Patent | Date |
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Using Sacrificial Polymer Materials In Semiconductor Processing App 20210159069 - Andreas; Michael T. ;   et al. | 2021-05-27 |
Using sacrificial polymer materials in semiconductor processing Grant 10,916,418 - Andreas , et al. February 9, 2 | 2021-02-09 |
Vapor-etch cyclic process Grant 10,607,851 - Li , et al. | 2020-03-31 |
Using Sacrificial Polymer Materials In Semiconductor Processing App 20200075316 - Andreas; Michael T. ;   et al. | 2020-03-05 |
Using sacrificial polymer materials in semiconductor processing Grant 10,497,558 - Andreas , et al. De | 2019-12-03 |
Removing polysilicon Grant 10,479,938 - Imonigie , et al. Nov | 2019-11-19 |
Using Sacrificial Polymer Materials In Semiconductor Processing App 20190267232 - Andreas; Michael T. ;   et al. | 2019-08-29 |
Vapor-etch Cyclic Process App 20190067028 - Li; Andrew L. ;   et al. | 2019-02-28 |
Removing polysilicon Grant 10,113,113 - Imonigie , et al. October 30, 2 | 2018-10-30 |
Removing Polysilicon App 20180298282 - Imonigie; Jerome A. ;   et al. | 2018-10-18 |
Removing Polysilicon App 20170243758 - Imonigie; Jerome A. ;   et al. | 2017-08-24 |
Surface modification compositions, methods of modifying silicon-based materials, and methods of forming high aspect ratio structures Grant 9,653,307 - Imonigie , et al. May 16, 2 | 2017-05-16 |
Compositions for etching polysilicon Grant 9,650,570 - Imonigie , et al. May 16, 2 | 2017-05-16 |
Methods of selectively doping chalcogenide materials and methods of forming semiconductor devices Grant 9,614,153 - Imonigie , et al. April 4, 2 | 2017-04-04 |
Methods of Forming Capacitors App 20160013263 - Greeley; Joseph Neil ;   et al. | 2016-01-14 |
Multi-material structures and capacitor-containing semiconductor constructions Grant 9,236,427 - Greeley , et al. January 12, 2 | 2016-01-12 |
Methods of forming capacitors Grant 9,159,780 - Greeley , et al. October 13, 2 | 2015-10-13 |
Compositions For Etching Polysilicon App 20150203754 - Imonigie; Jerome A. ;   et al. | 2015-07-23 |
Methods Of Selectively Doping Chalcogenide Materials And Methods Of Forming Semiconductor Devices App 20150140777 - Imonigie; Jerome A. ;   et al. | 2015-05-21 |
Methods of Forming Capacitors App 20150126016 - Greeley; Joseph Neil ;   et al. | 2015-05-07 |
Etching polysilicon Grant 9,012,318 - Imonigie , et al. April 21, 2 | 2015-04-21 |
Methods Of Forming Hydrophobic Surfaces On Semiconductor Device Structures, Methods Of Forming Semiconductor Device Structures, And Semiconductor Device Structures App 20150084187 - Laboriante; Ian C. ;   et al. | 2015-03-26 |
Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates Grant 8,969,217 - Fucsko , et al. March 3, 2 | 2015-03-03 |
Multi-Material Structures, Semiconductor Constructions and Methods of Forming Capacitors App 20150054127 - Greeley; Joseph Neil ;   et al. | 2015-02-26 |
Methods of selectively forming metal-doped chalcogenide materials, methods of selectively doping chalcogenide materials, and methods of forming semiconductor device structures including same Grant 8,962,460 - Imonigie , et al. February 24, 2 | 2015-02-24 |
Methods of forming capacitors Grant 8,946,043 - Greeley , et al. February 3, 2 | 2015-02-03 |
Methods of forming hydrophobic surfaces on semiconductor device structures, methods of forming semiconductor device structures, and semiconductor device structures Grant 8,932,933 - Laboriante , et al. January 13, 2 | 2015-01-13 |
Methods of forming capacitors Grant 8,865,544 - Greeley , et al. October 21, 2 | 2014-10-21 |
Selective Wet Etching Of Hafnium Aluminum Oxide Films App 20140103498 - Raghu; Prashant ;   et al. | 2014-04-17 |
Etching Polysilicon App 20140087551 - IMONIGIE; Jerome A. ;   et al. | 2014-03-27 |
Multi-Material Structures, Semiconductor Constructions and Methods of Forming Capacitors App 20140015097 - Greeley; Joseph Neil ;   et al. | 2014-01-16 |
Selective wet etching of hafnium aluminum oxide films Grant 08618000 - | 2013-12-31 |
Selective wet etching of hafnium aluminum oxide films Grant 8,618,000 - Raghu , et al. December 31, 2 | 2013-12-31 |
Methods of forming semiconductor constructions Grant 8,613,864 - Raghu December 24, 2 | 2013-12-24 |
Recessed Gate Memory Apparatuses And Methods App 20130334594 - Imonigie; Jerome A. ;   et al. | 2013-12-19 |
Methods Of Treating Semiconductor Substrates, Methods Of Forming Openings During Semiconductor Fabrication, And Methods Of Removing Particles From Over Semiconductor Substrates App 20130302995 - Fucsko; Janos ;   et al. | 2013-11-14 |
Methods Of Forming Hydrophobic Surfaces On Semiconductor Device Structures, Methods Of Forming Semiconductor Device Structures, And Semiconductor Device Structures App 20130292647 - Laboriante; Ian C. ;   et al. | 2013-11-07 |
Highly selective doped oxide etchant Grant 8,512,587 - Rana , et al. August 20, 2 | 2013-08-20 |
Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates Grant 8,492,288 - Fucsko , et al. July 23, 2 | 2013-07-23 |
Methods Of Forming Capacitors App 20130164902 - Greeley; Joseph Neil ;   et al. | 2013-06-27 |
Transistor gate forming methods and transistor structures Grant 8,349,687 - Tang , et al. January 8, 2 | 2013-01-08 |
Methods of Forming Semiconductor Constructions App 20120322266 - Raghu; Prashant | 2012-12-20 |
Display Devices Having Electrolessly Plated Conductors And Methods App 20120314171 - Jindal; Anurag ;   et al. | 2012-12-13 |
Selective Wet Etching Of Hafnium Aluminum Oxide Films App 20120306059 - Raghu; Prashant ;   et al. | 2012-12-06 |
Microelectronic Substrate Cleaning Systems With Polyelectrolyte And Associated Methods App 20120298158 - Greeley; Joseph N. ;   et al. | 2012-11-29 |
Methods Of Selectively Forming Metal-doped Chalcogenide Materials, Methods Of Selectively Doping Chalcogenide Materials, And Methods Of Forming Semiconductor Device Structures Including Same App 20120276725 - Imonigie; Jerome A. ;   et al. | 2012-11-01 |
Selective wet etching of hafnium aluminum oxide films Grant 8,283,258 - Raghu , et al. October 9, 2 | 2012-10-09 |
Methods of forming semiconductor constructions Grant 8,273,261 - Raghu September 25, 2 | 2012-09-25 |
Microelectronic substrate cleaning systems with polyelectrolyte and associated methods Grant 8,252,119 - Greeley , et al. August 28, 2 | 2012-08-28 |
Method of forming capacitors, and methods of utilizing silicon dioxide-containing masking structures Grant 8,183,157 - Rana , et al. May 22, 2 | 2012-05-22 |
Methods of utilizing silicon dioxide-containing masking structures Grant 8,026,148 - Rana , et al. September 27, 2 | 2011-09-27 |
Method of Forming Capacitors, and Methods of Utilizing Silicon Dioxide-Containing Masking Structures App 20110143543 - RANA; NIRAJ ;   et al. | 2011-06-16 |
Methods of Utilizing Silicon Dioxide-Containing Masking Structures App 20110111597 - Rana; Niraj ;   et al. | 2011-05-12 |
Transistor Gate Forming Methods and Transistor Structures App 20110092062 - Tang; Sanh D. ;   et al. | 2011-04-21 |
Methods of etching polysilicon and methods of forming pluralities of capacitors Grant 7,902,081 - Raghu , et al. March 8, 2 | 2011-03-08 |
Methods of forming capacitors Grant 7,892,937 - Rana , et al. February 22, 2 | 2011-02-22 |
Transistor gate forming methods and transistor structures Grant 7,867,845 - Tang , et al. January 11, 2 | 2011-01-11 |
Methods of Forming Semiconductor Constructions App 20100190344 - Raghu; Prashant | 2010-07-29 |
Methods of forming capacitors Grant 7,713,813 - Raghu May 11, 2 | 2010-05-11 |
Methods Of Forming Capacitors, And Methods Of Utilizing Silicon Dioxide-Containing Masking Structures App 20100099232 - Rana; Niraj ;   et al. | 2010-04-22 |
Microelectronic Substrate Cleaning Systems With Polyelectrolyte And Associated Methods App 20100043824 - Greeley; Joseph N. ;   et al. | 2010-02-25 |
Transistor structures Grant 7,659,560 - Tang , et al. February 9, 2 | 2010-02-09 |
Etch compositions and methods of processing a substrate Grant 7,629,266 - Fucsko , et al. December 8, 2 | 2009-12-08 |
Selective Wet Etching of Hafnium Aluminum Oxide Films App 20090047790 - Raghu; Prashant ;   et al. | 2009-02-19 |
Etch compositions and methods of processing a substrate Grant 7,491,650 - Fucsko , et al. February 17, 2 | 2009-02-17 |
Plasma Treatment Of Insulating Material App 20080246124 - Mathew; James ;   et al. | 2008-10-09 |
Methods of etching nickel silicide and cobalt silicide and methods of forming conductive lines Grant 7,371,333 - Raghu May 13, 2 | 2008-05-13 |
Methods of etching polysilicon and methods of forming pluralities of capacitors App 20080090416 - Raghu; Prashant ;   et al. | 2008-04-17 |
Highly Selective Doped Oxide Etchant App 20070262048 - Rana; Niraj ;   et al. | 2007-11-15 |
Highly selective doped oxide etchant App 20070207622 - Rana; Niraj ;   et al. | 2007-09-06 |
Transistor gate forming methods and transistor structures App 20070166920 - Tang; Sanh D. ;   et al. | 2007-07-19 |
Etch Compositions and Methods of Processing a Substrate App 20070145009 - Fucsko; Janos ;   et al. | 2007-06-28 |
Transistor gate forming methods and transistor structures App 20070048941 - Tang; Sanh D. ;   et al. | 2007-03-01 |
Methods of forming semiconductor constructions and capacitors App 20070048976 - Raghu; Prashant | 2007-03-01 |
Etch compositions and methods of processing a substrate App 20070023396 - Fucsko; Janos ;   et al. | 2007-02-01 |
Methods of etching nickel silicide and cobalt silicide and methods of forming conductive lines App 20060276048 - Raghu; Prashant | 2006-12-07 |