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Lithographic method
Grant 10,962,887 - Tinnemans , et al. March 30, 2 | 2021-03-30 |
Lithographic Method
App 20200081356 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2020-03-12 |
Methods, apparatus and system for a passthrough-based architecture
Grant 10,559,503 - Bouche , et al. Feb | 2020-02-11 |
Lithographic method
Grant 10,527,958 - Tinnemans , et al. J | 2020-01-07 |
Lithographic Method
App 20190094721 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-03-28 |
Method, apparatus and system for a high density middle of line flow
Grant 10,236,350 - Bouche , et al. | 2019-03-19 |
Methods, Apparatus And System For A Passthrough-based Architecture
App 20180033701 - Bouche; Guillaume ; et al. | 2018-02-01 |
Cut first alternative for 2D self-aligned via
Grant 9,852,984 - Bouche , et al. December 26, 2 | 2017-12-26 |
Methods, apparatus and system for a passthrough-based architecture
Grant 9,818,651 - Bouche , et al. November 14, 2 | 2017-11-14 |
Method, Apparatus And System For A High Density Middle Of Line Flow
App 20170263715 - Bouche; Guillaume ; et al. | 2017-09-14 |
Methods, Apparatus And System For A Passthrough-based Architecture
App 20170263506 - Bouche; Guillaume ; et al. | 2017-09-14 |
2d Self-aligned Via First Process Flow
App 20160329278 - BOUCHE; Guillaume ; et al. | 2016-11-10 |
Cut First Alternative For 2d Self-aligned Via
App 20160322298 - BOUCHE; Guillaume ; et al. | 2016-11-03 |
Multilayer pattern transfer for chemical guides
Grant 9,478,506 - Farrell , et al. October 25, 2 | 2016-10-25 |
Cut first alternative for 2D self-aligned via
Grant 9,425,097 - Bouche , et al. August 23, 2 | 2016-08-23 |
2D self-aligned via first process flow
Grant 9,362,165 - Bouche , et al. June 7, 2 | 2016-06-07 |
Methods And Controllers For Controlling Focus Of Ultraviolet Light From A Lithographic Imaging System, And Apparatuses For Forming An Integrated Circuit Employing The Same
App 20160033879 - Raghunathan; Sudharshanan ; et al. | 2016-02-04 |
Methods for fabricating integrated circuits including multi-patterning of masks for extreme ultraviolet lithography
Grant 8,956,789 - Raghunathan February 17, 2 | 2015-02-17 |
Methods for fabricating EUV masks and methods for fabricating integrated circuits using such EUV masks
Grant 8,911,920 - Raghunathan , et al. December 16, 2 | 2014-12-16 |
Methods For Fabricating Euv Masks And Methods For Fabricating Integrated Circuits Using Such Euv Masks
App 20140272677 - Raghunathan; Sudharshanan ; et al. | 2014-09-18 |
Methods For Fabricating Integrated Circuits Including Multi-patterning Of Masks For Extreme Ultraviolet Lithography
App 20140273306 - Raghunathan; Sudharshanan | 2014-09-18 |
Multilayer Pattern Transfer For Chemical Guides
App 20140252660 - Farrell; Richard A. ; et al. | 2014-09-11 |
Sidewall image transfer process with multiple critical dimensions
Grant 8,673,165 - Raghunathan , et al. March 18, 2 | 2014-03-18 |
Sidewall Image Transfer Process With Multiple Critical Dimensions
App 20130089984 - Raghunathan; Sudharshanan ; et al. | 2013-04-11 |
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