loadpatents
Patent applications and USPTO patent grants for Radovanov; Svetlana.The latest application filed is for "ion source with single-slot tubular cathode".
Patent | Date |
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Ion source with tubular cathode Grant 11,424,097 - Koo , et al. August 23, 2 | 2022-08-23 |
Shaped electrode Grant D956,005 - Lindberg , et al. June 28, 2 | 2022-06-28 |
Ion Source With Single-slot Tubular Cathode App 20210383995 - Koo; Bon-Woong ;   et al. | 2021-12-09 |
Ion source with single-slot tubular cathode Grant 11,127,557 - Koo , et al. September 21, 2 | 2021-09-21 |
Ion Source With Single-slot Tubular Cathode App 20210287872 - Koo; Bon-Woong ;   et al. | 2021-09-16 |
Electrostatic Filter With Shaped Electrodes App 20210090845 - Lindberg; Robert C. ;   et al. | 2021-03-25 |
Ion Source With Tubular Cathode App 20200343071 - Koo; Bon-Woong ;   et al. | 2020-10-29 |
Ion source with tubular cathode Grant 10,748,738 - Koo , et al. A | 2020-08-18 |
Apparatus and method for controlling ion beam properties using energy filter Grant 10,468,224 - Radovanov , et al. No | 2019-11-05 |
Apparatus And Method For Controlling Ion Beam Properties Using Energy Filter App 20190198283 - Radovanov; Svetlana ;   et al. | 2019-06-27 |
Inductively coupled RF plasma source with magnetic confinement and Faraday shielding Grant 10,049,861 - Benveniste , et al. August 14, 2 | 2018-08-14 |
Apparatus and method for mass analyzed ion beam Grant 9,536,712 - Lee , et al. January 3, 2 | 2017-01-03 |
Control of ion angular distribution of ion beams with hidden deflection electrode Grant 9,514,912 - Biloiu , et al. December 6, 2 | 2016-12-06 |
Inductively Coupled Rf Plasma Source With Magnetic Confinement And Faraday Shielding App 20160071704 - Benveniste; Victor M. ;   et al. | 2016-03-10 |
Control Of Ion Angular Distribution Of Ion Beams With Hidden Deflection Electrode App 20160071693 - Biloiu; Costel ;   et al. | 2016-03-10 |
Apparatus And Method For Mass Analyzed Ion Beam App 20150357167 - Lee; W. Davis ;   et al. | 2015-12-10 |
Method to generate molecular ions from ions with a smaller atomic mass Grant 9,024,273 - Godet , et al. May 5, 2 | 2015-05-05 |
Pulsed plasma to affect conformal processing Grant 8,877,654 - Maynard , et al. November 4, 2 | 2014-11-04 |
Method of ionization Grant 8,742,373 - Radovanov , et al. June 3, 2 | 2014-06-03 |
System and method for manipulating an ion beam Grant 8,604,443 - Sinclair , et al. December 10, 2 | 2013-12-10 |
Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam Grant 8,519,353 - Radovanov , et al. August 27, 2 | 2013-08-27 |
Deceleration lens Grant 8,481,960 - Radovanov , et al. July 9, 2 | 2013-07-09 |
Techniques for improving extracted ion beam quality using high-transparency electrodes Grant 8,466,431 - Buff , et al. June 18, 2 | 2013-06-18 |
Techniques for providing a multimode ion source Grant 8,357,912 - Radovanov , et al. January 22, 2 | 2013-01-22 |
System And Method For Producing A Mass Analyzed Ion Beam For High Throughput Operation App 20130001414 - Benveniste; Victor M. ;   et al. | 2013-01-03 |
System And Method For Producing A Mass Analyzed Ion Beam App 20120168622 - Benveniste; Victor M. ;   et al. | 2012-07-05 |
Method And Apparatus For Controlling An Electrostatic Lens About A Central Ray Trajectory Of An Ion Beam App 20120168637 - Radovanov; Svetlana ;   et al. | 2012-07-05 |
Method Of Ionization App 20120145918 - RADOVANOV; Svetlana ;   et al. | 2012-06-14 |
Plasma Processing Apparatus App 20120111834 - Godet; Ludovic ;   et al. | 2012-05-10 |
Plasma processing apparatus Grant 8,101,510 - Godet , et al. January 24, 2 | 2012-01-24 |
Deceleration Lens App 20120001087 - Radovanov; Svetlana ;   et al. | 2012-01-05 |
Molecular Ion Generation App 20110253902 - Godet; Ludovic ;   et al. | 2011-10-20 |
Pulsed Plasma to Affect Conformal Processing App 20110256732 - Maynard; Helen ;   et al. | 2011-10-20 |
System And Method For Manipulating An Ion Beam App 20110114849 - Sinclair; Frank ;   et al. | 2011-05-19 |
Techniques for independently controlling deflection, deceleration and focus of an ion beam Grant 7,888,653 - Kellerman , et al. February 15, 2 | 2011-02-15 |
Plasma Processing Apparatus App 20100255665 - Godet; Ludovic ;   et al. | 2010-10-07 |
Techniques For Improving Extracted Ion Beam Quality Using High-transparency Electrodes App 20100200768 - BUFF; JAMES ;   et al. | 2010-08-12 |
Ion source Grant 7,767,977 - Godet , et al. August 3, 2 | 2010-08-03 |
Techniques For Independently Controlling Deflection, Deceleration And Focus Of An Ion Beam App 20100171042 - KELLERMAN; Peter L. ;   et al. | 2010-07-08 |
Techniques For Providing A Multimode Ion Source App 20100148088 - Radovanov; Svetlana ;   et al. | 2010-06-17 |
Techniques for providing a multimode ion source Grant 7,700,925 - Radovanov , et al. April 20, 2 | 2010-04-20 |
Techniques For Providing A Multimode Ion Source App 20090166554 - Radovanov; Svetlana ;   et al. | 2009-07-02 |
Techniques For Shaping An Ion Beam App 20090121149 - Radovanov; Svetlana ;   et al. | 2009-05-14 |
Techniques For Measuring And Controlling Ion Beam Angle And Density Uniformity App 20090121122 - Kellerman; Peter L. ;   et al. | 2009-05-14 |
Charge Neutralization In A Plasma Processing Apparatus App 20090084987 - GODET; Ludovic ;   et al. | 2009-04-02 |
Ion implanter having two-stage deceleration beamline Grant 6,998,625 - McKenna , et al. February 14, 2 | 2006-02-14 |
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