| Patent | Date |
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TiN hard mask and etch residue removal
Grant 10,711,227 - Liu , et al. | 2020-07-14 |
Method and precursors for manufacturing 3D devices
Grant 10,354,860 - Li , et al. July 16, 2 | 2019-07-16 |
Compositions and methods using same for carbon doped silicon containing films
Grant 10,145,008 - Chandra , et al. De | 2018-12-04 |
TiN Hard Mask and Etch Residue Removal
App 20180251711 - Liu; Wen Dar ; et al. | 2018-09-06 |
TiN hard mask and etch residual removal
Grant 9,976,111 - Liu , et al. May 22, 2 | 2018-05-22 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films
App 20180023192 - Chandra; Haripin ; et al. | 2018-01-25 |
TiN Hard Mask And Etch Residual Removal
App 20170107460 - Liu; Wen Dar ; et al. | 2017-04-20 |
Cleaning formulations
Grant 9,536,730 - Lee , et al. January 3, 2 | 2017-01-03 |
Composition for titanium nitride hard mask and etch residue removal
Grant 9,472,420 - Casteel, Jr. , et al. October 18, 2 | 2016-10-18 |
Method And Precursors For Manufacturing 3d Devices
App 20160225616 - Li; Jianheng ; et al. | 2016-08-04 |
Stripping and Cleaning Compositions for Removal of Thick Film Resist
App 20160152930 - Egbe; Matthew I. ; et al. | 2016-06-02 |
Method for wafer dicing and composition useful thereof
Grant 9,328,318 - Tamboli , et al. May 3, 2 | 2016-05-03 |
Water-rich stripping and cleaning formulation and method for using same
Grant 9,201,308 - Rao , et al. December 1, 2 | 2015-12-01 |
Composition for Titanium Nitride Hard Mask and Etch Residue Removal
App 20150175943 - Casteel, JR.; William Jack ; et al. | 2015-06-25 |
Method for wafer dicing and composition useful thereof
Grant 8,883,701 - Tamboli , et al. November 11, 2 | 2014-11-11 |
Formulations and method for post-CMP cleaning
Grant 8,765,653 - Tamboli , et al. July 1, 2 | 2014-07-01 |
Method for Wafer Dicing and Composition Useful Thereof
App 20140170835 - Tamboli; Dnyanesh Chandrakant ; et al. | 2014-06-19 |
Cleaning Formulations
App 20140109931 - Lee; Yi Chia ; et al. | 2014-04-24 |
Stripping and Cleaning Compositions for Removal of Thick Film Resist
App 20140100151 - Egbe; Matthew I. ; et al. | 2014-04-10 |
Process for inhibiting corrosion and removing contaminant from a surface during wafer dicing and composition useful therefor
Grant 8,580,656 - Collier , et al. November 12, 2 | 2013-11-12 |
Water-rich Stripping And Cleaning Formulation And Method For Using Same
App 20130296215 - RAO; Madhukar Bhaskara ; et al. | 2013-11-07 |
Water-rich stripping and cleaning formulation and method for using same
Grant 8,518,865 - Rao , et al. August 27, 2 | 2013-08-27 |
Compositions and Methods for Texturing of Silicon Wafers
App 20130130508 - Wu; Aiping ; et al. | 2013-05-23 |
Wet clean compositions for CoWP and porous dielectrics
Grant 8,361,237 - Wu , et al. January 29, 2 | 2013-01-29 |
Stripper for dry film removal
Grant 8,357,646 - Liu , et al. January 22, 2 | 2013-01-22 |
Compositions and Methods for Texturing of Silicon Wafers
App 20120295447 - Tamboli; Dnyanesh Chandrakant ; et al. | 2012-11-22 |
Method for Wafer Dicing and Composition Useful Thereof
App 20120009762 - Tamboli; Dnyanesh Chandrakant ; et al. | 2012-01-12 |
Water-rich Stripping And Cleaning Formulation And Method For Using Same
App 20110212866 - Rao; Madhukar Bhaskara ; et al. | 2011-09-01 |
Method and composition for restoring dielectric properties of porous dielectric materials
Grant 7,977,121 - Tamboli , et al. July 12, 2 | 2011-07-12 |
Formulations And Method For Post-CMP Cleaning
App 20110136717 - Tamboli; Dnyanesh Chandrakant ; et al. | 2011-06-09 |
Wet Clean Compositions for CoWP and Porous Dielectrics
App 20100152086 - Wu; Aiping ; et al. | 2010-06-17 |
Process for Inhibiting Corrosion and Removing Contaminant from a Surface During Wafer Dicing and Composition Useful Therefor
App 20100009517 - Collier; Terence Quintin ; et al. | 2010-01-14 |
Stripper For Copper/Low k BEOL Clean
App 20090229629 - Lee; Yi-Chia ; et al. | 2009-09-17 |
Stripper For Dry Film Removal
App 20090227483 - Liu; Wen Dar ; et al. | 2009-09-10 |
Adsorbent for water removal from ammonia
Grant 7,446,078 - Dong , et al. November 4, 2 | 2008-11-04 |
Method and composition for restoring dielectric properties of porous dielectric materials
App 20080118995 - Tamboli; Dnyanesh Chandrakant ; et al. | 2008-05-22 |
Process for recovery, purification, and recycle of argon
Grant 7,361,316 - Rao April 22, 2 | 2008-04-22 |
Process for production of isotopes
Grant 7,302,812 - Okasinski , et al. December 4, 2 | 2007-12-04 |
Cleaning formulations
App 20070179072 - Rao; Madhukar Bhaskara ; et al. | 2007-08-02 |
Processing of substrates with dense fluids comprising acetylenic diols and/or alcohols
Grant 7,211,553 - Subawalla , et al. May 1, 2 | 2007-05-01 |
Process for the purification of NF.sub.3
Grant 7,074,378 - Hart , et al. July 11, 2 | 2006-07-11 |
Dense fluid compositions and processes using same for article treatment and residue removal
App 20060081273 - McDermott; Wayne Thomas ; et al. | 2006-04-20 |
Process for the purification of NF3
App 20050163695 - Hart, James Joseph ; et al. | 2005-07-28 |
Process For Removing Water From Ammonia
App 20050120581 - Chiang, Robert Ling ; et al. | 2005-06-09 |
Process for removing water from ammonia
Grant 6,892,473 - Chiang , et al. May 17, 2 | 2005-05-17 |
Process for production of isotopes
App 20050044886 - Okasinski, Matthew Joseph ; et al. | 2005-03-03 |
Processing of substrates with dense fluids comprising acetylenic diols and/or alcohols
App 20050029490 - Subawalla, Hoshang ; et al. | 2005-02-10 |
Processing of semiconductor substrates with dense fluids comprising acetylenic diols and/or alcohols
App 20050029492 - Subawalla, Hoshang ; et al. | 2005-02-10 |
Process for recovery, purification, and recycle of argon
App 20050025678 - Rao, Madhukar Bhaskara | 2005-02-03 |
Process for recovery, purification, and recycle of argon
Grant 6,838,066 - Rao January 4, 2 | 2005-01-04 |
Adsorbent for moisture removal from fluorine-containing fluids
Grant 6,709,487 - Dong , et al. March 23, 2 | 2004-03-23 |
Process for recovery, purification, and recycle of argon
App 20040052708 - Rao, Madhukar Bhaskara | 2004-03-18 |
Adsorbent for water removal from ammonia
App 20040009873 - Dong, Chun Christine ; et al. | 2004-01-15 |
Carbonaceous adsorbent membranes for gas dehydration
Grant 6,004,374 - Rao , et al. December 21, 1 | 1999-12-21 |
Hydrogen recovery by pressure swing adsorption integrated with adsorbent membranes
Grant 5,753,010 - Sircar , et al. May 19, 1 | 1998-05-19 |
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