Radovanov; Svetlana B.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Radovanov; Svetlana B..The latest application filed is for "ion source with biased extraction plate".
Company Profile
6.32.34
- Radovanov; Svetlana B. - Brookline MA
- Radovanov; Svetlana B. - Marblehead MA
Patent Activity
| Patent | Date |
|---|---|
| Ion beam quality control using a movable mass resolving device Grant 11,049,691 - Koo , et al. June 29, 2 | 2021-06-29 |
| Ion Source With Biased Extraction Plate App 20210134569 - Radovanov; Svetlana B. ; et al. | 2021-05-06 |
| Ion source with biased extraction plate Grant 10,923,306 - Radovanov , et al. February 16, 2 | 2021-02-16 |
| Ion Source With Biased Extraction Plate App 20200294750 - Radovanov; Svetlana B. ; et al. | 2020-09-17 |
| Ion Beam Quality Control Using A Movable Mass Resolving Device App 20190198292 - Koo; Bon-Woong ; et al. | 2019-06-27 |
| Boron implanting using a co-gas Grant 10,290,466 - Koo , et al. | 2019-05-14 |
| Negative ribbon ion beams from pulsed plasmas Grant 10,290,470 - Distaso , et al. | 2019-05-14 |
| High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture Grant 10,290,462 - Koo , et al. | 2019-05-14 |
| High Brightness Ion Beam Extraction App 20180166250 - Koo; Bon-Woong ; et al. | 2018-06-14 |
| Apparatus and method for multilayer deposition Grant 9,988,711 - Likhanskii , et al. June 5, 2 | 2018-06-05 |
| Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Implantation System App 20180087148 - Koo; Bon-Woong ; et al. | 2018-03-29 |
| High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture Grant 9,922,795 - Koo , et al. March 20, 2 | 2018-03-20 |
| Boron Implanting Using A Co-Gas App 20180068830 - Koo; Bon-Woong ; et al. | 2018-03-08 |
| Boron implanting using a co-gas Grant 9,865,430 - Koo , et al. January 9, 2 | 2018-01-09 |
| Method of improving ion beam quality in a non-mass-analyzed ion implantation system Grant 9,840,772 - Koo , et al. December 12, 2 | 2017-12-12 |
| Negative Ribbon Ion Beams from Pulsed Plasmas App 20170309454 - Distaso; Daniel ; et al. | 2017-10-26 |
| Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Implantation System App 20170247791 - Koo; Bon-Woong ; et al. | 2017-08-31 |
| Negative ribbon ion beams from pulsed plasmas Grant 9,734,991 - Distaso , et al. August 15, 2 | 2017-08-15 |
| Apparatus And Techniques For Time Modulated Extraction Of An Ion Beam App 20170178866 - Radovanov; Svetlana B. ; et al. | 2017-06-22 |
| Method of improving ion beam quality in a non-mass-analyzed ion implantation system Grant 9,677,171 - Koo , et al. June 13, 2 | 2017-06-13 |
| Uniformity control using adjustable internal antennas Grant 9,613,777 - Likhanskii , et al. April 4, 2 | 2017-04-04 |
| High Brightness Ion Beam Extraction App 20170032927 - Koo; Bon-Woong ; et al. | 2017-02-02 |
| Negative Ribbon Ion Beams from Pulsed Plasmas App 20170032937 - Distaso; Daniel ; et al. | 2017-02-02 |
| Ion beam uniformity control Grant 9,520,259 - Likhanskii , et al. December 13, 2 | 2016-12-13 |
| Apparatus And Method For Multilayer Deposition App 20160333464 - Likhanskii; Alexandre ; et al. | 2016-11-17 |
| Multi-aperture extraction system for angled ion beam Grant 9,478,399 - Likhanskii , et al. October 25, 2 | 2016-10-25 |
| Multi-aperture Extraction System For Angled Ion Beam App 20160284520 - Likhanskii; Alexandre ; et al. | 2016-09-29 |
| Boron Implanting Using A Co-Gas App 20160163510 - Koo; Bon-Woong ; et al. | 2016-06-09 |
| Ion Beam Uniformity Control App 20160111241 - Likhanskii; Alexandre ; et al. | 2016-04-21 |
| Plasma potential modulated ion implantation system Grant 9,297,063 - Radovanov , et al. March 29, 2 | 2016-03-29 |
| Uniformity Control using Adjustable Internal Antennas App 20160079042 - Likhanskii; Alexandre ; et al. | 2016-03-17 |
| Apparatus and techniques for energetic neutral beam processing Grant 9,288,889 - Radovanov , et al. March 15, 2 | 2016-03-15 |
| Ion beam uniformity control Grant 9,230,773 - Likhanskii , et al. January 5, 2 | 2016-01-05 |
| Method and system for plasma-assisted ion beam processing Grant 9,232,628 - Radovanov , et al. January 5, 2 | 2016-01-05 |
| Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Implantation System App 20150354056 - Koo; Bon-Woong ; et al. | 2015-12-10 |
| Grazing Angle Plasma Processing For Modifying A Substrate Surface App 20150255243 - GODET; Ludovic ; et al. | 2015-09-10 |
| Technique for processing a substrate Grant 9,093,372 - Koo , et al. July 28, 2 | 2015-07-28 |
| Technique For Processing A Substrate App 20150179455 - Koo; Bon-Woong ; et al. | 2015-06-25 |
| Technique for processing a substrate Grant 9,064,795 - Koo , et al. June 23, 2 | 2015-06-23 |
| Techniques and apparatus for high rate hydrogen implantation and co-implantion Grant 9,024,282 - Radovanov , et al. May 5, 2 | 2015-05-05 |
| System and method for plasma control using boundary electrode Grant 8,907,300 - Radovanov , et al. December 9, 2 | 2014-12-09 |
| System And Method For Plasma Control Using Boundary Electrode App 20140265853 - Radovanov; Svetlana B. ; et al. | 2014-09-18 |
| Apparatus And Techniques For Energetic Neutral Beam Processing App 20140272179 - Radovanov; Svetlana B. ; et al. | 2014-09-18 |
| Techniques And Apparatus For High Rate Hydrogen Implantation And Co-implantion App 20140256121 - Radovanov; Svetlana B. ; et al. | 2014-09-11 |
| Method And System For Plasma-assisted Ion Beam Processing App 20140234554 - Radovanov; Svetlana B. ; et al. | 2014-08-21 |
| Method of improving ion beam quality in an implant system Grant 8,669,538 - Koo , et al. March 11, 2 | 2014-03-11 |
| Plasma processing apparatus Grant 8,664,098 - Godet , et al. March 4, 2 | 2014-03-04 |
| Plasma Potential Modulated ION Implantation System App 20130287964 - Radovanov; Svetlana B. ; et al. | 2013-10-31 |
| Plasma Potential Modulated ION Implantation Apparatus App 20130287963 - Radovanov; Svetlana B. ; et al. | 2013-10-31 |
| Technique For Processing A Substrate App 20130260543 - Koo; Bon-Woong ; et al. | 2013-10-03 |
| Technique For Processing A Substrate App 20130260544 - Koo; Bon-Woong ; et al. | 2013-10-03 |
| End terminations for electrodes used in ion implantation systems Grant 8,309,935 - Sinclair , et al. November 13, 2 | 2012-11-13 |
| End Terminations For Electrodes Used In Ion Implantation Systems App 20100252746 - Sinclair; Frank ; et al. | 2010-10-07 |
| Technique for shaping a ribbon-shaped ion beam Grant 7,675,047 - Radovanov , et al. March 9, 2 | 2010-03-09 |
| Multi-purpose electrostatic lens for an ion implanter system Grant 7,579,605 - Renau , et al. August 25, 2 | 2009-08-25 |
| Multi-purpose Electrostatic Lens For An Ion Implanter System App 20080078951 - Renau; Anthony ; et al. | 2008-04-03 |
| Technique for providing a segmented electrostatic lens in an ion implanter Grant 7,339,179 - Radovanov , et al. March 4, 2 | 2008-03-04 |
| Monitor system and method for semiconductor processes Grant 7,309,997 - Radovanov , et al. December 18, 2 | 2007-12-18 |
| Technique for implementing a variable aperture lens in an ion implanter Grant 7,279,687 - Angel , et al. October 9, 2 | 2007-10-09 |
| Technique for providing a segmented electrostatic lens in an ion implanter App 20070164229 - Radovanov; Svetlana B. ; et al. | 2007-07-19 |
| Technique for Shaping a Ribbon-Shaped Ion Beam App 20070108390 - Radovanov; Svetlana B. ; et al. | 2007-05-17 |
| Technique for implementing a variable aperture lens in an ion implanter App 20070045557 - Angel; Gordon C. ; et al. | 2007-03-01 |
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