| Patent | Date |
|---|
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20220158604 - Kapoor; Sunil ; et al. | 2022-05-19 |
Mutually Induced Filters
App 20220149801 - Kapoor; Sunil ; et al. | 2022-05-12 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations
Grant 11,258,421 - Kapoor , et al. February 22, 2 | 2022-02-22 |
Mutually induced filters
Grant 11,258,420 - Kapoor , et al. February 22, 2 | 2022-02-22 |
Fault detection using showerhead voltage variation
Grant 10,879,092 - Kapoor , et al. December 29, 2 | 2020-12-29 |
Mutually Induced Filters
App 20200252040 - Kind Code | 2020-08-06 |
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20200195216 - Kapoor; Sunil ; et al. | 2020-06-18 |
Mutually induced filters
Grant 10,637,427 - Kapoor , et al. | 2020-04-28 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations
Grant 10,622,962 - Kapoor , et al. | 2020-04-14 |
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20190149119 - Kapoor; Sunil ; et al. | 2019-05-16 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations
Grant 10,187,032 - Kapoor , et al. Ja | 2019-01-22 |
Fault Detection Using Showerhead Voltage Variation
App 20180350643 - Kapoor; Sunil ; et al. | 2018-12-06 |
Multi-station plasma reactor with RF balancing
Grant 10,145,010 - Kapoor , et al. De | 2018-12-04 |
Mutually Induced Filters
App 20180331669 - Kapoor; Sunil ; et al. | 2018-11-15 |
Systems and methods for detection of plasma instability by electrical measurement
Grant 10,128,160 - Sakiyama , et al. November 13, 2 | 2018-11-13 |
Mutually induced filters
Grant 10,044,338 - Kapoor , et al. August 7, 2 | 2018-08-07 |
Fault detection using showerhead voltage variation
Grant 10,043,690 - Kapoor , et al. August 7, 2 | 2018-08-07 |
Systems And Methods For Providing Shunt Cancellation Of Parasitic Components In A Plasma Reactor
App 20180175819 - Rangineni; Yaswanth ; et al. | 2018-06-21 |
Multi-station Plasma Reactor With Rf Balancing
App 20180163302 - Kapoor; Sunil ; et al. | 2018-06-14 |
Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability
Grant 9,997,422 - Karim , et al. June 12, 2 | 2018-06-12 |
Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication
Grant 9,941,113 - Keil , et al. April 10, 2 | 2018-04-10 |
Systems and Methods for Detection of Plasma Instability by Electrical Measurement
App 20180076100 - Sakiyama; Yukinori ; et al. | 2018-03-15 |
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
Grant 9,875,883 - Sakiyama , et al. January 23, 2 | 2018-01-23 |
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20170365907 - Kapoor; Sunil ; et al. | 2017-12-21 |
Multi-station plasma reactor with RF balancing
Grant 9,840,776 - Kapoor , et al. December 12, 2 | 2017-12-12 |
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the Metrology for Station-to-Station and Tool-to-Tool Matching
App 20170338085 - Sakiyama; Yukinori ; et al. | 2017-11-23 |
Systems and methods for detection of plasma instability by electrical measurement
Grant 9,824,941 - Sakiyama , et al. November 21, 2 | 2017-11-21 |
Systems and Methods for Using Electrical Asymmetry Effect to Control Plasma Process Space in Semiconductor Fabrication
App 20170330744 - Keil; Douglas ; et al. | 2017-11-16 |
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
Grant 9,754,769 - Sakiyama , et al. September 5, 2 | 2017-09-05 |
Systems and Methods for Detection of Plasma Instability by Electrical Measurement
App 20170141000 - Sakiyama; Yukinori ; et al. | 2017-05-18 |
Systems and Methods for Frequency Modulation of Radiofrequency Power Supply for Controlling Plasma Instability
App 20170141002 - Karim; Ishtak ; et al. | 2017-05-18 |
Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication
Grant 9,644,271 - Keil , et al. May 9, 2 | 2017-05-09 |
Mutually Induced Filters
App 20170111025 - Kapoor; Sunil ; et al. | 2017-04-20 |
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the Metrology for Station-to-Station and Tool-to-Tool Matching
App 20170076921 - Sakiyama; Yukinori ; et al. | 2017-03-16 |
Fault Detection Using Showerhead Voltage Variation
App 20160293385 - Kapoor; Sunil ; et al. | 2016-10-06 |
Multi-station Plasma Reactor With Rf Balancing
App 20160168701 - Kapoor; Sunil ; et al. | 2016-06-16 |
Multi-station plasma reactor with RF balancing
Grant 9,263,350 - Kapoor , et al. February 16, 2 | 2016-02-16 |
Multi-station Plasma Reactor With Rf Balancing
App 20150348854 - Kapoor; Sunil ; et al. | 2015-12-03 |
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