Patent | Date |
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Techniques for manufacturing devices Grant 9,293,623 - Bateman , et al. March 22, 2 | 2016-03-22 |
Plasma processing of workpieces to form a coating Grant 9,062,367 - Hatem , et al. June 23, 2 | 2015-06-23 |
Apparatus and method for controllably implanting workpieces Grant 8,937,004 - Renau , et al. January 20, 2 | 2015-01-20 |
Method Of Forming Single Side Textured Semiconductor Workpieces App 20140273330 - Bhosle; Vikram M. ;   et al. | 2014-09-18 |
Method And System For Ion-assisted Processing App 20140202633 - Godet; Ludovic ;   et al. | 2014-07-24 |
Method and system for ion-assisted processing Grant 8,728,951 - Godet , et al. May 20, 2 | 2014-05-20 |
Method to enhance charge trapping Grant 8,716,155 - Ramappa , et al. May 6, 2 | 2014-05-06 |
Techniques For Manufacturing Devices App 20140120647 - Bateman; Nicholas P.T. ;   et al. | 2014-05-01 |
Method And System For Ion-assisted Processing App 20140038393 - Godet; Ludovic ;   et al. | 2014-02-06 |
Simultaneous via and trench patterning using different etch rates Grant 8,614,143 - Kulkarni , et al. December 24, 2 | 2013-12-24 |
Method for patterning a substrate using ion assisted selective depostion Grant 8,592,230 - Ramappa , et al. November 26, 2 | 2013-11-26 |
Apparatus And Method For Controllably Implanting Workpieces App 20130234034 - Renau; Anthony ;   et al. | 2013-09-12 |
Patterned implant of a dielectric layer Grant 8,507,298 - Ramappa August 13, 2 | 2013-08-13 |
Pressurized treatment of substrates to enhance cleaving process Grant 8,466,039 - Ramappa , et al. June 18, 2 | 2013-06-18 |
Apparatus and method for controllably implanting workpieces Grant 8,461,030 - Renau , et al. June 11, 2 | 2013-06-11 |
Plasma Processing Of Workpieces To Form A Coating App 20130064989 - Hatem; Christopher R. ;   et al. | 2013-03-14 |
Workpiece patterning with plasma sheath modulation Grant 8,187,979 - Ramappa , et al. May 29, 2 | 2012-05-29 |
Ion implantation through laser fields Grant 8,183,546 - Ramappa May 22, 2 | 2012-05-22 |
Method For Patterning A Substrate Using Ion Assisted Selective Deposition App 20110259408 - Ramappa; Deepak A. ;   et al. | 2011-10-27 |
Ion Implantation Through Laser Fields App 20110204264 - RAMAPPA; Deepak A. | 2011-08-25 |
Workpiece Patterning With Plasma Sheath Modulation App 20110151610 - RAMAPPA; Deepak A. ;   et al. | 2011-06-23 |
Cleaving Of Substrates App 20110127885 - RAMAPPA; Deepak A. | 2011-06-02 |
Apparatus And Method For Controllably Implanting Workpieces App 20110124186 - Renau; Anthony ;   et al. | 2011-05-26 |
Reducing Surface Recombination And Enhancing Light Trapping In Solar Cells App 20110097840 - Ramappa; Deepak A. | 2011-04-28 |
Etch residue reduction by ash methodology Grant 7,910,477 - Jacques , et al. March 22, 2 | 2011-03-22 |
Cleaving of substrates Grant 7,902,091 - Ramappa March 8, 2 | 2011-03-08 |
Thermal modulation of implant process Grant 7,868,306 - Ramappa January 11, 2 | 2011-01-11 |
Method to Synthesize Graphene App 20100323113 - Ramappa; Deepak A. ;   et al. | 2010-12-23 |
Formation Of Raised Source/Drain On A Strained Thin Film Implanted With Cold And/Or Molecular Carbon App 20100279479 - Hatem; Christopher R. ;   et al. | 2010-11-04 |
Structures for testing and locating defects in integrated circuits Grant 7,772,867 - Guldi , et al. August 10, 2 | 2010-08-10 |
Monitoring of temperature variation across wafers during processing Grant 7,745,238 - Ramappa , et al. June 29, 2 | 2010-06-29 |
Simultaneous Via And Trench Patterning Using Different Etch Rates App 20100136781 - Kulkarni; Makarand R. ;   et al. | 2010-06-03 |
Thermal Modulation Of Implant Process App 20100084580 - Ramappa; Deepak A. | 2010-04-08 |
Semiconductive device fabricated using subliming materials to form interlevel dielectrics Grant 7,601,629 - Ramappa , et al. October 13, 2 | 2009-10-13 |
Structures For Testing And Locating Defects In Integrated Circuits App 20090212793 - Guldi; Richard L. ;   et al. | 2009-08-27 |
Etch residue reduction by ash methodology App 20090170221 - Jacques; Jeannette Michelle ;   et al. | 2009-07-02 |
Dual Damascene Beol Integration Without Dummy Fill Structures To Reduce Parasitic Capacitance App 20090121353 - Ramappa; Deepak A. ;   et al. | 2009-05-14 |
Method for Manufacturing Microdevices or Integrated Circuits on Continuous Sheets App 20090087938 - Ramappa; Deepak A. ;   et al. | 2009-04-02 |
Method To Detect And Predict Metal Silicide Defects In A Microelectronic Device During The Manufacture Of An Integrated Circuit App 20090017564 - Ramappa; Deepak A. | 2009-01-15 |
Damascene Process Having Retained Capping Layer Through Metallization For Protecting Low-k Dielectrics App 20080299718 - Jiang; Ping ;   et al. | 2008-12-04 |
Method to detect and predict metal silicide defects in a microelectronic device during the manufacture of an integrated circuit Grant 7,443,189 - Ramappa October 28, 2 | 2008-10-28 |
System for ultraviolet atmospheric seed layer remediation Grant 7,312,151 - Frank , et al. December 25, 2 | 2007-12-25 |
Post-polish treatment for inhibiting copper corrosion Grant 7,268,073 - Ramappa , et al. September 11, 2 | 2007-09-11 |
Inline method to detect and evaluate early failure rates of interconnects App 20070197020 - Ramappa; Deepak A. | 2007-08-23 |
Semiconductive device fabricated using subliming materials to form interlevel dielectrics App 20070141829 - Ramappa; Deepak A. ;   et al. | 2007-06-21 |
Methods for detecting structure dependent process defects Grant 7,228,193 - Guldi , et al. June 5, 2 | 2007-06-05 |
System for remediating cross contamination in semiconductor manufacturing processes Grant 7,200,498 - Ramappa April 3, 2 | 2007-04-03 |
Methods for detecting structure dependent process defects App 20070038325 - Guldi; Richard L. ;   et al. | 2007-02-15 |
Method to detect and predict metal silicide defects in a microelectronic device during the manufacture of an integrated circuit App 20060172443 - Ramappa; Deepak A. | 2006-08-03 |
System for ultraviolet atmospheric seed layer remediation App 20060113499 - Frank; Aaron ;   et al. | 2006-06-01 |
Post-polish treatment for inhibiting copper corrosion App 20060099804 - Ramappa; Deepak A. ;   et al. | 2006-05-11 |
System for ultraviolet atmospheric seed layer remediation Grant 7,015,568 - Frank , et al. March 21, 2 | 2006-03-21 |
System for remediating cross contamination in semiconductor manufacturing processes App 20050274805 - Ramappa, Deepak A. | 2005-12-15 |
System and method of evaluating gate oxide integrity for semiconductor microchips Grant 6,963,206 - Ramappa November 8, 2 | 2005-11-08 |
Copper silicide passivation for improved reliability Grant 6,869,873 - Bradshaw , et al. March 22, 2 | 2005-03-22 |
System for ultraviolet atmospheric seed layer remediation App 20050042886 - Frank, Aaron ;   et al. | 2005-02-24 |
System and method of evaluating gate oxide integrity for semiconductor microchips App 20050037525 - Ramappa, Deepak A. | 2005-02-17 |
System and method of evaluating gate oxide integrity for semiconductor microchips Grant 6,812,050 - Ramappa November 2, 2 | 2004-11-02 |
Copper silicide passivation for improved reliability App 20040097075 - Bradshaw, Robert Wayne ;   et al. | 2004-05-20 |
Method and apparatus for monitoring in-line copper contamination Grant 6,607,927 - Ramappa , et al. August 19, 2 | 2003-08-19 |
Method And Apparatus For Controlling Contamination During The Electroplating Deposition Of Metals Onto A Semiconductor Wafer Surface App 20030064586 - Merchant, Sailesh Mansinh ;   et al. | 2003-04-03 |
Method and apparatus for monitoring in-line copper contamination App 20030064533 - Ramappa, Deepak A. ;   et al. | 2003-04-03 |