Ramanathan; Sivakami

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ramanathan; Sivakami.The latest application filed is for "dense oxide coated component of a plasma processing chamber and method of manufacture thereof".

Company Profile

0.12.20

Ramanathan; Sivakami - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof Grant 9,546,432 - Shih , et al. January 17, 2	2017-01-17
Method of wet cleaning aluminum chamber parts Grant 9,387,521 - Shih , et al. July 12, 2	2016-07-12
Corrosion resistant aluminum coating on plasma chamber components Grant 9,337,002 - Daugherty , et al. May 10, 2	2016-05-10
Dense Oxide Coated Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof App 20150337450 - SHIH; Hong ; et al.	2015-11-26
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof Grant 9,123,651 - Shih , et al. September 1, 2	2015-09-01
Dense Oxide Coated Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof App 20140295670 - Shih; Hong ; et al.	2014-10-02
Corrosion Resistant Aluminum Coating On Plasma Chamber Components App 20140272459 - Daugherty; John ; et al.	2014-09-18
Method Of Wet Cleaning Aluminum Chamber Parts App 20140150819 - Shih; Hong ; et al.	2014-06-05
Method of cleaning aluminum plasma chamber parts Grant 8,545,639 - Shih , et al. October 1, 2	2013-10-01
Method Of Cleaning Aluminum Plasma Chamber Parts App 20130104930 - Shih; Hong ; et al.	2013-05-02
Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application App 20050136185 - Ramanathan, Sivakami ; et al.	2005-06-23
Electroless deposition method Grant 6,905,622 - Padhi , et al. June 14, 2	2005-06-14
Electroless deposition method Grant 6,899,816 - Padhi , et al. May 31, 2	2005-05-31
Method and apparatus for reducing organic depletion during non-processing time periods Grant 6,878,245 - Gandikota , et al. April 12, 2	2005-04-12
Electroless deposition method over sub-micron apertures Grant 6,824,666 - Gandikota , et al. November 30, 2	2004-11-30
Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application Grant 6,821,909 - Ramanathan , et al. November 23, 2	2004-11-23
Method and apparatus for improved electroplating fill of an aperture Grant 6,797,620 - Lewis , et al. September 28, 2	2004-09-28
Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application App 20040087141 - Ramanathan, Sivakami ; et al.	2004-05-06
Planarization by chemical polishing for ULSI applications App 20030209523 - Padhi, Deenesh ; et al.	2003-11-13
Method and apparatus for improved electroplating fill of an aperture App 20030194850 - Lewis, John S. ; et al.	2003-10-16
Homogeneous copper-tin alloy plating for enhancement of electro-migration resistance in interconnects App 20030188974 - Padhi, Deenesh ; et al.	2003-10-09
Electroless deposition method App 20030189026 - Padhi, Deenesh ; et al.	2003-10-09
Electroless deposition method App 20030190812 - Padhi, Deenesh ; et al.	2003-10-09
Electroless deposition method App 20030190426 - Padhi, Deenesh ; et al.	2003-10-09
Method and apparatus for reducing organic depletion during non-processing time periods App 20030159936 - Gandikota, Srinivas ; et al.	2003-08-28
Method to reduce the depletion of organics in electroplating baths App 20030159937 - Gandikota, Srinivas ; et al.	2003-08-28
Method for forming copper interconnects App 20030146102 - Ramanathan, Sivakami ; et al.	2003-08-07
Electroless deposition method over sub-micron apertures App 20030140988 - Gandikota, Srinivas ; et al.	2003-07-31
Method of depositing a catalytic layer App 20030143837 - Gandikota, Srinivas ; et al.	2003-07-31
Process window for gap-fill on very high aspect ratio structures using additives in low acid copper baths App 20020112964 - Gandikota, Srinivas ; et al.	2002-08-22

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