| Patent | Date |
|---|
Heated Substrate Support
App 20220279626 - RAJ; Govinda | 2022-09-01 |
Edge ring for a substrate processing chamber
Grant 11,417,561 - Raj , et al. August 16, 2 | 2022-08-16 |
Heated substrate support
Grant 11,330,673 - Raj May 10, 2 | 2022-05-10 |
Substrate Support Designs For A Deposition Chamber
App 20210375658 - RAO; Kaushik ; et al. | 2021-12-02 |
Apparatus And Method For Inspecting Lamps
App 20210285892 - RAJ; Govinda ; et al. | 2021-09-16 |
Substrate chucking and dechucking methods
Grant 11,114,326 - Boyd, Jr. , et al. September 7, 2 | 2021-09-07 |
Conical Coil For Rapid Thermal Anneal Lamps
App 20210272822 - NESTOROV; Vilen K. ; et al. | 2021-09-02 |
Method and apparatus for direct measurement of chucking force on an electrostatic chuck
Grant 11,054,317 - Potter , et al. July 6, 2 | 2021-07-06 |
Substrate Support With Real Time Force And Film Stress Control
App 20210066038 - BOYD, JR.; Wendell Glenn ; et al. | 2021-03-04 |
Substrate support with real time force and film stress control
Grant 10,879,046 - Boyd, Jr. , et al. December 29, 2 | 2020-12-29 |
3d Printed Chamber Components Configured For Lower Film Stress And Lower Operating Temperature
App 20200365374 - NARENDRNATH; Kadthala R. ; et al. | 2020-11-19 |
3D printed chamber components configured for lower film stress and lower operating temperature
Grant 10,777,391 - Narendrnath , et al. Sept | 2020-09-15 |
Wireless In-situ Real-time Measurement Of Electrostatic Chucking Force In Semiconductor Wafer Processing
App 20200194290 - Gopalan; Ramesh ; et al. | 2020-06-18 |
Component, Method Of Manufacturing The Component, And Method Of Cleaning The Component
App 20200185202 - WIDLOW; Ian ; et al. | 2020-06-11 |
Cooled gas feed block with baffle and nozzle for HDP-CVD
Grant 10,662,529 - Raj , et al. | 2020-05-26 |
Edge Ring For A Substrate Processing Chamber
App 20200161165 - RAJ; Govinda ; et al. | 2020-05-21 |
Substrate distance monitoring
Grant 10,648,788 - Boyd, Jr. , et al. | 2020-05-12 |
Method And Apparatus For Direct Measurement Of Chucking Force On An Electrostatic Chuck
App 20200103294 - Potter; Charles G. ; et al. | 2020-04-02 |
Edge ring for a substrate processing chamber
Grant 10,553,473 - Raj , et al. Fe | 2020-02-04 |
Amalgamated cover ring
Grant 10,515,843 - Raj , et al. Dec | 2019-12-24 |
Brazed Joint And Semiconductor Processing Chamber Component Having The Same
App 20190226512 - RAJ; Govinda ; et al. | 2019-07-25 |
Substrate Chucking And Dechucking Methods
App 20190206712 - BOYD, JR.; Wendell Glenn ; et al. | 2019-07-04 |
Heated Substrate Support
App 20190159292 - RAJ; GOVINDA | 2019-05-23 |
Magnetron having enhanced cooling characteristics
Grant 10,290,459 - Raj , et al. | 2019-05-14 |
Magnetron Having Enhanced Cooling Characteristics
App 20190051485 - RAJ; Govinda ; et al. | 2019-02-14 |
Corrosion control for chamber components
Grant 10,190,701 - Raj , et al. Ja | 2019-01-29 |
Thermal radiation barrier for substrate processing chamber components
Grant 10,177,014 - Raj , et al. J | 2019-01-08 |
EMI/RF shielding of thermocouples
Grant 10,168,229 - Raj , et al. J | 2019-01-01 |
Magnetron having enhanced cooling characteristics
Grant 10,141,153 - Raj , et al. Nov | 2018-11-27 |
Methods and apparatus for electrostatic chuck repair and refurbishment
Grant 10,049,908 - Raj , et al. August 14, 2 | 2018-08-14 |
Corrosion resistant abatement system
Grant 10,005,025 - Raj , et al. June 26, 2 | 2018-06-26 |
Emi/rf Shielding Of Thermocouples
App 20180017447 - RAJ; Govinda ; et al. | 2018-01-18 |
Substrate Distance Monitoring
App 20170350688 - BOYD, JR.; Wendell Glenn ; et al. | 2017-12-07 |
EMI/RF shielding of thermocouples
Grant 9,823,133 - Raj , et al. November 21, 2 | 2017-11-21 |
Cooled Gas Feed Block With Baffle And Nozzle For Hdp-cvd
App 20170191161 - RAJ; Govinda ; et al. | 2017-07-06 |
Amalgamated Cover Ring
App 20170162422 - RAJ; Govinda ; et al. | 2017-06-08 |
Corrosion Control For Chamber Components
App 20170152968 - RAJ; Govinda ; et al. | 2017-06-01 |
Pad design for electrostatic chuck surface
Grant 9,613,846 - Raj , et al. April 4, 2 | 2017-04-04 |
3d Printed Magnetron Having Enhanced Cooling Characteristics
App 20170084418 - RAJ; Govinda ; et al. | 2017-03-23 |
Substrate Support With Real Time Force And Film Stress Control
App 20170076915 - BOYD, Jr.; Wendell Glen ; et al. | 2017-03-16 |
Methods And Apparatus For Electrostatic Chuck Repair And Refurbishment
App 20160329230 - RAJ; Govinda ; et al. | 2016-11-10 |
3d Printed Chamber Components Configured For Lower Film Stress And Lower Operating Temperature
App 20160233060 - NARENDRNATH; Kadthala R. ; et al. | 2016-08-11 |
Radially Outward Pad Design For Electrostatic Chuck Surface
App 20160230269 - RAJ; Govinda ; et al. | 2016-08-11 |
Edge Ring For A Substrate Processing Chamber
App 20160181142 - RAJ; Govinda ; et al. | 2016-06-23 |
Methods and apparatus for electrostatic chuck repair and refurbishment
Grant 9,349,630 - Raj , et al. May 24, 2 | 2016-05-24 |
Corrosion Resistant Abatement System
App 20160107117 - RAJ; Govinda ; et al. | 2016-04-21 |
Pad Design For Electrostatic Chuck Surface
App 20150146339 - RAJ; Govinda ; et al. | 2015-05-28 |
Methods And Apparatus For Electrostatic Chuck Repair And Refurbishment
App 20140268478 - RAJ; Govinda ; et al. | 2014-09-18 |
Thermal Radiation Barrier For Substrate Processing Chamber Components
App 20140165915 - RAJ; Govinda ; et al. | 2014-06-19 |
Emi/rf Shielding Of Thermocouples
App 20110013669 - RAJ; GOVINDA ; et al. | 2011-01-20 |
Process for chemical treatment of discontinuous cellulosic fibers and composites of polyethylene and treated fibers
Grant 5,120,776 - Raj , et al. June 9, 1 | 1992-06-09 |
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