Patent | Date |
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Ta--Cu alloy material for extreme ultraviolet mask absorber Grant 11,209,727 - Liu , et al. December 28, 2 | 2021-12-28 |
Cleaning solution mixing system with ultra-dilute cleaning solution and method of operation thereof Grant 10,935,896 - Rastegar March 2, 2 | 2021-03-02 |
Ta-Cu Alloy Material For Extreme Ultraviolet Mask Absorber App 20200133111 - Liu; Shuwei ;   et al. | 2020-04-30 |
Extreme Ultraviolet Mask Absorber Materials App 20200026178 - Jindal; Vibhu ;   et al. | 2020-01-23 |
Cleaning Solution Mixing System With Ultra-Dilute Cleaning Solution And Method Of Operation Thereof App 20180024447 - Rastegar; Abbas | 2018-01-25 |
Surface Cleaning Method and Apparatus Using Surface Acoustic Wave Devices App 20150206738 - Rastegar; Abbas | 2015-07-23 |
Light-assisted Acoustic Cleaning Tool App 20150158056 - RASTEGAR; Abbas | 2015-06-11 |
Apparatus With Surface Protector To Inhibit Contamination App 20150062546 - RASTEGAR; Abbas | 2015-03-05 |
Apparatus with surface protector to inhibit contamination Grant 8,888,086 - Rastegar November 18, 2 | 2014-11-18 |
Gigasonic Brush for Cleaning Surfaces App 20140123997 - Rastegar; Abbas | 2014-05-08 |
Method And Apparatus For Surface Cleaning App 20140053868 - Rastegar; Abbas ;   et al. | 2014-02-27 |
Facilitating Streaming Fluid Using Acoustic Waves App 20130340838 - RASTEGAR; Abbas | 2013-12-26 |
Gigasonic brush for cleaning surfaces Grant 8,539,969 - Rastegar September 24, 2 | 2013-09-24 |
Apparatus With Surface Protector To Inhibit Contamination App 20120286463 - RASTEGAR; Abbas | 2012-11-15 |
Method and apparatus for an in-situ ultraviolet cleaning tool Grant 8,206,510 - Rastegar , et al. June 26, 2 | 2012-06-26 |
Gigasonic Brush For Cleaning Surfaces App 20120024313 - Rastegar; Abbas | 2012-02-02 |
Hot source cleaning system Grant 8,097,091 - Rastegar , et al. January 17, 2 | 2012-01-17 |
Apparatus, System, and Method for Nanoimprint Template with a Backside Recess Having Tapered Sidewalls App 20110272838 - Malloy; Matt ;   et al. | 2011-11-10 |
Method and Apparatus for an In-Situ Ultraviolet Cleaning Tool App 20110132394 - Rastegar; Abbas ;   et al. | 2011-06-09 |
Method and apparatus for an in-situ ultraviolet cleaning tool Grant 7,921,859 - Rastegar , et al. April 12, 2 | 2011-04-12 |
Laser nozzle methods and apparatus for surface cleaning Grant 7,629,556 - Rastegar December 8, 2 | 2009-12-08 |
Method and apparatus for colloidal particle cleaning Grant 7,497,913 - Rastegar , et al. March 3, 2 | 2009-03-03 |
Cleaning a Mask Substrate App 20080302390 - Rastegar; Abbas | 2008-12-11 |
Hot Source Cleaning System App 20080264446 - Rastegar; Abbas ;   et al. | 2008-10-30 |
Laser Nozzle Methods And Apparatus For Surface Cleaning App 20070163715 - Rastegar; Abbas | 2007-07-19 |
Method and apparatus for colloidal particle cleaning App 20060260662 - Rastegar; Abbas ;   et al. | 2006-11-23 |
Laser nozzle cleaning tool App 20060213615 - Rastegar; Abbas | 2006-09-28 |
Method and apparatus for an in-situ ultraviolet cleaning tool App 20060207629 - Rastegar; Abbas ;   et al. | 2006-09-21 |