Ranish; Joseph M
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ranish; Joseph M.The latest application filed is for "method and apparatus for measuring temperature".
Company Profile
28.160.187
- Ranish; Joseph M - San Jose CA
- Ranish; Joseph M. - San Jose CA
Patent Activity
| Patent | Date |
|---|---|
| Apparatus and method for controlling a flow process material to a deposition chamber Grant 11,393,703 - Lerner , et al. July 19, 2 | 2022-07-19 |
| Circular lamp arrays Grant 11,337,277 - Ranish May 17, 2 | 2022-05-17 |
| Method And Apparatus For Measuring Temperature App 20220057268 - RANISH; Joseph M. | 2022-02-24 |
| Simplified Lamp Design App 20210398793 - RANISH; Joseph M. | 2021-12-23 |
| Method and apparatus for measuring temperature Grant 11,162,845 - Ranish November 2, 2 | 2021-11-02 |
| Simplified lamp design Grant 11,133,173 - Ranish September 28, 2 | 2021-09-28 |
| Multi Zone Spot Heating In Epi App 20210285105 - LAU; Shu-Kwan ; et al. | 2021-09-16 |
| Pulse Train Annealing Method And Apparatus App 20210220949 - MOFFATT; Stephen ; et al. | 2021-07-22 |
| Pulse train annealing method and apparatus Grant 11,040,415 - Moffatt , et al. June 22, 2 | 2021-06-22 |
| Multi zone spot heating in epi Grant 11,021,795 - Lau , et al. June 1, 2 | 2021-06-01 |
| Vapor Delivery Methods And Apparatus App 20210069745 - LERNER; Alexander N. ; et al. | 2021-03-11 |
| Annealing Apparatus Using Two Wavelengths Of Radiation App 20210053147 - JENNINGS; Dean ; et al. | 2021-02-25 |
| Optical system Grant 10,872,790 - Ranish December 22, 2 | 2020-12-22 |
| Annealing apparatus using two wavelengths of radiation Grant 10,857,623 - Jennings , et al. December 8, 2 | 2020-12-08 |
| System For Non Radial Temperature Control For Rotating Substrates App 20200373212 - ADERHOLD; Wolfgang R. ; et al. | 2020-11-26 |
| Lamp base adapter design for baseless lamps Grant 10,820,379 - Ranish , et al. October 27, 2 | 2020-10-27 |
| System for non radial temperature control for rotating substrates Grant 10,741,457 - Aderhold , et al. A | 2020-08-11 |
| Sol Gel Coated Support Ring App 20200251375 - Kind Code | 2020-08-06 |
| Direct current lamp driver for substrate processing Grant 10,734,257 - Serebryanov , et al. | 2020-08-04 |
| Light pipe window structure for low pressure thermal processes Grant 10,727,093 - Brillhart , et al. | 2020-07-28 |
| Light pipe arrays for thermal chamber applications and thermal processes Grant 10,699,922 - Ranish , et al. | 2020-06-30 |
| Sol gel coated support ring Grant 10,672,641 - Ranish | 2020-06-02 |
| Support ring with encapsulated light barrier Grant 10,665,484 - Ranish | 2020-05-26 |
| Anneal chamber with getter Grant 10,661,223 - Ranish | 2020-05-26 |
| Substrate processing system having susceptorless substrate support with enhanced substrate heating control Grant 10,610,884 - Ranish , et al. | 2020-04-07 |
| Lamp Base Adapter Design For Baseless Lamps App 20200053836 - RANISH; Joseph M. ; et al. | 2020-02-13 |
| Lamp Cross-section For Reduced Coil Heating App 20200035480 - RANISH; JOSEPH M. | 2020-01-30 |
| Circular Lamp Arrays App 20200022223 - RANISH; Joseph M. | 2020-01-16 |
| Method And Apparatus For Measuring Temperature App 20190391017 - RANISH; Joseph M. | 2019-12-26 |
| Apparatus And Method For Controlling A Flow Process Material To A Deposition Chamber App 20190382890 - LERNER; ALEXANDER ; et al. | 2019-12-19 |
| Light Pipe Window Structure For Thermal Chamber Applications And Processes App 20190385872 - RANISH; Joseph M. ; et al. | 2019-12-19 |
| Simplified Lamp Design App 20190385833 - RANISH; Joseph M. | 2019-12-19 |
| Methods and apparatus for delivering process gases to a substrate Grant 10,486,183 - Ranish Nov | 2019-11-26 |
| Lamp cross-section for reduced coil heating Grant 10,468,242 - Ranish No | 2019-11-05 |
| Upper dome with injection assembly Grant 10,458,040 - Brillhart , et al. Oc | 2019-10-29 |
| Simplified lamp design Grant 10,453,670 - Ranish Oc | 2019-10-22 |
| Light pipe window structure for thermal chamber applications and processes Grant 10,410,890 - Ranish , et al. Sept | 2019-09-10 |
| Apparatus and methods for low temperature measurement in a wafer processing system Grant 10,409,306 - Ranish Sept | 2019-09-10 |
| Lamphead PCB with flexible standoffs Grant 10,405,375 - Ranish , et al. Sep | 2019-09-03 |
| Substrate processing system having susceptorless substrate support with enhanced substrate heating control Grant 10,376,916 - Ranish , et al. A | 2019-08-13 |
| Support ring with masked edge Grant 10,373,859 - Behdjat , et al. | 2019-08-06 |
| Lamp driver for low pressure environment Grant 10,332,763 - Serebryanov , et al. | 2019-06-25 |
| Diffuser for lamp heating assembly Grant 10,327,284 - Ranish | 2019-06-18 |
| Adapter for replaceable lamp Grant 10,319,579 - Ranish , et al. | 2019-06-11 |
| Absorbing reflector for semiconductor processing chamber Grant 10,306,708 - Lo , et al. | 2019-05-28 |
| Multi Zone Spot Heating In Epi App 20190127851 - LAU; Shu-Kwan ; et al. | 2019-05-02 |
| Lamp base adapter design for baseless lamps Grant 10,271,383 - Ranish , et al. | 2019-04-23 |
| Circular lamp arrays Grant 10,271,382 - Ranish | 2019-04-23 |
| Rotating substrate laser anneal Grant 10,256,005 - Ranish , et al. | 2019-04-09 |
| Simplified Lamp Design App 20190096657 - Ranish; Joseph M. | 2019-03-28 |
| Substrate processing system with lamphead having temperature management Grant 10,202,707 - Ranish , et al. Feb | 2019-02-12 |
| Anneal Chamber With Getter App 20180345215 - RANISH; Joseph M. | 2018-12-06 |
| Pyrometry filter for thermal process chamber Grant 10,147,623 - Ranish , et al. De | 2018-12-04 |
| Heating modulators to improve epi uniformity tuning Grant 10,132,003 - Lau , et al. November 20, 2 | 2018-11-20 |
| Bottom processing Grant 10,128,197 - Ranish , et al. November 13, 2 | 2018-11-13 |
| Support cylinder for thermal processing chamber Grant 10,128,144 - Behdjat , et al. November 13, 2 | 2018-11-13 |
| Support Ring With Masked Edge App 20180315639 - BEHDJAT; Mehran ; et al. | 2018-11-01 |
| Simplified lamp design Grant 10,083,827 - Ranish September 25, 2 | 2018-09-25 |
| Multizone control of lamps in a conical lamphead using pyrometers Grant 10,077,508 - Ranish , et al. September 18, 2 | 2018-09-18 |
| Support ring with masked edge Grant 10,056,286 - Behdjat , et al. August 21, 2 | 2018-08-21 |
| Thermal processing chamber Grant 10,053,777 - Ranish , et al. August 21, 2 | 2018-08-21 |
| Sol Gel Coated Support Ring App 20180211865 - RANISH; Joseph M. | 2018-07-26 |
| Adapter For Replaceable Lamp App 20180204715 - Ranish; Joseph M. ; et al. | 2018-07-19 |
| Retention and insulation features for lamp Grant 10,026,630 - Iu , et al. July 17, 2 | 2018-07-17 |
| Bottom processing Grant 10,020,204 - Ranish , et al. July 10, 2 | 2018-07-10 |
| Process Chamber Having Separate Process Gas And Purge Gas Regions App 20180138031 - RANISH; Joseph M. ; et al. | 2018-05-17 |
| Optics For Controlling Light Transmitted Through A Conical Quartz Dome App 20180130653 - RANISH; Joseph M. | 2018-05-10 |
| Support Ring With Masked Edge App 20180102274 - BEHDJAT; Mehran ; et al. | 2018-04-12 |
| Annealing Apparatus Using Two Wavelengths Of Radiation App 20180099353 - JENNINGS; Dean ; et al. | 2018-04-12 |
| Easy access lamphead Grant 9,929,027 - Ranish , et al. March 27, 2 | 2018-03-27 |
| Sol gel coated support ring Grant 9,929,037 - Ranish March 27, 2 | 2018-03-27 |
| Absorbing Reflector For Semiconductor Processing Chamber App 20180084610 - LO; Kin Pong ; et al. | 2018-03-22 |
| Adapter for replaceable lamp Grant 9,922,815 - Ranish , et al. March 20, 2 | 2018-03-20 |
| Upper Dome With Injection Assembly App 20180066382 - BRILLHART; Paul ; et al. | 2018-03-08 |
| Optics for controlling light transmitted through a conical quartz dome Grant 9,905,444 - Ranish February 27, 2 | 2018-02-27 |
| Reflective deposition rings and substrate processing chambers incorporating same Grant 9,905,443 - Subramani , et al. February 27, 2 | 2018-02-27 |
| Support Ring With Encapsulated Light Barrier App 20180047597 - Ranish; Joseph M. | 2018-02-15 |
| Heating Modulators To Improve Epi Uniformity Tuning App 20180023214 - LAU; Shu-Kwan ; et al. | 2018-01-25 |
| Process chamber having separate process gas and purge gas regions Grant 9,870,919 - Ranish , et al. January 16, 2 | 2018-01-16 |
| Off-angled heating of the underside of a substrate using a lamp assembly Grant 9,863,038 - Ewert , et al. January 9, 2 | 2018-01-09 |
| Window cooling using compliant material Grant 9,863,043 - Ranish , et al. January 9, 2 | 2018-01-09 |
| Quartz Upper And Lower Domes App 20180005856 - CHANG; Anzhong ; et al. | 2018-01-04 |
| Upper dome with injection assembly Grant 9,845,550 - Brillhart , et al. December 19, 2 | 2017-12-19 |
| Absorbing lamphead face Grant 9,842,753 - Brillhart , et al. December 12, 2 | 2017-12-12 |
| Support ring with masked edge Grant 9,842,759 - Behdjat , et al. December 12, 2 | 2017-12-12 |
| Absorbing reflector for semiconductor processing chamber Grant 9,832,816 - Lo , et al. November 28, 2 | 2017-11-28 |
| Thermal Coupled Quartz Dome Heat Sink App 20170338135 - RANISH; Joseph M. ; et al. | 2017-11-23 |
| Pyrometry Filter For Thermal Process Chamber App 20170330776 - RANISH; Joseph M. ; et al. | 2017-11-16 |
| Off-angled heating of the underside of a substrate using a lamp assembly Grant 9,818,587 - Ewert , et al. November 14, 2 | 2017-11-14 |
| Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same Grant 9,814,099 - Lau , et al. November 7, 2 | 2017-11-07 |
| Dome Cooling Using Compliant Material App 20170316964 - RANISH; Joseph M. ; et al. | 2017-11-02 |
| System For Non Radial Temperature Control For Rotating Substrates App 20170309529 - ADERHOLD; Wolfgang R. ; et al. | 2017-10-26 |
| Support ring with encapsulated light barrier Grant 9,793,145 - Ranish October 17, 2 | 2017-10-17 |
| Pyrometry filter for thermal process chamber Grant 9,786,529 - Ranish , et al. October 10, 2 | 2017-10-10 |
| Oriented Laser Activated Processing Chamber App 20170271131 - MOFFATT; Stephen ; et al. | 2017-09-21 |
| Quartz upper and lower domes Grant 9,768,043 - Chang , et al. September 19, 2 | 2017-09-19 |
| Support Cylinder For Thermal Processing Cylinder App 20170263493 - BEHDJAT; Mehran ; et al. | 2017-09-14 |
| Bottom Processing App 20170263466 - RANISH; Joseph M. ; et al. | 2017-09-14 |
| Substrate Processing System Having Susceptorless Substrate Support With Enhanced Substrate Heating Control App 20170259294 - RANISH; JOSEPH M. ; et al. | 2017-09-14 |
| High density solid state light source array Grant 9,754,807 - Gerling , et al. September 5, 2 | 2017-09-05 |
| Thermal coupled quartz dome heat sink Grant 9,748,121 - Ranish , et al. August 29, 2 | 2017-08-29 |
| System for non radial temperature control for rotating substrates Grant 9,728,471 - Aderhold , et al. August 8, 2 | 2017-08-08 |
| Dome cooling using compliant material Grant 9,711,382 - Ranish , et al. July 18, 2 | 2017-07-18 |
| Substrate processing system having susceptorless substrate support with enhanced substrate heating control Grant 9,682,398 - Ranish , et al. June 20, 2 | 2017-06-20 |
| Support cylinder for thermal processing chamber Grant 9,659,809 - Behdjat , et al. May 23, 2 | 2017-05-23 |
| Bottom Processing App 20170133328 - RANISH; Joseph M. ; et al. | 2017-05-11 |
| Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20170130359 - RANISH; Joseph M. ; et al. | 2017-05-11 |
| Apparatus and method for enhancing the cool down of radiatively heated substrates Grant 9,640,412 - Aderhold , et al. May 2, 2 | 2017-05-02 |
| Lamp Base Adapter Design For Baseless Lamps App 20170105249 - RANISH; Joseph M. ; et al. | 2017-04-13 |
| Pulse Train Annealing Method And Apparatus App 20170072505 - MOFFATT; Stephen ; et al. | 2017-03-16 |
| Managing thermal budget in annealing of substrates Grant 9,595,459 - Moffatt , et al. March 14, 2 | 2017-03-14 |
| Multizone control of lamps in a conical lamphead using pyrometers Grant 9,580,835 - Ranish , et al. February 28, 2 | 2017-02-28 |
| Rapid thermal processing chamber with micro-positioning system Grant 9,564,349 - Sorabji , et al. February 7, 2 | 2017-02-07 |
| Rotating Substrate Laser Anneal App 20170032865 - RANISH; Joseph M. ; et al. | 2017-02-02 |
| Apparatus and method for improved control of heating and cooling of substrates Grant 9,552,989 - Koelmel , et al. January 24, 2 | 2017-01-24 |
| Apparatus for providing and directing heat energy in a process chamber Grant 9,543,172 - Johnson , et al. January 10, 2 | 2017-01-10 |
| Lamp for rapid thermal processing chamber Grant 9,536,728 - Ranish , et al. January 3, 2 | 2017-01-03 |
| Tubular light source having overwind Grant 9,536,729 - Ranish January 3, 2 | 2017-01-03 |
| Linear high packing density for LED arrays Grant 9,513,052 - Johnson , et al. December 6, 2 | 2016-12-06 |
| Pulse train annealing method and apparatus Grant 9,498,845 - Moffatt , et al. November 22, 2 | 2016-11-22 |
| Absorbing Lamphead Face App 20160336205 - BRILLHART; Paul ; et al. | 2016-11-17 |
| Support Cylinder For Thermal Processing Chamber App 20160300752 - BEHDJAT; Mehran ; et al. | 2016-10-13 |
| RTP lamp base with removal features Grant 9,462,636 - Ranish , et al. October 4, 2 | 2016-10-04 |
| Support Ring With Masked Edge App 20160247708 - BEHDJAT; Mehran ; et al. | 2016-08-25 |
| Substrate Processing System Having Susceptorless Substrate Support With Enhanced Substrate Heating Control App 20160243580 - RANISH; JOSEPH M. ; et al. | 2016-08-25 |
| Linear High Packing Density For Led Arrays App 20160231055 - JOHNSON; Joseph R. ; et al. | 2016-08-11 |
| Integrated solution for solid state light sources in a process chamber Grant 9,406,653 - Johnson , et al. August 2, 2 | 2016-08-02 |
| Rapid thermal processing chamber with micro-positioning system Grant 9,390,950 - Sorabji , et al. July 12, 2 | 2016-07-12 |
| Lamp Driver For Low Pressure Environment App 20160196992 - SEREBRYANOV; Oleg V. ; et al. | 2016-07-07 |
| Support cylinder for thermal processing chamber Grant 9,385,004 - Behdjat , et al. July 5, 2 | 2016-07-05 |
| Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20160138188 - RANISH; Joseph M. ; et al. | 2016-05-19 |
| Support ring with masked edge Grant 9,330,955 - Behdjat , et al. May 3, 2 | 2016-05-03 |
| Optical System App 20160111306 - RANISH; Joseph M. | 2016-04-21 |
| Linear high packing density for LED arrays Grant 9,318,360 - Johnson , et al. April 19, 2 | 2016-04-19 |
| Atmospheric Epitaxial Deposition Chamber App 20160068959 - LAU; Shu-Kwan ; et al. | 2016-03-10 |
| Pulse Train Annealing Method And Apparatus App 20160023302 - MOFFATT; STEPHEN ; et al. | 2016-01-28 |
| Light Pipe Arrays For Thermal Chamber Applications And Thermal Processes App 20160027671 - RANISH; JOSEPH M. ; et al. | 2016-01-28 |
| Apparatus and methods for positioning a substrate using capacitive sensors Grant 9,245,786 - Koelmel , et al. January 26, 2 | 2016-01-26 |
| Top wafer rotation and support Grant 9,240,341 - Serebryanov , et al. January 19, 2 | 2016-01-19 |
| Multizone control of lamps in a conical lamphead using pyrometers Grant 9,230,837 - Ranish , et al. January 5, 2 | 2016-01-05 |
| Tubular Light Source Having Overwind App 20150359044 - RANISH; Joseph M. | 2015-12-10 |
| Managing Thermal Budget In Annealing Of Substrates App 20150357215 - MOFFATT; STEPHEN ; et al. | 2015-12-10 |
| Window Cooling Using Compliant Material App 20150345023 - RANISH; Joseph M. ; et al. | 2015-12-03 |
| Retention And Insulation Features For Lamp App 20150348809 - IU; Dongming ; et al. | 2015-12-03 |
| Light Pipe Window Structure For Low Pressure Thermal Processes App 20150340257 - BRILLHART; PAUL ; et al. | 2015-11-26 |
| Substrate supporting edge ring with coating for improved soak performance Grant 9,184,085 - Ranish , et al. November 10, 2 | 2015-11-10 |
| Lamphead atmosphere Grant 9,175,908 - Ranish November 3, 2 | 2015-11-03 |
| Susceptor With Radiation Source Compensation App 20150292815 - RANISH; Joseph M. | 2015-10-15 |
| Thermal Processing Chamber App 20150267300 - RANISH; Joseph M. ; et al. | 2015-09-24 |
| Test apparatus for reflective cavity characterization Grant 9,140,647 - Ranish , et al. September 22, 2 | 2015-09-22 |
| Edge ring for a thermal processing chamber Grant 9,130,001 - Koelmel , et al. September 8, 2 | 2015-09-08 |
| Tubular light source having overwind Grant 9,129,794 - Ranish September 8, 2 | 2015-09-08 |
| Upper Dome With Injection Assembly App 20150233016 - BRILLHART; Paul ; et al. | 2015-08-20 |
| Top Wafer Rotation And Support App 20150206786 - SEREBRYANOV; Oleg ; et al. | 2015-07-23 |
| Edge ring for a thermal processing chamber Grant 9,076,828 - Koelmel , et al. July 7, 2 | 2015-07-07 |
| Support Ring With Masked Edge App 20150187630 - BEHDJAT; Mehran ; et al. | 2015-07-02 |
| Rtp Lamp Base Improvement App 20150189697 - RANISH; Joseph M. ; et al. | 2015-07-02 |
| Substrate Supporting Edge Ring With Coating For Improved Soak Performance App 20150187631 - RANISH; Joseph M. ; et al. | 2015-07-02 |
| Adapter For Replaceable Lamp App 20150179425 - RANISH; Joseph M. ; et al. | 2015-06-25 |
| Easy Access Lamphead App 20150147053 - RANISH; Joseph M. ; et al. | 2015-05-28 |
| Apparatus and methods for rapid thermal processing Grant 9,029,739 - Ranish , et al. May 12, 2 | 2015-05-12 |
| Sol Gel Coated Support Ring App 20150123337 - RANISH; Joseph M. | 2015-05-07 |
| Linear High Packing Density For Led Arrays App 20150103526 - JOHNSON; Joseph ; et al. | 2015-04-16 |
| Support Ring With Encapsulated Light Barrier App 20150093100 - RANISH; Joseph M. | 2015-04-02 |
| Top wafer rotation and support Grant 8,993,933 - Serebryanov , et al. March 31, 2 | 2015-03-31 |
| Carbon Fiber Ring Susceptor App 20150083046 - RANISH; Joseph M. ; et al. | 2015-03-26 |
| Substrate supporting edge ring with coating for improved soak performance Grant 8,979,087 - Ranish , et al. March 17, 2 | 2015-03-17 |
| Circular Lamp Arrays App 20150071623 - RANISH; Joseph M. | 2015-03-12 |
| Test Apparatus For Reflective Cavity Characterization App 20150070686 - RANISH; Joseph M. ; et al. | 2015-03-12 |
| Lamp Cross-section For Reduced Coil Heating App 20150063792 - Ranish; Joseph M. | 2015-03-05 |
| Support Cylinder For Thermal Processing Chamber App 20150050819 - BEHDJAT; Mehran ; et al. | 2015-02-19 |
| Rapid Thermal Processing Chamber with Micro-Positioning System App 20150050118 - Sorabji; Khurshed ; et al. | 2015-02-19 |
| Substrate Support With Surface Feature For Reduced Reflection And Manufacturing Techniques For Producing Same App 20150037017 - LAU; SHU-KWAN ; et al. | 2015-02-05 |
| Light Pipe Window Structure For Thermal Chamber Applications And Processes App 20140376897 - RANISH; Joseph M. ; et al. | 2014-12-25 |
| Absorbing Reflector For Semiconductor Processing Chamber App 20140376898 - Lo; Kin Pong ; et al. | 2014-12-25 |
| Chambers with improved cooling devices Grant 8,901,518 - Ranish , et al. December 2, 2 | 2014-12-02 |
| Rapid thermal processing chamber with micro-positioning system Grant 8,900,889 - Sorabji , et al. December 2, 2 | 2014-12-02 |
| Coated Liner Assembly For A Semiconductor Processing Chamber App 20140345525 - RANISH; Joseph M. ; et al. | 2014-11-27 |
| Coated Liner Assembly For A Semiconductor Processing Chamber App 20140345526 - RANISH; Joseph M. ; et al. | 2014-11-27 |
| Test apparatus for reflective cavity characterization Grant 8,896,837 - Ranish , et al. November 25, 2 | 2014-11-25 |
| Diffuser For Lamp Heating Assembly App 20140341551 - RANISH; Joseph M. | 2014-11-20 |
| Dome Cooling Using Compliant Material App 20140334806 - RANISH; Joseph M. ; et al. | 2014-11-13 |
| Apparatus And Methods For Low Temperature Measurement In A Wafer Processing System App 20140330422 - RANISH; Joseph M. | 2014-11-06 |
| Absorbing Lamphead Face App 20140319120 - BRILLHART; Paul ; et al. | 2014-10-30 |
| Edge ring lip Grant 8,865,602 - Ranish , et al. October 21, 2 | 2014-10-21 |
| Reflective Liners App 20140287170 - RANISH; JOSEPH M. ; et al. | 2014-09-25 |
| Thermal Management Apparatus For Solid State Light Source Arrays App 20140270731 - GERLING; JOHN ; et al. | 2014-09-18 |
| Simplified Lamp Design App 20140265862 - RANISH; JOSEPH M. | 2014-09-18 |
| High Density Solid State Light Source Array App 20140270735 - GERLING; JOHN ; et al. | 2014-09-18 |
| Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20140273419 - RANISH; Joseph M. ; et al. | 2014-09-18 |
| Tubular Light Source Having Overwind App 20140265824 - RANISH; Joseph M. | 2014-09-18 |
| Edge Ring For A Thermal Processing Chamber App 20140270736 - KOELMEL; Blake ; et al. | 2014-09-18 |
| Thermal Coupled Quartz Dome Heat Sink App 20140254150 - RANISH; Joseph M. ; et al. | 2014-09-11 |
| Pyrometry Filter For Thermal Process Chamber App 20140255862 - RANISH; Joseph M. ; et al. | 2014-09-11 |
| Lamphead Pcb With Flexible Standoffs App 20140255013 - RANISH; Joseph M. ; et al. | 2014-09-11 |
| In-situ chamber cleaning for an RTP chamber Grant 8,821,643 - Ramachandran , et al. September 2, 2 | 2014-09-02 |
| Integrated Solution For Solid State Light Sources In A Process Chamber App 20140241707 - JOHNSON; JOSEPH ; et al. | 2014-08-28 |
| Edge Ring For A Thermal Processing Chamber App 20140233929 - KOELMEL; Blake ; et al. | 2014-08-21 |
| System For Non Radial Temperature Control For Rotating Substrates App 20140220710 - ADERHOLD; Wolfgang R. ; et al. | 2014-08-07 |
| Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20140199785 - RANISH; Joseph M. ; et al. | 2014-07-17 |
| Quartz Upper And Lower Domes App 20140199056 - CHANG; Anzhong ; et al. | 2014-07-17 |
| Multizone control of lamps in a conical lamphead using pyrometers Grant 8,772,055 - Ranish , et al. July 8, 2 | 2014-07-08 |
| Annealing apparatus using two wavelengths of continuous wave laser radiation Grant 8,765,618 - Jennings , et al. July 1, 2 | 2014-07-01 |
| Apparatus and method for measuring radiation energy during thermal processing Grant 8,761,587 - Ranish , et al. June 24, 2 | 2014-06-24 |
| Edge ring for a thermal processing chamber Grant 8,755,680 - Koelmel , et al. June 17, 2 | 2014-06-17 |
| Pulse Train Annealing Method And Apparatus App 20140158674 - MOFFATT; STEPHEN ; et al. | 2014-06-12 |
| Edge ring for a thermal processing chamber Grant 8,744,250 - Koelmel , et al. June 3, 2 | 2014-06-03 |
| System for non radial temperature control for rotating substrates Grant 8,724,977 - Aderhold , et al. May 13, 2 | 2014-05-13 |
| Apparatus For Providing And Directing Heat Energy In A Process Chamber App 20140105583 - JOHNSON; JOSEPH ; et al. | 2014-04-17 |
| Rapid thermal processing lamphead with improved cooling Grant 8,698,049 - Ranish , et al. April 15, 2 | 2014-04-15 |
| Edge Ring Lip App 20140094039 - RANISH; JOSEPH M. ; et al. | 2014-04-03 |
| Pulse Train Annealing Method And Apparatus App 20140073145 - Moffatt; Stephen ; et al. | 2014-03-13 |
| Gas Distribution Apparatus For Substrate Processing Systems App 20140027060 - RANISH; JOSEPH M. ; et al. | 2014-01-30 |
| Methods And Apparatus For Delivering Process Gases To A Substrate App 20140030433 - RANISH; JOSEPH M. | 2014-01-30 |
| Chambers With Improved Cooling Devices App 20140027092 - RANISH; Joseph M. ; et al. | 2014-01-30 |
| Lamp for rapid thermal processing chamber Grant RE44,712 - Ranish , et al. January 21, 2 | 2014-01-21 |
| Apparatus and Method for Improved Control of Heating and Cooling of Substrates App 20140004716 - Koelmel; Blake R. ; et al. | 2014-01-02 |
| Apparatus And Methods For Rapid Thermal Processing App 20130323936 - RANISH; JOSEPH M. ; et al. | 2013-12-05 |
| Substrate Processing System With Lamphead Having Temperature Management App 20130298832 - RANISH; JOSEPH M. ; et al. | 2013-11-14 |
| Direct Current Lamp Driver For Substrate Processing App 20130287377 - SEREBRYANOV; OLEG ; et al. | 2013-10-31 |
| Process Chamber Having Separate Process Gas And Purge Gas Regions App 20130288460 - RANISH; Joseph M. ; et al. | 2013-10-31 |
| Optics For Controlling Light Transmitted Through A Conical Quartz Dome App 20130284095 - Ranish; Joseph M. | 2013-10-31 |
| Gas Distribution Module For Insertion In Lateral Flow Chambers App 20130284097 - Ranish; Joseph M. ; et al. | 2013-10-31 |
| Apparatus And Method For Measuring Radiation Energy During Thermal Processing App 20130280824 - Ranish; Joseph M. ; et al. | 2013-10-24 |
| Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20130270107 - EWERT; MAURICE E. ; et al. | 2013-10-17 |
| Substrate Processing System Having Susceptorless Substrate Support With Enhanced Substrate Heating Control App 20130256962 - RANISH; JOSEPH M. ; et al. | 2013-10-03 |
| Apparatus and method for improved control of heating and cooling of substrates Grant 8,548,311 - Koelmel , et al. October 1, 2 | 2013-10-01 |
| Top Wafer Rotation And Support App 20130193132 - SEREBRYANOV; Oleg ; et al. | 2013-08-01 |
| Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20130196514 - EWERT; Maurice E. ; et al. | 2013-08-01 |
| Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,490,660 - Koelmel , et al. July 23, 2 | 2013-07-23 |
| In-situ Chamber Cleaning For An Rtp Chamber App 20130178072 - RAMACHANDRAN; BALASUBRAMANIAN ; et al. | 2013-07-11 |
| Apparatus and method for measuring radiation energy during thermal processing Grant 8,452,166 - Ranish , et al. May 28, 2 | 2013-05-28 |
| Off-angled heating of the underside of a substrate using a lamp assembly Grant 8,404,048 - Ewert , et al. March 26, 2 | 2013-03-26 |
| Reflective Deposition Rings And Substrate Processing Chambers Incorporting Same App 20130055952 - SUBRAMANI; ANANTHA K. ; et al. | 2013-03-07 |
| Edge Ring For A Thermal Processing Chamber App 20130058636 - Koelmel; Blake ; et al. | 2013-03-07 |
| Method for forming silicon-containing materials during a photoexcitation deposition process Grant 8,387,557 - Singh , et al. March 5, 2 | 2013-03-05 |
| Rapid Thermal Processing Lamphead With Improved Cooling App 20130044493 - RANISH; JOSEPH M. ; et al. | 2013-02-21 |
| Rapid Thermal Processing Chamber With Micro-positioning System App 20130043235 - Sorabji; Khurshed ; et al. | 2013-02-21 |
| Rapid Thermal Processing Chamber With Micro-positioning System App 20130043632 - Sorabji; Khurshed ; et al. | 2013-02-21 |
| Apparatus including heating source reflective filter for pyrometry Grant 8,367,983 - Ranish , et al. February 5, 2 | 2013-02-05 |
| Substrate Supporting Edge Ring With Coating For Improved Soak Performance App 20130026693 - Ranish; Joseph M. ; et al. | 2013-01-31 |
| Apparatus And Methods For Positioning A Substrate Using Capacitive Sensors App 20120304928 - KOELMEL; BLAKE ; et al. | 2012-12-06 |
| Apparatus And Methods For Supporting And Controlling A Substrate App 20120309115 - KOELMEL; BLAKE ; et al. | 2012-12-06 |
| Silver reflectors for semiconductor processing chambers Grant 8,314,368 - Ranish , et al. November 20, 2 | 2012-11-20 |
| Rapid thermal processing chamber with micro-positioning system Grant 8,314,371 - Sorabji , et al. November 20, 2 | 2012-11-20 |
| System For Non Radial Temperature Control For Rotating Substrates App 20120276660 - Aderhold; Wolfgang R. ; et al. | 2012-11-01 |
| Lamphead Atmosphere App 20120270168 - RANISH; JOSEPH M. | 2012-10-25 |
| Rapid thermal processing lamphead with improved cooling Grant 8,294,068 - Ranish , et al. October 23, 2 | 2012-10-23 |
| Apparatus including heating source reflective filter for pyrometry Grant 8,283,607 - Ranish , et al. October 9, 2 | 2012-10-09 |
| Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20120231633 - Ewert; Maurice E. ; et al. | 2012-09-13 |
| Edge Ring For A Thermal Processing Chamber App 20120213500 - Koelmel; Blake ; et al. | 2012-08-23 |
| System for non radial temperature control for rotating substrates Grant 8,249,436 - Aderhold , et al. August 21, 2 | 2012-08-21 |
| Lamp with internal fuse system Grant 8,217,574 - Ramachandran , et al. July 10, 2 | 2012-07-10 |
| Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20120055405 - Koelmel; Blake ; et al. | 2012-03-08 |
| Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,601 - Koelmel , et al. November 15, 2 | 2011-11-15 |
| Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,602 - Koelmel , et al. November 15, 2 | 2011-11-15 |
| Apparatus and Method for Enhancing the Cool Down of Radiatively Heated Substrates App 20110123178 - Aderhold; Wolfgang ; et al. | 2011-05-26 |
| Method and apparatus for verifying proper substrate positioning Grant 7,933,009 - Serebryanov , et al. April 26, 2 | 2011-04-26 |
| Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20110089166 - HUNTER; AARON MUIR ; et al. | 2011-04-21 |
| Apparatus and Methods for Cyclical Oxidation and Etching App 20110061810 - Ganguly; Udayan ; et al. | 2011-03-17 |
| Apparatus and Methods for Cyclical Oxidation and Etching App 20110065276 - Ganguly; Udayan ; et al. | 2011-03-17 |
| Compensation techniques for substrate heating processes Grant 7,906,402 - Ranish , et al. March 15, 2 | 2011-03-15 |
| Absorber layer candidates and techniques for application Grant 7,867,868 - Ranish , et al. January 11, 2 | 2011-01-11 |
| Temperature measurement and control of wafer support in thermal processing chamber Grant 7,860,379 - Hunter , et al. December 28, 2 | 2010-12-28 |
| Lamp With Internal Fuse System App 20100308729 - RAMACHANDRAN; BALASUBRAMANIAN ; et al. | 2010-12-09 |
| Pulse Train Annealing Method And Apparatus App 20100297856 - Moffatt; Stephen ; et al. | 2010-11-25 |
| Pulse train annealing method and apparatus Grant 7,800,081 - Moffatt , et al. September 21, 2 | 2010-09-21 |
| Rapid Thermal Processing Chamber With Micro-Positioning System App 20100133257 - Sorabji; Khurshed ; et al. | 2010-06-03 |
| Apparatus and Method for Improved Control of Heating and Cooling of Substrates App 20100074604 - Koelmel; Blake R. ; et al. | 2010-03-25 |
| Rapid Thermal Processing Lamphead With Improved Cooling App 20100059497 - RANISH; JOSEPH M. ; et al. | 2010-03-11 |
| Method For Forming Silicon-containing Materials During A Photoexcitation Deposition Process App 20100018460 - Singh; Kaushal K. ; et al. | 2010-01-28 |
| Compensation Techniques For Substrate Heating Processes App 20100023154 - RANISH; JOSEPH M. ; et al. | 2010-01-28 |
| Method for forming silicon-containing materials during a photoexcitation deposition process Grant 7,651,955 - Ranish , et al. January 26, 2 | 2010-01-26 |
| Method for forming silicon-containing materials during a photoexcitation deposition process Grant 7,648,927 - Singh , et al. January 19, 2 | 2010-01-19 |
| Apparatus And Method For Measuring Radiation Energy During Thermal Processing App 20100003020 - Ranish; Joseph M. ; et al. | 2010-01-07 |
| Apparatus and Methods for Hyperbaric Rapid Thermal Processing App 20090298300 - Ranish; Joseph M. ; et al. | 2009-12-03 |
| Apparatus Including Heating Source Reflective Filter for Pyrometry App 20090289053 - Ranish; Joseph M. ; et al. | 2009-11-26 |
| System For Non Radial Temperature Control For Rotating Substrates App 20090274454 - ADERHOLD; WOLFGANG R. ; et al. | 2009-11-05 |
| Lamp for rapid thermal processing chamber Grant 7,612,491 - Ranish , et al. November 3, 2 | 2009-11-03 |
| Apparatus Including Heating Source Reflective Filter For Pyrometry App 20090255921 - Ranish; Joseph M. ; et al. | 2009-10-15 |
| Compensation techniques for substrate heating processes Grant 7,598,150 - Ranish , et al. October 6, 2 | 2009-10-06 |
| Silver Reflectors For Semiconductor Processing Chambers App 20090212037 - Ranish; Joseph M. ; et al. | 2009-08-27 |
| Pulse Train Annealing Method And Apparatus App 20090120924 - MOFFATT; STEPHEN ; et al. | 2009-05-14 |
| Pulse Train Annealing Method And Apparatus App 20090121157 - MOFFATT; STEPHEN ; et al. | 2009-05-14 |
| Lamp array for thermal processing exhibiting improved radial uniformity Grant 7,509,035 - Ranish , et al. March 24, 2 | 2009-03-24 |
| Methods For Plasma Matching Between Different Chambers And Plasma Stability Monitoring And Control App 20090030632 - TALLAVARJULA; SAIRAJU ; et al. | 2009-01-29 |
| Method And Apparatus For Verifying Proper Substrate Positioning App 20090027657 - SEREBRYANOV; OLEG ; et al. | 2009-01-29 |
| Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080280453 - KOELMEL; Blake ; et al. | 2008-11-13 |
| Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080276864 - KOELMEL; BLAKE ; et al. | 2008-11-13 |
| Absorber Layer Candidates And Techniques For Application App 20080214014 - RANISH; JOSEPH M. ; et al. | 2008-09-04 |
| Lamp for Rapid Thermal Processing Chamber App 20080199162 - Ranish; Joseph M. ; et al. | 2008-08-21 |
| Lamp for Rapid Thermal Processing Chamber App 20080199163 - Ranish; Joseph M. ; et al. | 2008-08-21 |
| Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080169282 - SORABJI; KHURSHED ; et al. | 2008-07-17 |
| Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080170842 - HUNTER; AARON MUIR ; et al. | 2008-07-17 |
| Method And Apparatus For Heating A Substrate App 20080142208 - RANISH; JOSEPH M. ; et al. | 2008-06-19 |
| Method And Apparatus For Heating A Substrate App 20080145038 - RANISH; JOSEPH M. ; et al. | 2008-06-19 |
| Compensation Techniques For Substrate Heating Processes App 20080118641 - Ranish; Joseph M. ; et al. | 2008-05-22 |
| Method For Forming Silicon-containing Materials During A Photoexcitation Deposition Process App 20060286775 - Singh; Kaushal K. ; et al. | 2006-12-21 |
| Method For Forming Silicon-containing Materials During A Photoexcitation Deposition Process App 20060286776 - Ranish; Joseph M. ; et al. | 2006-12-21 |
| Lamp assembly having flexibly positioned rigid plug Grant 7,147,359 - Ranish , et al. December 12, 2 | 2006-12-12 |
| Thermal flux laser annealing for ion implantation of semiconductor P-N junctions Grant 7,135,392 - Adams , et al. November 14, 2 | 2006-11-14 |
| Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes Grant 7,129,440 - Adams , et al. October 31, 2 | 2006-10-31 |
| Single axis light pipe for homogenizing slow axis of illumination systems bases on laser diodes App 20060102605 - Adams; Bruce E. ; et al. | 2006-05-18 |
| Stepped reflector plate Grant 7,041,931 - Jennings , et al. May 9, 2 | 2006-05-09 |
| Lamp array for thermal processing exhibiting improved radial uniformity App 20060066193 - Ranish; Joseph M. ; et al. | 2006-03-30 |
| Lamp assembly having flexibly positioned rigid plug App 20050286243 - Ranish, Joseph M. ; et al. | 2005-12-29 |
| Thermally matched support ring for substrate processing chamber Grant 6,888,104 - Ranish , et al. May 3, 2 | 2005-05-03 |
| Lamphead for a rapid thermal processing chamber Grant 6,805,466 - Ranish October 19, 2 | 2004-10-19 |
| Stepped reflector plate App 20040079746 - Jennings, Dean ; et al. | 2004-04-29 |
| Semiconductor processing system with lamp cooling Grant 6,376,804 - Ranish , et al. April 23, 2 | 2002-04-23 |
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