loadpatents
Patent applications and USPTO patent grants for Ranish; Joseph M.The latest application filed is for "method and apparatus for measuring temperature".
Patent | Date |
---|---|
Apparatus and method for controlling a flow process material to a deposition chamber Grant 11,393,703 - Lerner , et al. July 19, 2 | 2022-07-19 |
Circular lamp arrays Grant 11,337,277 - Ranish May 17, 2 | 2022-05-17 |
Method And Apparatus For Measuring Temperature App 20220057268 - RANISH; Joseph M. | 2022-02-24 |
Simplified Lamp Design App 20210398793 - RANISH; Joseph M. | 2021-12-23 |
Method and apparatus for measuring temperature Grant 11,162,845 - Ranish November 2, 2 | 2021-11-02 |
Simplified lamp design Grant 11,133,173 - Ranish September 28, 2 | 2021-09-28 |
Multi Zone Spot Heating In Epi App 20210285105 - LAU; Shu-Kwan ;   et al. | 2021-09-16 |
Pulse Train Annealing Method And Apparatus App 20210220949 - MOFFATT; Stephen ;   et al. | 2021-07-22 |
Pulse train annealing method and apparatus Grant 11,040,415 - Moffatt , et al. June 22, 2 | 2021-06-22 |
Multi zone spot heating in epi Grant 11,021,795 - Lau , et al. June 1, 2 | 2021-06-01 |
Vapor Delivery Methods And Apparatus App 20210069745 - LERNER; Alexander N. ;   et al. | 2021-03-11 |
Annealing Apparatus Using Two Wavelengths Of Radiation App 20210053147 - JENNINGS; Dean ;   et al. | 2021-02-25 |
Optical system Grant 10,872,790 - Ranish December 22, 2 | 2020-12-22 |
Annealing apparatus using two wavelengths of radiation Grant 10,857,623 - Jennings , et al. December 8, 2 | 2020-12-08 |
System For Non Radial Temperature Control For Rotating Substrates App 20200373212 - ADERHOLD; Wolfgang R. ;   et al. | 2020-11-26 |
Lamp base adapter design for baseless lamps Grant 10,820,379 - Ranish , et al. October 27, 2 | 2020-10-27 |
System for non radial temperature control for rotating substrates Grant 10,741,457 - Aderhold , et al. A | 2020-08-11 |
Sol Gel Coated Support Ring App 20200251375 - Kind Code | 2020-08-06 |
Direct current lamp driver for substrate processing Grant 10,734,257 - Serebryanov , et al. | 2020-08-04 |
Light pipe window structure for low pressure thermal processes Grant 10,727,093 - Brillhart , et al. | 2020-07-28 |
Light pipe arrays for thermal chamber applications and thermal processes Grant 10,699,922 - Ranish , et al. | 2020-06-30 |
Sol gel coated support ring Grant 10,672,641 - Ranish | 2020-06-02 |
Support ring with encapsulated light barrier Grant 10,665,484 - Ranish | 2020-05-26 |
Anneal chamber with getter Grant 10,661,223 - Ranish | 2020-05-26 |
Substrate processing system having susceptorless substrate support with enhanced substrate heating control Grant 10,610,884 - Ranish , et al. | 2020-04-07 |
Lamp Base Adapter Design For Baseless Lamps App 20200053836 - RANISH; Joseph M. ;   et al. | 2020-02-13 |
Lamp Cross-section For Reduced Coil Heating App 20200035480 - RANISH; JOSEPH M. | 2020-01-30 |
Circular Lamp Arrays App 20200022223 - RANISH; Joseph M. | 2020-01-16 |
Method And Apparatus For Measuring Temperature App 20190391017 - RANISH; Joseph M. | 2019-12-26 |
Apparatus And Method For Controlling A Flow Process Material To A Deposition Chamber App 20190382890 - LERNER; ALEXANDER ;   et al. | 2019-12-19 |
Light Pipe Window Structure For Thermal Chamber Applications And Processes App 20190385872 - RANISH; Joseph M. ;   et al. | 2019-12-19 |
Simplified Lamp Design App 20190385833 - RANISH; Joseph M. | 2019-12-19 |
Methods and apparatus for delivering process gases to a substrate Grant 10,486,183 - Ranish Nov | 2019-11-26 |
Lamp cross-section for reduced coil heating Grant 10,468,242 - Ranish No | 2019-11-05 |
Upper dome with injection assembly Grant 10,458,040 - Brillhart , et al. Oc | 2019-10-29 |
Simplified lamp design Grant 10,453,670 - Ranish Oc | 2019-10-22 |
Light pipe window structure for thermal chamber applications and processes Grant 10,410,890 - Ranish , et al. Sept | 2019-09-10 |
Apparatus and methods for low temperature measurement in a wafer processing system Grant 10,409,306 - Ranish Sept | 2019-09-10 |
Lamphead PCB with flexible standoffs Grant 10,405,375 - Ranish , et al. Sep | 2019-09-03 |
Substrate processing system having susceptorless substrate support with enhanced substrate heating control Grant 10,376,916 - Ranish , et al. A | 2019-08-13 |
Support ring with masked edge Grant 10,373,859 - Behdjat , et al. | 2019-08-06 |
Lamp driver for low pressure environment Grant 10,332,763 - Serebryanov , et al. | 2019-06-25 |
Diffuser for lamp heating assembly Grant 10,327,284 - Ranish | 2019-06-18 |
Adapter for replaceable lamp Grant 10,319,579 - Ranish , et al. | 2019-06-11 |
Absorbing reflector for semiconductor processing chamber Grant 10,306,708 - Lo , et al. | 2019-05-28 |
Multi Zone Spot Heating In Epi App 20190127851 - LAU; Shu-Kwan ;   et al. | 2019-05-02 |
Lamp base adapter design for baseless lamps Grant 10,271,383 - Ranish , et al. | 2019-04-23 |
Circular lamp arrays Grant 10,271,382 - Ranish | 2019-04-23 |
Rotating substrate laser anneal Grant 10,256,005 - Ranish , et al. | 2019-04-09 |
Simplified Lamp Design App 20190096657 - Ranish; Joseph M. | 2019-03-28 |
Substrate processing system with lamphead having temperature management Grant 10,202,707 - Ranish , et al. Feb | 2019-02-12 |
Anneal Chamber With Getter App 20180345215 - RANISH; Joseph M. | 2018-12-06 |
Pyrometry filter for thermal process chamber Grant 10,147,623 - Ranish , et al. De | 2018-12-04 |
Heating modulators to improve epi uniformity tuning Grant 10,132,003 - Lau , et al. November 20, 2 | 2018-11-20 |
Bottom processing Grant 10,128,197 - Ranish , et al. November 13, 2 | 2018-11-13 |
Support cylinder for thermal processing chamber Grant 10,128,144 - Behdjat , et al. November 13, 2 | 2018-11-13 |
Support Ring With Masked Edge App 20180315639 - BEHDJAT; Mehran ;   et al. | 2018-11-01 |
Simplified lamp design Grant 10,083,827 - Ranish September 25, 2 | 2018-09-25 |
Multizone control of lamps in a conical lamphead using pyrometers Grant 10,077,508 - Ranish , et al. September 18, 2 | 2018-09-18 |
Support ring with masked edge Grant 10,056,286 - Behdjat , et al. August 21, 2 | 2018-08-21 |
Thermal processing chamber Grant 10,053,777 - Ranish , et al. August 21, 2 | 2018-08-21 |
Sol Gel Coated Support Ring App 20180211865 - RANISH; Joseph M. | 2018-07-26 |
Adapter For Replaceable Lamp App 20180204715 - Ranish; Joseph M. ;   et al. | 2018-07-19 |
Retention and insulation features for lamp Grant 10,026,630 - Iu , et al. July 17, 2 | 2018-07-17 |
Bottom processing Grant 10,020,204 - Ranish , et al. July 10, 2 | 2018-07-10 |
Process Chamber Having Separate Process Gas And Purge Gas Regions App 20180138031 - RANISH; Joseph M. ;   et al. | 2018-05-17 |
Optics For Controlling Light Transmitted Through A Conical Quartz Dome App 20180130653 - RANISH; Joseph M. | 2018-05-10 |
Support Ring With Masked Edge App 20180102274 - BEHDJAT; Mehran ;   et al. | 2018-04-12 |
Annealing Apparatus Using Two Wavelengths Of Radiation App 20180099353 - JENNINGS; Dean ;   et al. | 2018-04-12 |
Easy access lamphead Grant 9,929,027 - Ranish , et al. March 27, 2 | 2018-03-27 |
Sol gel coated support ring Grant 9,929,037 - Ranish March 27, 2 | 2018-03-27 |
Absorbing Reflector For Semiconductor Processing Chamber App 20180084610 - LO; Kin Pong ;   et al. | 2018-03-22 |
Adapter for replaceable lamp Grant 9,922,815 - Ranish , et al. March 20, 2 | 2018-03-20 |
Upper Dome With Injection Assembly App 20180066382 - BRILLHART; Paul ;   et al. | 2018-03-08 |
Optics for controlling light transmitted through a conical quartz dome Grant 9,905,444 - Ranish February 27, 2 | 2018-02-27 |
Reflective deposition rings and substrate processing chambers incorporating same Grant 9,905,443 - Subramani , et al. February 27, 2 | 2018-02-27 |
Support Ring With Encapsulated Light Barrier App 20180047597 - Ranish; Joseph M. | 2018-02-15 |
Heating Modulators To Improve Epi Uniformity Tuning App 20180023214 - LAU; Shu-Kwan ;   et al. | 2018-01-25 |
Process chamber having separate process gas and purge gas regions Grant 9,870,919 - Ranish , et al. January 16, 2 | 2018-01-16 |
Off-angled heating of the underside of a substrate using a lamp assembly Grant 9,863,038 - Ewert , et al. January 9, 2 | 2018-01-09 |
Window cooling using compliant material Grant 9,863,043 - Ranish , et al. January 9, 2 | 2018-01-09 |
Quartz Upper And Lower Domes App 20180005856 - CHANG; Anzhong ;   et al. | 2018-01-04 |
Upper dome with injection assembly Grant 9,845,550 - Brillhart , et al. December 19, 2 | 2017-12-19 |
Absorbing lamphead face Grant 9,842,753 - Brillhart , et al. December 12, 2 | 2017-12-12 |
Support ring with masked edge Grant 9,842,759 - Behdjat , et al. December 12, 2 | 2017-12-12 |
Absorbing reflector for semiconductor processing chamber Grant 9,832,816 - Lo , et al. November 28, 2 | 2017-11-28 |
Thermal Coupled Quartz Dome Heat Sink App 20170338135 - RANISH; Joseph M. ;   et al. | 2017-11-23 |
Pyrometry Filter For Thermal Process Chamber App 20170330776 - RANISH; Joseph M. ;   et al. | 2017-11-16 |
Off-angled heating of the underside of a substrate using a lamp assembly Grant 9,818,587 - Ewert , et al. November 14, 2 | 2017-11-14 |
Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same Grant 9,814,099 - Lau , et al. November 7, 2 | 2017-11-07 |
Dome Cooling Using Compliant Material App 20170316964 - RANISH; Joseph M. ;   et al. | 2017-11-02 |
System For Non Radial Temperature Control For Rotating Substrates App 20170309529 - ADERHOLD; Wolfgang R. ;   et al. | 2017-10-26 |
Support ring with encapsulated light barrier Grant 9,793,145 - Ranish October 17, 2 | 2017-10-17 |
Pyrometry filter for thermal process chamber Grant 9,786,529 - Ranish , et al. October 10, 2 | 2017-10-10 |
Oriented Laser Activated Processing Chamber App 20170271131 - MOFFATT; Stephen ;   et al. | 2017-09-21 |
Quartz upper and lower domes Grant 9,768,043 - Chang , et al. September 19, 2 | 2017-09-19 |
Support Cylinder For Thermal Processing Cylinder App 20170263493 - BEHDJAT; Mehran ;   et al. | 2017-09-14 |
Bottom Processing App 20170263466 - RANISH; Joseph M. ;   et al. | 2017-09-14 |
Substrate Processing System Having Susceptorless Substrate Support With Enhanced Substrate Heating Control App 20170259294 - RANISH; JOSEPH M. ;   et al. | 2017-09-14 |
High density solid state light source array Grant 9,754,807 - Gerling , et al. September 5, 2 | 2017-09-05 |
Thermal coupled quartz dome heat sink Grant 9,748,121 - Ranish , et al. August 29, 2 | 2017-08-29 |
System for non radial temperature control for rotating substrates Grant 9,728,471 - Aderhold , et al. August 8, 2 | 2017-08-08 |
Dome cooling using compliant material Grant 9,711,382 - Ranish , et al. July 18, 2 | 2017-07-18 |
Substrate processing system having susceptorless substrate support with enhanced substrate heating control Grant 9,682,398 - Ranish , et al. June 20, 2 | 2017-06-20 |
Support cylinder for thermal processing chamber Grant 9,659,809 - Behdjat , et al. May 23, 2 | 2017-05-23 |
Bottom Processing App 20170133328 - RANISH; Joseph M. ;   et al. | 2017-05-11 |
Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20170130359 - RANISH; Joseph M. ;   et al. | 2017-05-11 |
Apparatus and method for enhancing the cool down of radiatively heated substrates Grant 9,640,412 - Aderhold , et al. May 2, 2 | 2017-05-02 |
Lamp Base Adapter Design For Baseless Lamps App 20170105249 - RANISH; Joseph M. ;   et al. | 2017-04-13 |
Pulse Train Annealing Method And Apparatus App 20170072505 - MOFFATT; Stephen ;   et al. | 2017-03-16 |
Managing thermal budget in annealing of substrates Grant 9,595,459 - Moffatt , et al. March 14, 2 | 2017-03-14 |
Multizone control of lamps in a conical lamphead using pyrometers Grant 9,580,835 - Ranish , et al. February 28, 2 | 2017-02-28 |
Rapid thermal processing chamber with micro-positioning system Grant 9,564,349 - Sorabji , et al. February 7, 2 | 2017-02-07 |
Rotating Substrate Laser Anneal App 20170032865 - RANISH; Joseph M. ;   et al. | 2017-02-02 |
Apparatus and method for improved control of heating and cooling of substrates Grant 9,552,989 - Koelmel , et al. January 24, 2 | 2017-01-24 |
Apparatus for providing and directing heat energy in a process chamber Grant 9,543,172 - Johnson , et al. January 10, 2 | 2017-01-10 |
Lamp for rapid thermal processing chamber Grant 9,536,728 - Ranish , et al. January 3, 2 | 2017-01-03 |
Tubular light source having overwind Grant 9,536,729 - Ranish January 3, 2 | 2017-01-03 |
Linear high packing density for LED arrays Grant 9,513,052 - Johnson , et al. December 6, 2 | 2016-12-06 |
Pulse train annealing method and apparatus Grant 9,498,845 - Moffatt , et al. November 22, 2 | 2016-11-22 |
Absorbing Lamphead Face App 20160336205 - BRILLHART; Paul ;   et al. | 2016-11-17 |
Support Cylinder For Thermal Processing Chamber App 20160300752 - BEHDJAT; Mehran ;   et al. | 2016-10-13 |
RTP lamp base with removal features Grant 9,462,636 - Ranish , et al. October 4, 2 | 2016-10-04 |
Support Ring With Masked Edge App 20160247708 - BEHDJAT; Mehran ;   et al. | 2016-08-25 |
Substrate Processing System Having Susceptorless Substrate Support With Enhanced Substrate Heating Control App 20160243580 - RANISH; JOSEPH M. ;   et al. | 2016-08-25 |
Linear High Packing Density For Led Arrays App 20160231055 - JOHNSON; Joseph R. ;   et al. | 2016-08-11 |
Integrated solution for solid state light sources in a process chamber Grant 9,406,653 - Johnson , et al. August 2, 2 | 2016-08-02 |
Rapid thermal processing chamber with micro-positioning system Grant 9,390,950 - Sorabji , et al. July 12, 2 | 2016-07-12 |
Lamp Driver For Low Pressure Environment App 20160196992 - SEREBRYANOV; Oleg V. ;   et al. | 2016-07-07 |
Support cylinder for thermal processing chamber Grant 9,385,004 - Behdjat , et al. July 5, 2 | 2016-07-05 |
Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20160138188 - RANISH; Joseph M. ;   et al. | 2016-05-19 |
Support ring with masked edge Grant 9,330,955 - Behdjat , et al. May 3, 2 | 2016-05-03 |
Optical System App 20160111306 - RANISH; Joseph M. | 2016-04-21 |
Linear high packing density for LED arrays Grant 9,318,360 - Johnson , et al. April 19, 2 | 2016-04-19 |
Atmospheric Epitaxial Deposition Chamber App 20160068959 - LAU; Shu-Kwan ;   et al. | 2016-03-10 |
Pulse Train Annealing Method And Apparatus App 20160023302 - MOFFATT; STEPHEN ;   et al. | 2016-01-28 |
Light Pipe Arrays For Thermal Chamber Applications And Thermal Processes App 20160027671 - RANISH; JOSEPH M. ;   et al. | 2016-01-28 |
Apparatus and methods for positioning a substrate using capacitive sensors Grant 9,245,786 - Koelmel , et al. January 26, 2 | 2016-01-26 |
Top wafer rotation and support Grant 9,240,341 - Serebryanov , et al. January 19, 2 | 2016-01-19 |
Multizone control of lamps in a conical lamphead using pyrometers Grant 9,230,837 - Ranish , et al. January 5, 2 | 2016-01-05 |
Tubular Light Source Having Overwind App 20150359044 - RANISH; Joseph M. | 2015-12-10 |
Managing Thermal Budget In Annealing Of Substrates App 20150357215 - MOFFATT; STEPHEN ;   et al. | 2015-12-10 |
Window Cooling Using Compliant Material App 20150345023 - RANISH; Joseph M. ;   et al. | 2015-12-03 |
Retention And Insulation Features For Lamp App 20150348809 - IU; Dongming ;   et al. | 2015-12-03 |
Light Pipe Window Structure For Low Pressure Thermal Processes App 20150340257 - BRILLHART; PAUL ;   et al. | 2015-11-26 |
Substrate supporting edge ring with coating for improved soak performance Grant 9,184,085 - Ranish , et al. November 10, 2 | 2015-11-10 |
Lamphead atmosphere Grant 9,175,908 - Ranish November 3, 2 | 2015-11-03 |
Susceptor With Radiation Source Compensation App 20150292815 - RANISH; Joseph M. | 2015-10-15 |
Thermal Processing Chamber App 20150267300 - RANISH; Joseph M. ;   et al. | 2015-09-24 |
Test apparatus for reflective cavity characterization Grant 9,140,647 - Ranish , et al. September 22, 2 | 2015-09-22 |
Edge ring for a thermal processing chamber Grant 9,130,001 - Koelmel , et al. September 8, 2 | 2015-09-08 |
Tubular light source having overwind Grant 9,129,794 - Ranish September 8, 2 | 2015-09-08 |
Upper Dome With Injection Assembly App 20150233016 - BRILLHART; Paul ;   et al. | 2015-08-20 |
Top Wafer Rotation And Support App 20150206786 - SEREBRYANOV; Oleg ;   et al. | 2015-07-23 |
Edge ring for a thermal processing chamber Grant 9,076,828 - Koelmel , et al. July 7, 2 | 2015-07-07 |
Support Ring With Masked Edge App 20150187630 - BEHDJAT; Mehran ;   et al. | 2015-07-02 |
Rtp Lamp Base Improvement App 20150189697 - RANISH; Joseph M. ;   et al. | 2015-07-02 |
Substrate Supporting Edge Ring With Coating For Improved Soak Performance App 20150187631 - RANISH; Joseph M. ;   et al. | 2015-07-02 |
Adapter For Replaceable Lamp App 20150179425 - RANISH; Joseph M. ;   et al. | 2015-06-25 |
Easy Access Lamphead App 20150147053 - RANISH; Joseph M. ;   et al. | 2015-05-28 |
Apparatus and methods for rapid thermal processing Grant 9,029,739 - Ranish , et al. May 12, 2 | 2015-05-12 |
Sol Gel Coated Support Ring App 20150123337 - RANISH; Joseph M. | 2015-05-07 |
Linear High Packing Density For Led Arrays App 20150103526 - JOHNSON; Joseph ;   et al. | 2015-04-16 |
Support Ring With Encapsulated Light Barrier App 20150093100 - RANISH; Joseph M. | 2015-04-02 |
Top wafer rotation and support Grant 8,993,933 - Serebryanov , et al. March 31, 2 | 2015-03-31 |
Carbon Fiber Ring Susceptor App 20150083046 - RANISH; Joseph M. ;   et al. | 2015-03-26 |
Substrate supporting edge ring with coating for improved soak performance Grant 8,979,087 - Ranish , et al. March 17, 2 | 2015-03-17 |
Circular Lamp Arrays App 20150071623 - RANISH; Joseph M. | 2015-03-12 |
Test Apparatus For Reflective Cavity Characterization App 20150070686 - RANISH; Joseph M. ;   et al. | 2015-03-12 |
Lamp Cross-section For Reduced Coil Heating App 20150063792 - Ranish; Joseph M. | 2015-03-05 |
Support Cylinder For Thermal Processing Chamber App 20150050819 - BEHDJAT; Mehran ;   et al. | 2015-02-19 |
Rapid Thermal Processing Chamber with Micro-Positioning System App 20150050118 - Sorabji; Khurshed ;   et al. | 2015-02-19 |
Substrate Support With Surface Feature For Reduced Reflection And Manufacturing Techniques For Producing Same App 20150037017 - LAU; SHU-KWAN ;   et al. | 2015-02-05 |
Light Pipe Window Structure For Thermal Chamber Applications And Processes App 20140376897 - RANISH; Joseph M. ;   et al. | 2014-12-25 |
Absorbing Reflector For Semiconductor Processing Chamber App 20140376898 - Lo; Kin Pong ;   et al. | 2014-12-25 |
Chambers with improved cooling devices Grant 8,901,518 - Ranish , et al. December 2, 2 | 2014-12-02 |
Rapid thermal processing chamber with micro-positioning system Grant 8,900,889 - Sorabji , et al. December 2, 2 | 2014-12-02 |
Coated Liner Assembly For A Semiconductor Processing Chamber App 20140345525 - RANISH; Joseph M. ;   et al. | 2014-11-27 |
Coated Liner Assembly For A Semiconductor Processing Chamber App 20140345526 - RANISH; Joseph M. ;   et al. | 2014-11-27 |
Test apparatus for reflective cavity characterization Grant 8,896,837 - Ranish , et al. November 25, 2 | 2014-11-25 |
Diffuser For Lamp Heating Assembly App 20140341551 - RANISH; Joseph M. | 2014-11-20 |
Dome Cooling Using Compliant Material App 20140334806 - RANISH; Joseph M. ;   et al. | 2014-11-13 |
Apparatus And Methods For Low Temperature Measurement In A Wafer Processing System App 20140330422 - RANISH; Joseph M. | 2014-11-06 |
Absorbing Lamphead Face App 20140319120 - BRILLHART; Paul ;   et al. | 2014-10-30 |
Edge ring lip Grant 8,865,602 - Ranish , et al. October 21, 2 | 2014-10-21 |
Reflective Liners App 20140287170 - RANISH; JOSEPH M. ;   et al. | 2014-09-25 |
Thermal Management Apparatus For Solid State Light Source Arrays App 20140270731 - GERLING; JOHN ;   et al. | 2014-09-18 |
Simplified Lamp Design App 20140265862 - RANISH; JOSEPH M. | 2014-09-18 |
High Density Solid State Light Source Array App 20140270735 - GERLING; JOHN ;   et al. | 2014-09-18 |
Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20140273419 - RANISH; Joseph M. ;   et al. | 2014-09-18 |
Tubular Light Source Having Overwind App 20140265824 - RANISH; Joseph M. | 2014-09-18 |
Edge Ring For A Thermal Processing Chamber App 20140270736 - KOELMEL; Blake ;   et al. | 2014-09-18 |
Thermal Coupled Quartz Dome Heat Sink App 20140254150 - RANISH; Joseph M. ;   et al. | 2014-09-11 |
Pyrometry Filter For Thermal Process Chamber App 20140255862 - RANISH; Joseph M. ;   et al. | 2014-09-11 |
Lamphead Pcb With Flexible Standoffs App 20140255013 - RANISH; Joseph M. ;   et al. | 2014-09-11 |
In-situ chamber cleaning for an RTP chamber Grant 8,821,643 - Ramachandran , et al. September 2, 2 | 2014-09-02 |
Integrated Solution For Solid State Light Sources In A Process Chamber App 20140241707 - JOHNSON; JOSEPH ;   et al. | 2014-08-28 |
Edge Ring For A Thermal Processing Chamber App 20140233929 - KOELMEL; Blake ;   et al. | 2014-08-21 |
System For Non Radial Temperature Control For Rotating Substrates App 20140220710 - ADERHOLD; Wolfgang R. ;   et al. | 2014-08-07 |
Multizone Control Of Lamps In A Conical Lamphead Using Pyrometers App 20140199785 - RANISH; Joseph M. ;   et al. | 2014-07-17 |
Quartz Upper And Lower Domes App 20140199056 - CHANG; Anzhong ;   et al. | 2014-07-17 |
Multizone control of lamps in a conical lamphead using pyrometers Grant 8,772,055 - Ranish , et al. July 8, 2 | 2014-07-08 |
Annealing apparatus using two wavelengths of continuous wave laser radiation Grant 8,765,618 - Jennings , et al. July 1, 2 | 2014-07-01 |
Apparatus and method for measuring radiation energy during thermal processing Grant 8,761,587 - Ranish , et al. June 24, 2 | 2014-06-24 |
Edge ring for a thermal processing chamber Grant 8,755,680 - Koelmel , et al. June 17, 2 | 2014-06-17 |
Pulse Train Annealing Method And Apparatus App 20140158674 - MOFFATT; STEPHEN ;   et al. | 2014-06-12 |
Edge ring for a thermal processing chamber Grant 8,744,250 - Koelmel , et al. June 3, 2 | 2014-06-03 |
System for non radial temperature control for rotating substrates Grant 8,724,977 - Aderhold , et al. May 13, 2 | 2014-05-13 |
Apparatus For Providing And Directing Heat Energy In A Process Chamber App 20140105583 - JOHNSON; JOSEPH ;   et al. | 2014-04-17 |
Rapid thermal processing lamphead with improved cooling Grant 8,698,049 - Ranish , et al. April 15, 2 | 2014-04-15 |
Edge Ring Lip App 20140094039 - RANISH; JOSEPH M. ;   et al. | 2014-04-03 |
Pulse Train Annealing Method And Apparatus App 20140073145 - Moffatt; Stephen ;   et al. | 2014-03-13 |
Gas Distribution Apparatus For Substrate Processing Systems App 20140027060 - RANISH; JOSEPH M. ;   et al. | 2014-01-30 |
Methods And Apparatus For Delivering Process Gases To A Substrate App 20140030433 - RANISH; JOSEPH M. | 2014-01-30 |
Chambers With Improved Cooling Devices App 20140027092 - RANISH; Joseph M. ;   et al. | 2014-01-30 |
Lamp for rapid thermal processing chamber Grant RE44,712 - Ranish , et al. January 21, 2 | 2014-01-21 |
Apparatus and Method for Improved Control of Heating and Cooling of Substrates App 20140004716 - Koelmel; Blake R. ;   et al. | 2014-01-02 |
Apparatus And Methods For Rapid Thermal Processing App 20130323936 - RANISH; JOSEPH M. ;   et al. | 2013-12-05 |
Substrate Processing System With Lamphead Having Temperature Management App 20130298832 - RANISH; JOSEPH M. ;   et al. | 2013-11-14 |
Direct Current Lamp Driver For Substrate Processing App 20130287377 - SEREBRYANOV; OLEG ;   et al. | 2013-10-31 |
Process Chamber Having Separate Process Gas And Purge Gas Regions App 20130288460 - RANISH; Joseph M. ;   et al. | 2013-10-31 |
Optics For Controlling Light Transmitted Through A Conical Quartz Dome App 20130284095 - Ranish; Joseph M. | 2013-10-31 |
Gas Distribution Module For Insertion In Lateral Flow Chambers App 20130284097 - Ranish; Joseph M. ;   et al. | 2013-10-31 |
Apparatus And Method For Measuring Radiation Energy During Thermal Processing App 20130280824 - Ranish; Joseph M. ;   et al. | 2013-10-24 |
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20130270107 - EWERT; MAURICE E. ;   et al. | 2013-10-17 |
Substrate Processing System Having Susceptorless Substrate Support With Enhanced Substrate Heating Control App 20130256962 - RANISH; JOSEPH M. ;   et al. | 2013-10-03 |
Apparatus and method for improved control of heating and cooling of substrates Grant 8,548,311 - Koelmel , et al. October 1, 2 | 2013-10-01 |
Top Wafer Rotation And Support App 20130193132 - SEREBRYANOV; Oleg ;   et al. | 2013-08-01 |
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20130196514 - EWERT; Maurice E. ;   et al. | 2013-08-01 |
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,490,660 - Koelmel , et al. July 23, 2 | 2013-07-23 |
In-situ Chamber Cleaning For An Rtp Chamber App 20130178072 - RAMACHANDRAN; BALASUBRAMANIAN ;   et al. | 2013-07-11 |
Apparatus and method for measuring radiation energy during thermal processing Grant 8,452,166 - Ranish , et al. May 28, 2 | 2013-05-28 |
Off-angled heating of the underside of a substrate using a lamp assembly Grant 8,404,048 - Ewert , et al. March 26, 2 | 2013-03-26 |
Reflective Deposition Rings And Substrate Processing Chambers Incorporting Same App 20130055952 - SUBRAMANI; ANANTHA K. ;   et al. | 2013-03-07 |
Edge Ring For A Thermal Processing Chamber App 20130058636 - Koelmel; Blake ;   et al. | 2013-03-07 |
Method for forming silicon-containing materials during a photoexcitation deposition process Grant 8,387,557 - Singh , et al. March 5, 2 | 2013-03-05 |
Rapid Thermal Processing Lamphead With Improved Cooling App 20130044493 - RANISH; JOSEPH M. ;   et al. | 2013-02-21 |
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043235 - Sorabji; Khurshed ;   et al. | 2013-02-21 |
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043632 - Sorabji; Khurshed ;   et al. | 2013-02-21 |
Apparatus including heating source reflective filter for pyrometry Grant 8,367,983 - Ranish , et al. February 5, 2 | 2013-02-05 |
Substrate Supporting Edge Ring With Coating For Improved Soak Performance App 20130026693 - Ranish; Joseph M. ;   et al. | 2013-01-31 |
Apparatus And Methods For Positioning A Substrate Using Capacitive Sensors App 20120304928 - KOELMEL; BLAKE ;   et al. | 2012-12-06 |
Apparatus And Methods For Supporting And Controlling A Substrate App 20120309115 - KOELMEL; BLAKE ;   et al. | 2012-12-06 |
Silver reflectors for semiconductor processing chambers Grant 8,314,368 - Ranish , et al. November 20, 2 | 2012-11-20 |
Rapid thermal processing chamber with micro-positioning system Grant 8,314,371 - Sorabji , et al. November 20, 2 | 2012-11-20 |
System For Non Radial Temperature Control For Rotating Substrates App 20120276660 - Aderhold; Wolfgang R. ;   et al. | 2012-11-01 |
Lamphead Atmosphere App 20120270168 - RANISH; JOSEPH M. | 2012-10-25 |
Rapid thermal processing lamphead with improved cooling Grant 8,294,068 - Ranish , et al. October 23, 2 | 2012-10-23 |
Apparatus including heating source reflective filter for pyrometry Grant 8,283,607 - Ranish , et al. October 9, 2 | 2012-10-09 |
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly App 20120231633 - Ewert; Maurice E. ;   et al. | 2012-09-13 |
Edge Ring For A Thermal Processing Chamber App 20120213500 - Koelmel; Blake ;   et al. | 2012-08-23 |
System for non radial temperature control for rotating substrates Grant 8,249,436 - Aderhold , et al. August 21, 2 | 2012-08-21 |
Lamp with internal fuse system Grant 8,217,574 - Ramachandran , et al. July 10, 2 | 2012-07-10 |
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20120055405 - Koelmel; Blake ;   et al. | 2012-03-08 |
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,601 - Koelmel , et al. November 15, 2 | 2011-11-15 |
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,602 - Koelmel , et al. November 15, 2 | 2011-11-15 |
Apparatus and Method for Enhancing the Cool Down of Radiatively Heated Substrates App 20110123178 - Aderhold; Wolfgang ;   et al. | 2011-05-26 |
Method and apparatus for verifying proper substrate positioning Grant 7,933,009 - Serebryanov , et al. April 26, 2 | 2011-04-26 |
Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20110089166 - HUNTER; AARON MUIR ;   et al. | 2011-04-21 |
Apparatus and Methods for Cyclical Oxidation and Etching App 20110061810 - Ganguly; Udayan ;   et al. | 2011-03-17 |
Apparatus and Methods for Cyclical Oxidation and Etching App 20110065276 - Ganguly; Udayan ;   et al. | 2011-03-17 |
Compensation techniques for substrate heating processes Grant 7,906,402 - Ranish , et al. March 15, 2 | 2011-03-15 |
Absorber layer candidates and techniques for application Grant 7,867,868 - Ranish , et al. January 11, 2 | 2011-01-11 |
Temperature measurement and control of wafer support in thermal processing chamber Grant 7,860,379 - Hunter , et al. December 28, 2 | 2010-12-28 |
Lamp With Internal Fuse System App 20100308729 - RAMACHANDRAN; BALASUBRAMANIAN ;   et al. | 2010-12-09 |
Pulse Train Annealing Method And Apparatus App 20100297856 - Moffatt; Stephen ;   et al. | 2010-11-25 |
Pulse train annealing method and apparatus Grant 7,800,081 - Moffatt , et al. September 21, 2 | 2010-09-21 |
Rapid Thermal Processing Chamber With Micro-Positioning System App 20100133257 - Sorabji; Khurshed ;   et al. | 2010-06-03 |
Apparatus and Method for Improved Control of Heating and Cooling of Substrates App 20100074604 - Koelmel; Blake R. ;   et al. | 2010-03-25 |
Rapid Thermal Processing Lamphead With Improved Cooling App 20100059497 - RANISH; JOSEPH M. ;   et al. | 2010-03-11 |
Method For Forming Silicon-containing Materials During A Photoexcitation Deposition Process App 20100018460 - Singh; Kaushal K. ;   et al. | 2010-01-28 |
Compensation Techniques For Substrate Heating Processes App 20100023154 - RANISH; JOSEPH M. ;   et al. | 2010-01-28 |
Method for forming silicon-containing materials during a photoexcitation deposition process Grant 7,651,955 - Ranish , et al. January 26, 2 | 2010-01-26 |
Method for forming silicon-containing materials during a photoexcitation deposition process Grant 7,648,927 - Singh , et al. January 19, 2 | 2010-01-19 |
Apparatus And Method For Measuring Radiation Energy During Thermal Processing App 20100003020 - Ranish; Joseph M. ;   et al. | 2010-01-07 |
Apparatus and Methods for Hyperbaric Rapid Thermal Processing App 20090298300 - Ranish; Joseph M. ;   et al. | 2009-12-03 |
Apparatus Including Heating Source Reflective Filter for Pyrometry App 20090289053 - Ranish; Joseph M. ;   et al. | 2009-11-26 |
System For Non Radial Temperature Control For Rotating Substrates App 20090274454 - ADERHOLD; WOLFGANG R. ;   et al. | 2009-11-05 |
Lamp for rapid thermal processing chamber Grant 7,612,491 - Ranish , et al. November 3, 2 | 2009-11-03 |
Apparatus Including Heating Source Reflective Filter For Pyrometry App 20090255921 - Ranish; Joseph M. ;   et al. | 2009-10-15 |
Compensation techniques for substrate heating processes Grant 7,598,150 - Ranish , et al. October 6, 2 | 2009-10-06 |
Silver Reflectors For Semiconductor Processing Chambers App 20090212037 - Ranish; Joseph M. ;   et al. | 2009-08-27 |
Pulse Train Annealing Method And Apparatus App 20090120924 - MOFFATT; STEPHEN ;   et al. | 2009-05-14 |
Pulse Train Annealing Method And Apparatus App 20090121157 - MOFFATT; STEPHEN ;   et al. | 2009-05-14 |
Lamp array for thermal processing exhibiting improved radial uniformity Grant 7,509,035 - Ranish , et al. March 24, 2 | 2009-03-24 |
Methods For Plasma Matching Between Different Chambers And Plasma Stability Monitoring And Control App 20090030632 - TALLAVARJULA; SAIRAJU ;   et al. | 2009-01-29 |
Method And Apparatus For Verifying Proper Substrate Positioning App 20090027657 - SEREBRYANOV; OLEG ;   et al. | 2009-01-29 |
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080280453 - KOELMEL; Blake ;   et al. | 2008-11-13 |
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080276864 - KOELMEL; BLAKE ;   et al. | 2008-11-13 |
Absorber Layer Candidates And Techniques For Application App 20080214014 - RANISH; JOSEPH M. ;   et al. | 2008-09-04 |
Lamp for Rapid Thermal Processing Chamber App 20080199162 - Ranish; Joseph M. ;   et al. | 2008-08-21 |
Lamp for Rapid Thermal Processing Chamber App 20080199163 - Ranish; Joseph M. ;   et al. | 2008-08-21 |
Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080169282 - SORABJI; KHURSHED ;   et al. | 2008-07-17 |
Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080170842 - HUNTER; AARON MUIR ;   et al. | 2008-07-17 |
Method And Apparatus For Heating A Substrate App 20080142208 - RANISH; JOSEPH M. ;   et al. | 2008-06-19 |
Method And Apparatus For Heating A Substrate App 20080145038 - RANISH; JOSEPH M. ;   et al. | 2008-06-19 |
Compensation Techniques For Substrate Heating Processes App 20080118641 - Ranish; Joseph M. ;   et al. | 2008-05-22 |
Method For Forming Silicon-containing Materials During A Photoexcitation Deposition Process App 20060286775 - Singh; Kaushal K. ;   et al. | 2006-12-21 |
Method For Forming Silicon-containing Materials During A Photoexcitation Deposition Process App 20060286776 - Ranish; Joseph M. ;   et al. | 2006-12-21 |
Lamp assembly having flexibly positioned rigid plug Grant 7,147,359 - Ranish , et al. December 12, 2 | 2006-12-12 |
Thermal flux laser annealing for ion implantation of semiconductor P-N junctions Grant 7,135,392 - Adams , et al. November 14, 2 | 2006-11-14 |
Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes Grant 7,129,440 - Adams , et al. October 31, 2 | 2006-10-31 |
Single axis light pipe for homogenizing slow axis of illumination systems bases on laser diodes App 20060102605 - Adams; Bruce E. ;   et al. | 2006-05-18 |
Stepped reflector plate Grant 7,041,931 - Jennings , et al. May 9, 2 | 2006-05-09 |
Lamp array for thermal processing exhibiting improved radial uniformity App 20060066193 - Ranish; Joseph M. ;   et al. | 2006-03-30 |
Lamp assembly having flexibly positioned rigid plug App 20050286243 - Ranish, Joseph M. ;   et al. | 2005-12-29 |
Thermally matched support ring for substrate processing chamber Grant 6,888,104 - Ranish , et al. May 3, 2 | 2005-05-03 |
Lamphead for a rapid thermal processing chamber Grant 6,805,466 - Ranish October 19, 2 | 2004-10-19 |
Stepped reflector plate App 20040079746 - Jennings, Dean ;   et al. | 2004-04-29 |
Semiconductor processing system with lamp cooling Grant 6,376,804 - Ranish , et al. April 23, 2 | 2002-04-23 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.