| Patent | Date |
|---|
Variable radius mirror dichroic beam splitter module for extreme ultraviolet source
Grant 9,516,729 - Zhang , et al. December 6, 2 | 2016-12-06 |
Variable Radius Mirror Dichroic Beam Splitter Module for Extreme Ultraviolet Source
App 20160174351 - Zhang; Kevin W. ; et al. | 2016-06-16 |
Regenerative ring resonator
Grant RE45,957 - Ye , et al. March 29, 2 | 2016-03-29 |
Calibration of photoelectromagnetic sensor in a laser source
Grant 9,239,268 - Liu , et al. January 19, 2 | 2016-01-19 |
Calibration of photoelectromagnetic sensor in a laser source
Grant 9,239,269 - Liu , et al. January 19, 2 | 2016-01-19 |
Calibration Of Photoelectromagnetic Sensor In A Laser Source
App 20160011057 - Liu; Rong ; et al. | 2016-01-14 |
Calibration Of Photoelectromagnetic Sensor In A Laser Source
App 20160011056 - Liu; Rong ; et al. | 2016-01-14 |
Target for laser produced plasma extreme ultraviolet light source
Grant 9,232,624 - Rafac , et al. January 5, 2 | 2016-01-05 |
Extreme ultraviolet light source
Grant 9,232,623 - Rafac , et al. January 5, 2 | 2016-01-05 |
Target For Laser Produced Plasma Extreme Ultraviolet Light Source
App 20150342016 - Rafac; Robert J. ; et al. | 2015-11-26 |
Target for extreme ultraviolet light source
Grant 9,155,179 - Tao , et al. October 6, 2 | 2015-10-06 |
Target for laser produced plasma extreme ultraviolet light source
Grant 9,107,279 - Rafac , et al. August 11, 2 | 2015-08-11 |
Extreme Ultraviolet Light Source
App 20150208494 - Rafac; Robert J. ; et al. | 2015-07-23 |
Target For Laser Produced Plasma Extreme Ultraviolet Light Source
App 20150189729 - Rafac; Robert J. ; et al. | 2015-07-02 |
System and method for adjusting seed laser pulse width to control EUV output energy
Grant 9,000,403 - Crouch , et al. April 7, 2 | 2015-04-07 |
Target For Extreme Ultraviolet Light Source
App 20150076374 - Tao; Yezheng ; et al. | 2015-03-19 |
Target for laser produced plasma extreme ultraviolet light source
Grant 8,927,952 - Rafac , et al. January 6, 2 | 2015-01-06 |
Target for extreme ultraviolet light source
Grant 8,912,514 - Tao , et al. December 16, 2 | 2014-12-16 |
Target for laser produced plasma extreme ultraviolet light source
Grant 8,872,143 - Rafac , et al. October 28, 2 | 2014-10-28 |
Target For Extreme Ultraviolet Light Source
App 20140299791 - Tao; Yezheng ; et al. | 2014-10-09 |
Intracavity loss element for power amplifier
Grant 8,853,657 - Rafac , et al. October 7, 2 | 2014-10-07 |
Target For Laser Produced Plasma Extreme Ultraviolet Light Source
App 20140264087 - Rafac; Robert J. ; et al. | 2014-09-18 |
Target For Laser Produced Plasma Extreme Ultraviolet Light Source
App 20140264090 - Rafac; Robert J. ; et al. | 2014-09-18 |
System and Method for Adjusting Seed Laser Pulse Width to Control EUV Output Energy
App 20140233005 - Crouch; James ; et al. | 2014-08-21 |
Target for extreme ultraviolet light source
Grant 8,791,440 - Tao , et al. July 29, 2 | 2014-07-29 |
Intracavity Loss Element for Power Amplifier
App 20140028988 - Rafac; Robert J. ; et al. | 2014-01-30 |
Intracavity loss element for power amplifier
Grant 8,563,956 - Melchior , et al. October 22, 2 | 2013-10-22 |
Active spectral control of optical source
Grant 8,520,186 - Seong , et al. August 27, 2 | 2013-08-27 |
Coherency Reduction for Bandwidth Measurement
App 20120162657 - Rafac; Robert J. ; et al. | 2012-06-28 |
Regenerative ring resonator
Grant 8,014,432 - Ye , et al. September 6, 2 | 2011-09-06 |
Active Spectral Control of Optical Source
App 20110205512 - Seong; Nakgeuon ; et al. | 2011-08-25 |
Regenerative Ring Resonator
App 20110069733 - Ye; Hong ; et al. | 2011-03-24 |
Bandwidth measuring device for high pulse repetition rate pulsed laser
Grant 7,733,494 - Rafac June 8, 2 | 2010-06-08 |
Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
Grant 7,684,046 - Rafac March 23, 2 | 2010-03-23 |
Methods and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
Grant 7,639,364 - Rafac December 29, 2 | 2009-12-29 |
Methods and apparatus for aligning an etalon with a photodiode array
Grant 7,411,686 - Rafac August 12, 2 | 2008-08-12 |
Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
App 20080037010 - Rafac; Robert J. | 2008-02-14 |
Methods and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
App 20080037025 - Rafac; Robert J. | 2008-02-14 |
Spectral bandwidth metrology for high repetition rate gas discharge lasers
Grant 7,317,536 - Rafac January 8, 2 | 2008-01-08 |
Methods and apparatus for aligning an etalon with a photodiode array
App 20070291279 - Rafac; Robert J. | 2007-12-20 |
Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
Grant 7,304,748 - Rafac December 4, 2 | 2007-12-04 |
Bandwidth measuring device for high pulse repetition rate pulsed laser
App 20070229849 - Rafac; Robert J. | 2007-10-04 |
Relax gas discharge laser lithography light source
Grant 7,088,758 - Sandstrom , et al. August 8, 2 | 2006-08-08 |
Method and apparatus for gas discharge laser output light coherency reduction
App 20050286599 - Rafac, Robert J. ; et al. | 2005-12-29 |
Relax gas discharge laser lithography light source
App 20050083983 - Sandstrom, Richard L. ; et al. | 2005-04-21 |
Optical bandwidth meter for laser light
App 20050007600 - Rafac, Robert J. | 2005-01-13 |
Method and apparatus for stabilizing optical dielectric coatings
App 20050008789 - Rafac, Robert J. ; et al. | 2005-01-13 |
Method and apparatus for measuring bandwidth of an optical spectrum output of a very small wavelength very narrow bandwidth high power laser
App 20040263844 - Rafac, Robert J. | 2004-12-30 |
Bandwidth estimation
App 20040263861 - Rafac, Robert J. | 2004-12-30 |
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