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Adaptive periodic waveform controller
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Switched Capacitor Modulator
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Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances
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Intermodulation Distortion Mitigation Using Electronic Variable Capacitor
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Intermodulation distortion mitigation using electronic variable capacitor
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High Speed Synchronization Of Plasma Source/Bias Power Delivery
App 20220005674 - RADOMSKI; Aaron T. ; et al. | 2022-01-06 |
System and Method for Arc Detection Using a Bias RF Generator Signal
App 20210373054 - FISK, II; Larry J. ; et al. | 2021-12-02 |
High speed synchronization of plasma source/bias power delivery
Grant 11,158,488 - Radomski , et al. October 26, 2 | 2021-10-26 |
Cooling And Compression Clamp For Short Lead Power Devices
App 20210274644 - LUU; Ky ; et al. | 2021-09-02 |
Cooling and compression clamp for short lead power devices
Grant 11,076,477 - Luu , et al. July 27, 2 | 2021-07-27 |
Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
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Intermodulation Distortion Mitigation Using Electronic Variable Capacitor
App 20210118649 - HUH; Jin ; et al. | 2021-04-22 |
Pulsed, bidirectional radio frequency source/load
Grant 10,930,470 - Radomski , et al. February 23, 2 | 2021-02-23 |
Adaptive Periodic Waveform Controller
App 20210013007 - FISK, II; Larry J. ; et al. | 2021-01-14 |
High Speed Synchronization Of Plasma Source/Bias Power Delivery
App 20200411289 - RADOMSKI; Aaron T. ; et al. | 2020-12-31 |
Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching
Grant 10,741,363 - Burry , et al. A | 2020-08-11 |
Adaptive periodic waveform controller
Grant 10,727,027 - Fisk, II , et al. | 2020-07-28 |
Pulsed, Bidirectional Radio Frequency Source/Load
App 20200144025 - RADOMSKI; Aaron T. ; et al. | 2020-05-07 |
Pulsed, bidirectional radio frequency source/load
Grant 10,546,724 - Radomski , et al. Ja | 2020-01-28 |
Piecewise Rf Power Systems And Methods For Supplying Pre-distorted Rf Bias Voltage Signals To An Electrode In A Processing Chamb
App 20190334385 - LUU; Ky ; et al. | 2019-10-31 |
Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
Grant 10,396,601 - Luu , et al. A | 2019-08-27 |
Adaptive Periodic Waveform Controller
App 20190214231 - FISK, II; Larry J. ; et al. | 2019-07-11 |
Cooling And Compression Clamp For Short Lead Power Devices
App 20190104609 - LUU; Ky ; et al. | 2019-04-04 |
Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network
Grant 10,229,816 - Coumou , et al. | 2019-03-12 |
Adaptive periodic waveform controller
Grant 10,217,609 - Fisk, II , et al. Feb | 2019-02-26 |
Piecewise RF Power Systems and Methods for Supplying Pre-Distorted RF Bias Voltage Signals to an Electrode in a Processing Chamber
App 20180342903 - LUU; Ky ; et al. | 2018-11-29 |
Pulsed, Bidirectional Radio Frequency Source/Load
App 20180330921 - RADOMSKI; Aaron T. ; et al. | 2018-11-15 |
Adaptive Periodic Waveform Controller
App 20180294141 - FISK, II; Larry J. ; et al. | 2018-10-11 |
Adaptive periodic waveform controller
Grant 10,049,857 - Fisk, II , et al. August 14, 2 | 2018-08-14 |
Plasma RF bias cancellation system
Grant 9,947,514 - Radomski , et al. April 17, 2 | 2018-04-17 |
Solid-state Impedance Matching Systems Including A Hybrid Tuning Network With A Switchable Coarse Tuning Network And A Varactor Fine Tuning Network
App 20170345620 - Coumou; David J. ; et al. | 2017-11-30 |
Plasma RF Bias Cancellation System
App 20170062187 - RADOMSKI; Aaron T. ; et al. | 2017-03-02 |
Adaptive Periodic Waveform Controller
App 20160163514 - FISK, II; Larry J. ; et al. | 2016-06-09 |
High reliability RF generator architecture
Grant 9,214,909 - Radomski , et al. December 15, 2 | 2015-12-15 |
Synchronization of RF pulsing with RF metrology, processing, and control
Grant 9,136,093 - Coumou , et al. September 15, 2 | 2015-09-15 |
Virtual RF sensor
Grant 9,041,480 - Radomski , et al. May 26, 2 | 2015-05-26 |
Harmonic derived arc detector
Grant 8,890,537 - Valcore, Jr. , et al. November 18, 2 | 2014-11-18 |
Virtual RF Sensor
App 20140266492 - RADOMSKI; Aaron T. ; et al. | 2014-09-18 |
Synchronization of RF Pulsing With RF Metrology, Processing, and Control
App 20140218076 - COUMOU; David J. ; et al. | 2014-08-07 |
RF pulse edge shaping
Grant 8,736,377 - Rughoonundon , et al. May 27, 2 | 2014-05-27 |
RF Pulse Edge Shaping
App 20140118031 - RUGHOONUNDON; Amish ; et al. | 2014-05-01 |
Harmonic Derived Arc Detector
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Harmonic derived arc detector
Grant 7,728,602 - Valcore , et al. June 1, 2 | 2010-06-01 |
Harmonic Derived Arc Detector
App 20080197854 - Valcore; John ; et al. | 2008-08-21 |
High Reliability Rf Generator Architecture
App 20070024362 - Radomski; Aaron T. ; et al. | 2007-02-01 |
Predictive failure scheme for industrial thin films processing power delivery system
Grant 6,868,310 - Nasman , et al. March 15, 2 | 2005-03-15 |
Modular architecture for industrial power delivery system
Grant 6,778,921 - Keane , et al. August 17, 2 | 2004-08-17 |
Pulsing intelligent RF modulation controller
Grant 6,700,092 - Vona, Jr. , et al. March 2, 2 | 2004-03-02 |
Modular architecture for industrial power delivery system
App 20040015245 - Keane, Anthony R. A. ; et al. | 2004-01-22 |
Pulsing intelligent RF modulation controller
App 20030024907 - Vona, Daniel J. JR. ; et al. | 2003-02-06 |
Predictive failure scheme for industrial thin films processing power delivery system
App 20020198627 - Nasman, Kevin P. ; et al. | 2002-12-26 |
Pulsing Intelligent Rf Modulation Controller
App 20020144983 - Vona, Daniel J. JR. ; et al. | 2002-10-10 |
Controller for RF power generator with reduced cable length sensitivity
Grant 6,417,732 - Radomski , et al. July 9, 2 | 2002-07-09 |
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