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Method for prediction of premature dielectric breakdown in a semiconductor Grant 8,053,257 - Chanda , et al. November 8, 2 | 2011-11-08 |
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Structure for modeling stress-induced degradation of conductive interconnects App 20080231312 - Chanda; Kaushik ;   et al. | 2008-09-25 |
Method For Prediction Of Premature Dielectric Breakdown In A Semiconductor App 20080174334 - Chanda; Kaushik ;   et al. | 2008-07-24 |
Structure and method for monitoring stress-induced degradation of conductive interconnects Grant 7,397,260 - Chanda , et al. July 8, 2 | 2008-07-08 |
Method for monitoring stress-induced degradation of conductive interconnects App 20080107149 - Chanda; Kaushik ;   et al. | 2008-05-08 |
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Structure And Method For Monitoring Stress-induced Degradation Of Conductive Interconnects App 20070115018 - Chanda; Kaushik ;   et al. | 2007-05-24 |
Dual Damascene Multi-level Metallization App 20070111510 - Agarwala; Birendra N. ;   et al. | 2007-05-17 |
Method For Prediction Of Premature Dielectric Breakdown In A Semiconductor App 20060281338 - Chanda; Kaushik ;   et al. | 2006-12-14 |
Via barrier layers continuous with metal line barrier layers at notched or dielectric mesa portions in metal lines Grant 7,138,714 - Nguyen , et al. November 21, 2 | 2006-11-21 |
Reliability And Functionality Improvements On Copper Interconnects With Wide Metal Line Below The Via App 20060180930 - Nguyen; Du B. ;   et al. | 2006-08-17 |
Stacked via-stud with improved reliability in copper metallurgy App 20060014376 - Agarwala; Birendra N. ;   et al. | 2006-01-19 |
Stacked via-stud with improved reliability in copper metallurgy Grant 6,972,209 - Agarwala , et al. December 6, 2 | 2005-12-06 |
Structure And Method For Eliminating Time Dependent Dielectric Breakdown Failure Of Low-k Material App 20040256729 - Agarwala, Birendra N. ;   et al. | 2004-12-23 |
Structure and method for eliminating time dependent dielectric breakdown failure of low-k material Grant 6,825,561 - Agarwala , et al. November 30, 2 | 2004-11-30 |
Stacked via-stud with improved reliability in copper metallurgy App 20040101663 - Agarwala, Birendra N. ;   et al. | 2004-05-27 |
Dual damascene multi-level metallization App 20020182855 - Agarwala, Birendra N. ;   et al. | 2002-12-05 |
Copper interconnections with enhanced electromigration resistance and reduced defect sensitivity and method of forming same Grant 6,348,731 - Ashley , et al. February 19, 2 | 2002-02-19 |
Self-aligned composite insulator with sub-half-micron multilevel high density electrical interconnections and process thereof Grant 6,294,835 - Dalal , et al. September 25, 2 | 2001-09-25 |
Method of forming copper interconnections with enhanced electromigration resistance and reduced defect sensitivity Grant 6,287,954 - Ashley , et al. September 11, 2 | 2001-09-11 |
Method of forming copper interconnections with enhanced electromigration resistance and reduced defect sensitivity Grant 6,130,161 - Ashley , et al. October 10, 2 | 2000-10-10 |
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Method of producing planar metal-to-metal capacitor for use in integrated circuits Grant 6,069,051 - Nguyen , et al. May 30, 2 | 2000-05-30 |
Method for providing electrically fusible links in copper interconnection Grant 6,033,939 - Agarwala , et al. March 7, 2 | 2000-03-07 |
Sub-half-micron multi-level interconnection structure and process thereof Grant 5,981,374 - Dalal , et al. November 9, 1 | 1999-11-09 |
Method for producing interlevel stud vias Grant 5,252,516 - Nguyen , et al. October 12, 1 | 1993-10-12 |