Rahtu; Antti H.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Rahtu; Antti H..The latest application filed is for "ald of metal-containing films using cyclopentadienyl compounds".

Company Profile

2.9.9

Rahtu; Antti H. - Vantaa FI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Ald Of Metal-containing Films Using Cyclopentadienyl Compounds App 20220178027 - Barry; Sean T. ; et al.	2022-06-09
ALD of metal-containing films using cyclopentadienyl compounds Grant 11,155,919 - Barry , et al. October 26, 2	2021-10-26
Ald Of Metal-containing Films Using Cyclopentadienyl Compounds App 20200024738 - Barry; Sean T. ; et al.	2020-01-23
ALD of hafnium-containing films using cyclopentadienyl compounds Grant 10,294,563 - Barry , et al.	2019-05-21
Ald Of Metal-containing Films Using Cyclopentadienyl Compounds App 20170369997 - Barry; Sean T. ; et al.	2017-12-28
ALD of metal-containing films using cyclopentadienly compounds Grant 9,850,575 - Barry , et al. December 26, 2	2017-12-26
Ald Of Metal-containing Films Using Cyclopentadienyl Compounds App 20170362709 - Barry; Sean T. ; et al.	2017-12-21
ALD of metal-containing films using cyclopentadienyl compounds Grant 9,677,175 - Barry , et al. June 13, 2	2017-06-13
ALD of metal-containing films using cyclopentadienyl compounds Grant 9,670,582 - Barry , et al. June 6, 2	2017-06-06
Ald Of Metal-containing Films Using Cyclopentadienyl Compounds App 20170081762 - Barry; Sean T. ; et al.	2017-03-23
Ald Of Metal-containing Films Using Cyclopentadienyl Compounds App 20160230277 - Barry; Sean T. ; et al.	2016-08-11
ALD of zirconium-containing films using cyclopentadienyl compounds Grant 9,273,391 - Barry , et al. March 1, 2	2016-03-01
Ald Of Metal-containing Films Using Cyclopentadienyl Compounds App 20150017348 - Barry; Sean T. ; et al.	2015-01-15
ALD of metal-containing films using cyclopentadienyl compounds Grant 8,795,771 - Barry , et al. August 5, 2	2014-08-05
Method for the deposition of a film by CVD or ALD Grant 8,048,484 - Rahtu November 1, 2	2011-11-01
ALD of metal-containing films using cyclopentadienyl compounds App 20080102205 - Barry; Sean T. ; et al.	2008-05-01
Method for the deposition of a film by CVD or ALD App 20070123060 - Rahtu; Antti H.	2007-05-31

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