| Patent | Date |
|---|
High temperature chemical vapor deposition lid
Grant 11,447,866 - Mustafa , et al. September 20, 2 | 2022-09-20 |
High temperature rotation module for a processing chamber
Grant 11,427,912 - Mustafa , et al. August 30, 2 | 2022-08-30 |
Showerhead for ALD precursor delivery
Grant 11,420,217 - Mustafa , et al. August 23, 2 | 2022-08-23 |
Pumping liner for improved flow uniformity
Grant 11,415,147 - Mustafa , et al. August 16, 2 | 2022-08-16 |
Valve for varying flow conductance under vacuum
Grant 11,408,530 - Mustafa , et al. August 9, 2 | 2022-08-09 |
Compression fitting
Grant D959,516 - Mustafa , et al. August 2, 2 | 2022-08-02 |
Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate
Grant 11,384,432 - Rasheed , et al. July 12, 2 | 2022-07-12 |
Process kit for a substrate support
Grant 11,387,134 - Mustafa , et al. July 12, 2 | 2022-07-12 |
Methods And Apparatus To Reduce Pressure Fluctuations In An Ampoule Of A Chemical Delivery System
App 20220162752 - DURUKAN; Ilker ; et al. | 2022-05-26 |
Apparatus And Methods For Gas Phase Particle Reduction
App 20220064785 - MUSTAFA; Muhannad ; et al. | 2022-03-03 |
Valve For Varying Flow Conductance Under Vacuum
App 20220042617 - MUSTAFA; Muhannad ; et al. | 2022-02-10 |
Process kit for improving edge film thickness uniformity on a substrate
Grant 11,236,424 - Mustafa , et al. February 1, 2 | 2022-02-01 |
Processing System And Method Of Controlling Conductance In A Processing System
App 20210404059 - RASHEED; Muhammad M. ; et al. | 2021-12-30 |
High Temperature Chemical Vapor Deposition Lid
App 20210395892 - Mustafa; Muhannad ; et al. | 2021-12-23 |
Apparatus for multi-flow precursor dosage
Grant 11,186,910 - Mustafa , et al. November 30, 2 | 2021-11-30 |
Gas distribution assembly lid
Grant D936,187 - Mustafa , et al. November 16, 2 | 2021-11-16 |
Heater Cover Plate For Uniformity Improvement
App 20210343557 - RASHEED; Muhammad M. ; et al. | 2021-11-04 |
High Temperature Vacuum Seal
App 20210317577 - Mustafa; Muhannad ; et al. | 2021-10-14 |
Sequential Pulse And Purge For Ald Processes
App 20210262092 - Rasheed; Muhammad M. ; et al. | 2021-08-26 |
Lids And Lid Assembly Kits For Atomic Layer Deposition Chambers
App 20210246552 - RASHEED; Muhammad M. ; et al. | 2021-08-12 |
Apparatus And Methods To Prevent Particle Entry Into Gas Lines
App 20210231242 - Mustafa; Muhannad ; et al. | 2021-07-29 |
Showerhead For Ald Precursor Delivery
App 20210187521 - MUSTAFA; MUHANNAD ; et al. | 2021-06-24 |
Process Kit For Improving Edge Film Thickness Uniformity On A Substrate
App 20210130953 - Mustafa; Muhannad ; et al. | 2021-05-06 |
Ald Cycle Time Reduction Using Process Chamber Lid With Tunable Pumping
App 20210087686 - Mustafa; Muhannad ; et al. | 2021-03-25 |
Apparatus For Improved Flow Control In Process Chambers
App 20200377998 - Mustafa; Muhannad ; et al. | 2020-12-03 |
Pumping Liner For Improved Flow Uniformity
App 20200378402 - Mustafa; Muhannad ; et al. | 2020-12-03 |
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process
App 20200357616 - ALLEN; Adolph Miller ; et al. | 2020-11-12 |
High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process
Grant 10,763,090 - Allen , et al. Sep | 2020-09-01 |
Quick disconnect resistance temperature detector assembly for rotating pedestal
Grant 10,704,142 - Mustafa , et al. | 2020-07-07 |
Process kit design for in-chamber heater and wafer rotating mechanism
Grant 10,704,147 - Rasheed , et al. | 2020-07-07 |
Apparatus For Multi-Flow Precursor Dosage
App 20200087789 - Mustafa; Muhannad ; et al. | 2020-03-19 |
Gimbal assembly for heater pedestal
Grant 10,571,069 - Mustafa , et al. Feb | 2020-02-25 |
Apparatus and method for providing a uniform flow of gas
Grant 10,519,546 - Jallepally , et al. Dec | 2019-12-31 |
High Temperature Rotation Module For A Processing Chamber
App 20190390337 - MUSTAFA; MUHANNAD ; et al. | 2019-12-26 |
Atomic layer deposition chamber with thermal lid
Grant 10,407,771 - Cui , et al. Sept | 2019-09-10 |
Process Kit For A Substrate Support
App 20190229007 - MUSTAFA; MUHANNAD ; et al. | 2019-07-25 |
Apparatus And Method For Providing A Uniform Flow Of Gas
App 20190078205 - Jallepally; Ravi ; et al. | 2019-03-14 |
Gimbal Assembly For Heater Pedestal
App 20190078725 - MUSTAFA; MUHANNAD ; et al. | 2019-03-14 |
Surface treated aluminum nitride baffle
Grant 10,214,815 - Rasheed , et al. Feb | 2019-02-26 |
Showerhead And Process Chamber Incorporating Same
App 20190048467 - SANCHEZ; MARIO DAN ; et al. | 2019-02-14 |
Target retaining apparatus
Grant 10,199,204 - Yedla , et al. Fe | 2019-02-05 |
Quick Disconnect Resistance Temperature Detector Assembly For Rotating Pedestal
App 20190032210 - MUSTAFA; Muhannad ; et al. | 2019-01-31 |
Apparatus and method for providing a uniform flow of gas
Grant 10,167,553 - Rasheed , et al. J | 2019-01-01 |
Slip Ring For Use In Rotatable Substrate Support
App 20180358768 - Mustafa; Muhannad ; et al. | 2018-12-13 |
Extended dark space shield
Grant 10,096,455 - Nguyen , et al. October 9, 2 | 2018-10-09 |
Sputtering target for PVD chamber
Grant 10,060,024 - Liu , et al. August 28, 2 | 2018-08-28 |
Process Kit Design For In-chamber Heater And Wafer Rotating Mechanism
App 20180155838 - RASHEED; Muhammad M. ; et al. | 2018-06-07 |
Physical vapor deposition (PVD) target having low friction pads
Grant 9,960,021 - Riker , et al. May 1, 2 | 2018-05-01 |
Oxidized showerhead and process kit parts and methods of using same
Grant 9,914,999 - Rasheed , et al. March 13, 2 | 2018-03-13 |
Methods and apparatus for liquid chemical delivery
Grant 9,914,632 - Durukan , et al. March 13, 2 | 2018-03-13 |
Sputtering Target for PVD Chamber
App 20170350001 - Liu; Zhendong ; et al. | 2017-12-07 |
Apparatus And Method For Providing A Uniform Flow Of Gas
App 20170283947 - Rasheed; Muhammad M. ; et al. | 2017-10-05 |
Sputtering target for PVD chamber
Grant 9,752,228 - Liu , et al. September 5, 2 | 2017-09-05 |
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process
App 20170029941 - ALLEN; Adolph Miller ; et al. | 2017-02-02 |
Oxidized Showerhead And Process Kit Parts And Methods Of Using Same
App 20160319428 - RASHEED; Muhammad M. ; et al. | 2016-11-03 |
Atomic Layer Deposition Chamber With Funnel-shaped Gas Dispersion Channel And Gas Distribution Plate
App 20160312360 - RASHEED; Muhammad M. ; et al. | 2016-10-27 |
Selectively groundable cover ring for substrate process chambers
Grant 9,472,443 - Rasheed , et al. October 18, 2 | 2016-10-18 |
Surface Treated Aluminum Nitride Baffle
App 20160145743 - RASHEED; MUHAMMAD M. ; et al. | 2016-05-26 |
Atomic Layer Deposition Chamber With Thermal Lid
App 20160097119 - CUI; ANQING ; et al. | 2016-04-07 |
Variable radius dual magnetron
Grant 9,281,167 - Nguyen , et al. March 8, 2 | 2016-03-08 |
Methods And Apparatus For Liquid Chemical Delivery
App 20160052772 - DURUKAN; ILKER ; et al. | 2016-02-25 |
Surface treated aluminum nitride baffle
Grant 9,222,172 - Rasheed , et al. December 29, 2 | 2015-12-29 |
Method And Apparatus For Improving Gas Flow In A Substrate Processing Chamber
App 20150345019 - YUAN; XIAOXIONG ; et al. | 2015-12-03 |
Target Retaining Apparatus
App 20150203960 - YEDLA; SRINIVASA ; et al. | 2015-07-23 |
Uniformity tuning capable ESC grounding kit for RF PVD chamber
Grant 9,087,679 - Rasheed , et al. July 21, 2 | 2015-07-21 |
Physical Vapor Deposition (pvd) Target Having Low Friction Pads
App 20150170888 - RIKER; MARTIN LEE ; et al. | 2015-06-18 |
Extended Dark Space Shield
App 20150075980 - NGUYEN; THANH ; et al. | 2015-03-19 |
PVD sputtering target with a protected backing plate
Grant 8,968,537 - Rasheed , et al. March 3, 2 | 2015-03-03 |
Low resistivity tungsten PVD with enhanced ionization and RF power coupling
Grant 8,895,450 - Cao , et al. November 25, 2 | 2014-11-25 |
Selectively Groundable Cover Ring For Substrate Process Chambers
App 20140262763 - RASHEED; MUHAMMAD M. ; et al. | 2014-09-18 |
Variable radius dual magnetron
App 20140238843 - Nguyen; Thanh X. ; et al. | 2014-08-28 |
Chamber Pasting Method In A Pvd Chamber For Reactive Re-sputtering Dielectric Material
App 20140110248 - CAO; Yong ; et al. | 2014-04-24 |
Low Resistivity Tungsten Pvd With Enhanced Ionization And Rf Power Coupling
App 20140042016 - CAO; Yong ; et al. | 2014-02-13 |
Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming
Grant 8,558,299 - Cao , et al. October 15, 2 | 2013-10-15 |
Low profile process kit
Grant 8,409,355 - Rasheed , et al. April 2, 2 | 2013-04-02 |
Ceramic cover wafers of aluminum nitride or beryllium oxide
Grant 8,252,410 - Rasheed August 28, 2 | 2012-08-28 |
Uniformity Tuning Capable Esc Grounding Kit For Rf Pvd Chamber
App 20120211354 - Rasheed; Muhammad M. ; et al. | 2012-08-23 |
Pvd Sputtering Target With A Protected Backing Plate
App 20120199469 - RASHEED; Muhammad M. ; et al. | 2012-08-09 |
Low Resistivity Tungsten Pvd With Enhanced Ionization And Rf Power Coupling
App 20110303960 - CAO; YONG ; et al. | 2011-12-15 |
Method and apparatus for excimer curing
Grant 8,022,377 - Lubomirsky , et al. September 20, 2 | 2011-09-20 |
Physical Vapor Deposition With A Variable Capacitive Tuner and Feedback Circuit
App 20110209995 - Rasheed; Muhammad M. ; et al. | 2011-09-01 |
Multi-port pumping system for substrate processing chambers
Grant 7,964,040 - Rasheed , et al. June 21, 2 | 2011-06-21 |
Process Kit For Rf Physical Vapor Deposition
App 20110036709 - Hawrylchak; Lara ; et al. | 2011-02-17 |
Thermal management of inductively coupled plasma reactors
Grant 7,811,411 - Lu , et al. October 12, 2 | 2010-10-12 |
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process
App 20100252417 - Allen; Adolph Miller ; et al. | 2010-10-07 |
Sputtering Target for PVD Chamber
App 20100252416 - Liu; Zhendong ; et al. | 2010-10-07 |
Gas distribution system for improved transient phase deposition
Grant 7,722,737 - Gondhalekar , et al. May 25, 2 | 2010-05-25 |
Surface Treated Aluminum Nitride Baffle
App 20100048028 - Rasheed; Muhammad M. ; et al. | 2010-02-25 |
Low Profile Process Kit
App 20090266299 - RASHEED; MUHAMMAD M. ; et al. | 2009-10-29 |
Method And Apparatus For Excimer Curing
App 20090261276 - LUBOMIRSKY; Dmitry ; et al. | 2009-10-22 |
Multi-port Pumping System For Substrate Processing Chambers
App 20090120464 - Rasheed; Muhammad M. ; et al. | 2009-05-14 |
Ceramic Cover Wafers Of Aluminum Nitride Or Beryllium Oxide
App 20090068433 - RASHEED; MUHAMMAD M. | 2009-03-12 |
Gas Distribution System for Improved Transient Phase Deposition
App 20080041821 - Gondhalekar; Sudhir ; et al. | 2008-02-21 |
Enhanced magnetic shielding for plasma-based semiconductor processing tool
App 20070062449 - Mungekar; Hemant P. ; et al. | 2007-03-22 |
Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gas
Grant 7,183,227 - Rasheed , et al. February 27, 2 | 2007-02-27 |
Thermal management of inductively coupled plasma reactors
App 20070034153 - Lu; Siqing ; et al. | 2007-02-15 |
Use Of Enhanced Turbomolecular Pump For Gapfill Deposition Using High Flows Of Low-mass Fluent Gas
App 20060225648 - Rasheed; Muhammad M. ; et al. | 2006-10-12 |
Gas distribution system for improved transient phase deposition
App 20060113038 - Gondhalekar; Sudhir ; et al. | 2006-06-01 |
Enhanced magnetic shielding for plasma-based semiconductor processing tool
App 20060024451 - Mungkekar; Hemant P. ; et al. | 2006-02-02 |
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