - SOMERVELL; Mark H. ; et al.	2016-12-15
Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist (PS-CAR) Grant 9,519,227 - Carcasi , et al. December 13, 2	2016-12-13
Techniques for Spin-on-Carbon Planarization App 20160358786 - Hooge; Joshua S. ; et al.	2016-12-08
Use Of Grapho-epitaxial Directed Self-assembly Applications To Precisely Cut Logic Lines App 20160343588 - Somervell; Mark H. ; et al.	2016-11-24
Subtractive Methods For Creating Dielectric Isolation Structures Within Open Features App 20160300756 - Somervell; Mark H. ; et al.	2016-10-13
Using Sub-resolution Openings To Aid In Image Reversal, Directed Self-assembly, And Selective Deposition App 20160300711 - Rathsack; Benjamen M. ; et al.	2016-10-13
Line pattern collapse mitigation through gap-fill material application Grant 9,454,081 - Somervell , et al. September 27, 2	2016-09-27
Use Of Topography To Direct Assembly Of Block Copolymers In Grapho-epitaxial Applications App 20160268132 - Rathsack; Benjamen M. ; et al.	2016-09-15
Use of topography to direct assembly of block copolymers in grapho-epitaxial applications Grant 9,418,860 - Somervell , et al. August 16, 2	2016-08-16
Use of grapho-epitaxial directed self-assembly to precisely cut lines Grant 9,412,611 - Somervell , et al. August 9, 2	2016-08-09
Use of topography to direct assembly of block copolymers in grapho-epitaxial applications Grant 9,349,604 - Rathsack , et al. May 24, 2	2016-05-24
Substrate Backside Texturing App 20160141169 - Fonseca; Carlos A. ; et al.	2016-05-19
Substrate backside texturing Grant 9,281,251 - Fonseca , et al. March 8, 2	2016-03-08
Substrate Backside Texturing App 20160043007 - Fonseca; Carlos A. ; et al.	2016-02-11
Integration Of Absorption Based Heating Bake Methods Into A Photolithography Track System App 20160013052 - Carcasi; Michael A. ; et al.	2016-01-14
Multi-step bake apparatus and method for directed self-assembly lithography control Grant 9,209,014 - Rathsack December 8, 2	2015-12-08
Topography minimization of neutral layer overcoats in directed self-assembly applications Grant 9,147,574 - Somervell , et al. September 29, 2	2015-09-29
Multi-step bake apparatus and method for directed self-assembly lithography control Grant 9,136,110 - Rathsack September 15, 2	2015-09-15
Methods and Techniques to use with Photosensitized Chemically Amplified Resist Chemicals and Processes App 20150241783 - CARCASI; Michael A. ; et al.	2015-08-27
Metrology For Measurement Of Photosensitizer Concentration Within Photo-sensitized Chemically-amplified Resist (ps-car) App 20150241793 - CARCASI; Michael A. ; et al.	2015-08-27
Chemical Amplification Methods and Techniques for Developable Bottom Anti-reflective Coatings and Dyed Implant Resists App 20150241782 - SCHEER; Steven ; et al.	2015-08-27
Line Pattern Collapse Mitigation Through Gap-fill Material Application App 20150125791 - SOMERVELL; Mark H. ; et al.	2015-05-07
Use Of Grapho-epitaxial Directed Self-assembly To Precisely Cut Lines App 20150108087 - Somervell; Mark H. ; et al.	2015-04-23
Use Of Topography To Direct Assembly Of Block Copolymers In Grapho-epitaxial Applications App 20150111386 - Rathsack; Benjamen M. ; et al.	2015-04-23
Use Of Topography To Direct Assembly Of Block Copolymers In Grapho-epitaxial Applications App 20150111387 - Somervell; Mark H. ; et al.	2015-04-23
Method of forming patterns using block copolymers and articles thereof Grant 9,005,877 - Rathsack , et al. April 14, 2	2015-04-14
Substrate Backside Texturing App 20150044785 - FONSECA; Carlos A. ; et al.	2015-02-12
Multi-step Bake Apparatus And Method For Directed Self-assembly Lithography Control App 20140273523 - Rathsack; Benjamen M.	2014-09-18
Integration Of Absorption Based Heating Bake Methods Into A Photolithography Track System App 20140273534 - Carcasi; Michael A. ; et al.	2014-09-18
Topography Minimization Of Neutral Layer Overcoats In Directed Self-assembly Applications App 20140273514 - Somervell; Mark H. ; et al.	2014-09-18
Multi-step Bake Apparatus And Method For Directed Self-assembly Lithography Control App 20140273522 - Rathsack; Benjamen M.	2014-09-18
Line pattern collapse mitigation through gap-fill material application Grant 8,795,952 - Somervell , et al. August 5, 2	2014-08-05
Controlling Cleaning Of A Layer On A Substrate Using Nozzles App 20140144463 - Brown; Ian J. ; et al.	2014-05-29
Method Of Forming Patterns Using Block Copolymers And Articles Thereof App 20130309457 - Rathsack; Benjamen M. ; et al.	2013-11-21
Method Of Slimming Radiation-sensitive Material Lines In Lithographic Applications App 20130107237 - Carcasi; Michael A. ; et al.	2013-05-02
Electrostatic post exposure bake apparatus and method Grant 8,288,174 - Rathsack , et al. October 16, 2	2012-10-16
Electrostatic Post Exposure Bake Apparatus And Method App 20120244645 - Rathsack; Benjamen M. ; et al.	2012-09-27
Use of blended solvents in defectivity prevention Grant 8,263,306 - Somervell , et al. September 11, 2	2012-09-11
Use of blended solvents in defectivity prevention Grant 8,129,089 - Somervell , et al. March 6, 2	2012-03-06
Simplified micro-bridging and roughness analysis Grant 8,108,805 - Rathsack January 31, 2	2012-01-31
Line Pattern Collapse Mitigation Through Gap-fill Material Application App 20110205505 - SOMERVELL; Mark H. ; et al.	2011-08-25
Use of Blended Solvents in Defectivity Prevention App 20100104975 - SOMERVELL; Mark H. ; et al.	2010-04-29
Use of Blended Solvents in Defectivity Prevention App 20100101487 - SOMERVELL; Mark H. ; et al.	2010-04-29
Enhanced process yield using a hot-spot library Grant 7,673,278 - Rathsack , et al. March 2, 2	2010-03-02
Enhanced Process Yield Using a Hot-Spot Library App 20090144691 - Rathsack; Benjamen M. ; et al.	2009-06-04
Use of blended solvents in defectivity prevention App 20060241004 - Somervell; Mark H. ; et al.	2006-10-26

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