Rangarajan; Vishwanathan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Rangarajan; Vishwanathan.The latest application filed is for "plasma activated conformal dielectric film deposition".
- Rangarajan; Vishwanathan - Fremont CA
- Rangarajan; Vishwanathan - Beaverton OR
- Rangarajan; Vishwanathan - San Jose CA
| Patent | Date |
|---|---|
| Plasma activated conformal dielectric film deposition Grant 10,043,655 - Swaminathan , et al. August 7, 2 | 2018-08-07 |
| Plasma Activated Conformal Dielectric Film Deposition App 20170148628 - Swaminathan; Shankar ; et al. | 2017-05-25 |
| Plasma activated conformal dielectric film deposition Grant 9,570,274 - Swaminathan , et al. February 14, 2 | 2017-02-14 |
| Plasma Activated Conformal Dielectric Film Deposition App 20150206719 - Swaminathan; Shankar ; et al. | 2015-07-23 |
| Plasma activated conformal dielectric film deposition Grant 8,999,859 - Swaminathan , et al. April 7, 2 | 2015-04-07 |
| Hardmask materials Grant 8,846,525 - Rangarajan , et al. September 30, 2 | 2014-09-30 |
| Plasma Activated Conformal Dielectric Film Deposition App 20140216337 - Swaminathan; Shankar ; et al. | 2014-08-07 |
| Plasma activated conformal dielectric film deposition Grant 8,637,411 - Swaminathan , et al. January 28, 2 | 2014-01-28 |
| Hardmask Materials App 20130330932 - Rangarajan; Vishwanathan ; et al. | 2013-12-12 |
| Hardmask materials Grant 8,536,073 - Rangarajan , et al. September 17, 2 | 2013-09-17 |
| Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer Grant 8,479,683 - Antonelli , et al. July 9, 2 | 2013-07-09 |
| Depositing Conformal Boron Nitride Films App 20130008378 - Antonelli; George Andrew ; et al. | 2013-01-10 |
| Hardmask Materials App 20120276752 - RANGARAJAN; Vishwanathan ; et al. | 2012-11-01 |
| Depositing conformal boron nitride film by CVD without plasma Grant 8,288,292 - Antonelli , et al. October 16, 2 | 2012-10-16 |
| Hardmask materials Grant 8,247,332 - Rangarajan , et al. August 21, 2 | 2012-08-21 |
| Remote plasma processing of interface surfaces Grant 8,217,513 - Antonelli , et al. July 10, 2 | 2012-07-10 |
| Hardmask materials Grant 8,178,443 - Rangarajan , et al. May 15, 2 | 2012-05-15 |
| Plasma Activated Conformal Dielectric Film Deposition App 20120028454 - Swaminathan; Shankar ; et al. | 2012-02-02 |
| Remote plasma processing of interface surfaces Grant 8,084,339 - Antonelli , et al. December 27, 2 | 2011-12-27 |
| Depositing Conformal Boron Nitride Films App 20110244694 - Antonelli; George Andrew ; et al. | 2011-10-06 |
| Hardmask Materials App 20110133313 - Rangarajan; Vishwanathan ; et al. | 2011-06-09 |
| Hardmask Materials App 20110135557 - Rangarajan; Vishwanathan ; et al. | 2011-06-09 |
| Remote Plasma Processing Of Interface Surfaces App 20110120377 - Antonelli; George Andrew ; et al. | 2011-05-26 |
| Remote Plasma Processing Of Interface Surfaces App 20100317178 - Antonelli; George Andrew ; et al. | 2010-12-16 |
| Remote Plasma Processing Of Interface Surfaces App 20100317198 - Antonelli; George Andrew ; et al. | 2010-12-16 |
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