Rathi; Somilkumar J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Rathi; Somilkumar J..The latest application filed is for "systems and methods of placing substrates in semiconductor manufacturing equipment".

Company Profile

4.2.6

Rathi; Somilkumar J. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Conformal titanium nitride-based thin films and methods of forming same Grant 11,361,992 - Mukherjee , et al. June 14, 2	2022-06-14
Systems and methods of placing substrates in semiconductor manufacturing equipment Grant 11,328,944 - Finkelman , et al. May 10, 2	2022-05-10
Systems And Methods Of Placing Substrates In Semiconductor Manufacturing Equipment App 20210125849 - Finkelman; Alex ; et al.	2021-04-29
Conformal And Smooth Titanium Nitride Layers And Methods Of Forming The Same App 20210104396 - Jung; Sung-Hoon ; et al.	2021-04-08
Conformal Titanium Nitride-based Thin Films And Methods Of Forming Same App 20210104433 - Mukherjee; Niloy ; et al.	2021-04-08
Smooth Titanium Nitride Layers And Methods Of Forming The Same App 20210104397 - Jung; Sung-Hoon ; et al.	2021-04-08
Titanium Silicon Nitride Barrier Layer App 20210104665 - Heo; Jae Seok ; et al.	2021-04-08
Multi-region Diffusion Barrier Containing Titanium, Silicon And Nitrogen App 20180350657 - Vats; Vinayak Veer ; et al.	2018-12-06

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