loadpatents
Patent applications and USPTO patent grants for Raaijmakers; Ivo.The latest application filed is for "selective deposition of metals, metal oxides, and dielectrics".
Patent | Date |
---|---|
Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20220193720 - Haukka; Suvi P. ;   et al. | 2022-06-23 |
Selective deposition of metals, metal oxides, and dielectrics Grant 11,213,853 - Haukka , et al. January 4, 2 | 2022-01-04 |
Substrate Processing Apparatus And Method App 20210033977 - Raaijmakers; Ivo ;   et al. | 2021-02-04 |
Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20200122191 - Haukka; Suvi P. ;   et al. | 2020-04-23 |
Selective deposition of metals, metal oxides, and dielectrics Grant 10,456,808 - Haukka , et al. Oc | 2019-10-29 |
Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20180243787 - Haukka; Suvi P. ;   et al. | 2018-08-30 |
Selective deposition of metals, metal oxides, and dielectrics Grant 9,895,715 - Haukka , et al. February 20, 2 | 2018-02-20 |
Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20150217330 - Haukka; Suvi P. ;   et al. | 2015-08-06 |
Method for forming conformal, homogeneous dielectric film by cyclic deposition and heat treatment Grant 9,023,737 - Beynet , et al. May 5, 2 | 2015-05-05 |
Method for Forming Conformal, Homogeneous Dielectric Film by Cyclic Deposition and Heat Treatment App 20140017908 - Beynet; Julien ;   et al. | 2014-01-16 |
Epitaxial semiconductor deposition methods and structures Grant 8,530,340 - Brabant , et al. September 10, 2 | 2013-09-10 |
Method for vaporizing non-gaseous precursor in a fluidized bed Grant 8,343,583 - Jan Snijders , et al. January 1, 2 | 2013-01-01 |
In situ growth of oxide and silicon layers Grant 8,317,921 - Ferro , et al. November 27, 2 | 2012-11-27 |
Selective silicide process Grant 8,293,597 - Raaijmakers October 23, 2 | 2012-10-23 |
Selective Silicide Process App 20110269310 - Raaijmakers; Ivo | 2011-11-03 |
Thin Films App 20110256718 - Haukka; Suvi P. ;   et al. | 2011-10-20 |
Thin films Grant 7,981,791 - Haukka , et al. July 19, 2 | 2011-07-19 |
Selective silicide process Grant 7,927,942 - Raaijmakers April 19, 2 | 2011-04-19 |
Deposition from liquid sources Grant 7,921,805 - Todd , et al. April 12, 2 | 2011-04-12 |
Thin films and methods of making them Grant 7,893,433 - Todd , et al. February 22, 2 | 2011-02-22 |
Selective Silicide Process App 20100155859 - Raaijmakers; Ivo | 2010-06-24 |
Copper interconnect structure having stuffed diffusion barrier Grant 7,732,331 - Kim , et al. June 8, 2 | 2010-06-08 |
Deposition From Liquid Sources App 20100107978 - Todd; Michael A. ;   et al. | 2010-05-06 |
Epitaxial semiconductor deposition methods and structures Grant 7,682,947 - Brabant , et al. March 23, 2 | 2010-03-23 |
Deposition from liquid sources Grant 7,674,728 - Todd , et al. March 9, 2 | 2010-03-09 |
Conformal lining layers for damascene metallization Grant 7,670,944 - Raaijmakers , et al. March 2, 2 | 2010-03-02 |
Fluidized Bed Evaporator App 20100009080 - Jan Snijders; Gert ;   et al. | 2010-01-14 |
Epitaxial Semiconductor Deposition Methods And Structures App 20100006024 - Brabant; Paul D. ;   et al. | 2010-01-14 |
Thin Films App 20090068832 - Haukka; Suvi P. ;   et al. | 2009-03-12 |
Oxygen bridge structures and methods to form oxygen bridge structures Grant 7,465,658 - Raaijmakers , et al. December 16, 2 | 2008-12-16 |
Silicon-on-insulator structures and methods Grant 7,452,757 - Werkhoven , et al. November 18, 2 | 2008-11-18 |
Apparatus and method for growth of a thin film Grant 7,431,767 - Raaijmakers October 7, 2 | 2008-10-07 |
Method And Apparatus For Selective Electrofilling Of Through-wafer Vias App 20080237048 - Emesh; Ismail ;   et al. | 2008-10-02 |
Thin films Grant 7,419,903 - Haukka , et al. September 2, 2 | 2008-09-02 |
Epitaxial semiconductor deposition methods and structures Grant 7,402,504 - Brabant , et al. July 22, 2 | 2008-07-22 |
Dielectric Layers And Methods Of Forming The Same App 20080093711 - Raaijmakers; Ivo ;   et al. | 2008-04-24 |
Thin Films And Methods Of Making Them App 20080073645 - Todd; Michael A. ;   et al. | 2008-03-27 |
Dielectric layers and methods of forming the same Grant 7,323,422 - Raaijmakers , et al. January 29, 2 | 2008-01-29 |
Method Of Depositing Silicon With High Step Coverage App 20080003763 - Raaijmakers; Ivo ;   et al. | 2008-01-03 |
Trench Isolation Structures For Integrated Circuits App 20070287261 - Raaijmakers; Ivo ;   et al. | 2007-12-13 |
Thin films and methods of making them Grant 7,285,500 - Todd , et al. October 23, 2 | 2007-10-23 |
Trench isolation structures for integrated circuits Grant 7,276,774 - Raaijmakers , et al. October 2, 2 | 2007-10-02 |
Epitaxial Semiconductor Deposition Methods And Structures App 20070224786 - Brabant; Paul D. ;   et al. | 2007-09-27 |
Deposition from liquid sources Grant 7,253,084 - Todd , et al. August 7, 2 | 2007-08-07 |
Semiconductor wafer position shift measurement and correction Grant 7,248,931 - Raaijmakers July 24, 2 | 2007-07-24 |
Deposition From Liquid Sources App 20070166966 - Todd; MichaelA ;   et al. | 2007-07-19 |
Epitaxial semiconductor deposition methods and structures Grant 7,238,595 - Brabant , et al. July 3, 2 | 2007-07-03 |
High temperature drop-off of a substrate Grant 7,231,141 - Jacobson , et al. June 12, 2 | 2007-06-12 |
Thin films for magnetic device Grant 7,220,669 - Hujanen , et al. May 22, 2 | 2007-05-22 |
Conformal lining layers for damascene metallization App 20070096321 - Raaijmakers; Ivo ;   et al. | 2007-05-03 |
Apparatus and method for growth of a thin film App 20070089669 - Raaijmakers; Ivo | 2007-04-26 |
Epitaxial semiconductor deposition methods and structures App 20060281322 - Brabant; Paul D. ;   et al. | 2006-12-14 |
Apparatus and method for growth of a thin film Grant 7,141,499 - Raaijmakers November 28, 2 | 2006-11-28 |
Oxygen bridge structures and methods to form oxygen bridge structures App 20060258150 - Raaijmakers; Ivo ;   et al. | 2006-11-16 |
Epitaxial semiconductor deposition methods and structures Grant 7,115,521 - Brabant , et al. October 3, 2 | 2006-10-03 |
In situ growth of oxide and silicon layers Grant 7,112,538 - Ferro , et al. September 26, 2 | 2006-09-26 |
In situ growth of oxide and silicon layers Grant 7,105,055 - Ferro , et al. September 12, 2 | 2006-09-12 |
Conformal lining layers for damascene metallization Grant 7,102,235 - Raaijmakers , et al. September 5, 2 | 2006-09-05 |
Method and apparatus of growing a thin film Grant 7,060,132 - Lindfors , et al. June 13, 2 | 2006-06-13 |
Oxygen bridge structures and methods to form oxygen bridge structures Grant 7,034,397 - Raaijmakers , et al. April 25, 2 | 2006-04-25 |
Loadlock with integrated pre-clean chamber Grant 7,018,504 - Raaijmakers , et al. March 28, 2 | 2006-03-28 |
Deposition from liquid sources App 20060051940 - Todd; Michael A. ;   et al. | 2006-03-09 |
Thin films and methods of making them App 20050250302 - Todd, Michael A. ;   et al. | 2005-11-10 |
Thin films and method of making them Grant 6,962,859 - Todd , et al. November 8, 2 | 2005-11-08 |
Apparatus for thermal treatment of substrates Grant 6,957,690 - Raaijmakers October 25, 2 | 2005-10-25 |
Apparatus for thermal treatment of substrates App 20050229855 - Raaijmakers, Ivo | 2005-10-20 |
In situ growth of oxide and silicon layers App 20050205010 - Ferro, Armand ;   et al. | 2005-09-22 |
Copper interconnect structure having stuffed diffusion barrier Grant 6,936,535 - Kim , et al. August 30, 2 | 2005-08-30 |
Low-mass susceptor improvements App 20050183829 - Goodman, Matthew G. ;   et al. | 2005-08-25 |
Graded thin films Grant 6,933,225 - Werkhoven , et al. August 23, 2 | 2005-08-23 |
Thin films App 20050181555 - Haukka, Suvi P. ;   et al. | 2005-08-18 |
Pyrometer calibrated wafer temperature estimator Grant 6,924,463 - Donald , et al. August 2, 2 | 2005-08-02 |
Semiconductor wafer position shift measurement and correction Grant 6,900,877 - Raaijmakers May 31, 2 | 2005-05-31 |
Self-centering wafer support system Grant 6,893,507 - Goodman , et al. May 17, 2 | 2005-05-17 |
Copper interconnect structure having stuffed diffusion barrier App 20050101132 - Kim, Ki-Bum ;   et al. | 2005-05-12 |
Epitaxial semiconductor deposition methods and structures App 20050092235 - Brabant, Paul D. ;   et al. | 2005-05-05 |
Atomic layer deposition reactor App 20050092249 - Kilpela, Olli ;   et al. | 2005-05-05 |
Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition Grant 6,861,334 - Raaijmakers , et al. March 1, 2 | 2005-03-01 |
Semiconductor wafer position shift measurement and correction App 20040258514 - Raaijmakers, Ivo | 2004-12-23 |
Conformal thin films over textured capacitor electrodes Grant 6,831,315 - Raaijmakers , et al. December 14, 2 | 2004-12-14 |
Atomic layer deposition reactor Grant 6,820,570 - Kilpela , et al. November 23, 2 | 2004-11-23 |
Trench isolation structures for integrated circuits App 20040222490 - Raaijmakers, Ivo ;   et al. | 2004-11-11 |
Epitaxial semiconductor deposition methods and structures App 20040219735 - Brabant, Paul D. ;   et al. | 2004-11-04 |
In situ growth of oxide and silicon layers App 20040206297 - Ferro, Armand ;   et al. | 2004-10-21 |
Method of forming ultrathin oxide layer Grant 6,794,314 - Raaijmakers , et al. September 21, 2 | 2004-09-21 |
Conformal thin films over textured capacitor electrodes App 20040175586 - Raaijmakers, Ivo ;   et al. | 2004-09-09 |
Conformal thin films over textured capacitor electrodes Grant 6,780,704 - Raaijmakers , et al. August 24, 2 | 2004-08-24 |
Apparatus and method for growth of a thin film Grant 6,764,546 - Raaijmakers July 20, 2 | 2004-07-20 |
Conformal lining layers for damascene metallization App 20040130029 - Raaijmakers, Ivo ;   et al. | 2004-07-08 |
Sealing porous structures Grant 6,759,325 - Raaijmakers , et al. July 6, 2 | 2004-07-06 |
In situ growth of oxide and silicon layers Grant 6,749,687 - Ferro , et al. June 15, 2 | 2004-06-15 |
Silicon-on-insulator structures and methods App 20040097022 - Werkhoven, Christiaan J. ;   et al. | 2004-05-20 |
Oxygen bridge structures and methods to form oxygen bridge structures App 20040092096 - Raaijmakers, Ivo ;   et al. | 2004-05-13 |
Method of making conformal lining layers for damascene metallization Grant 6,727,169 - Raaijmakers , et al. April 27, 2 | 2004-04-27 |
Light scattering process chamber walls Grant 6,720,531 - Jacobson , et al. April 13, 2 | 2004-04-13 |
Cleaning of semiconductor processing chambers Grant 6,708,700 - Raaijmakers , et al. March 23, 2 | 2004-03-23 |
Graded thin films Grant 6,703,708 - Werkhoven , et al. March 9, 2 | 2004-03-09 |
High temperature drop-off of a substrate Grant 6,704,496 - Jacobson , et al. March 9, 2 | 2004-03-09 |
High temperature drop-off of a substrate App 20040043575 - Jacobson, Paul ;   et al. | 2004-03-04 |
Method for controlling conformality with alternating layer deposition Grant 6,699,783 - Raaijmakers , et al. March 2, 2 | 2004-03-02 |
Protective layers prior to alternating layer deposition Grant 6,686,271 - Raaijmakers , et al. February 3, 2 | 2004-02-03 |
Dielectric layers and methods of forming the same App 20030234417 - Raaijmakers, Ivo ;   et al. | 2003-12-25 |
Semiconductor wafer position shift measurement and correction App 20030231950 - Raaijmakers, Ivo | 2003-12-18 |
Pyrometer calibrated wafer temperature estimator App 20030210901 - Donald, James J. ;   et al. | 2003-11-13 |
Cleaning of semiconductor processing chambers App 20030205251 - Raaijmakers, Ivo ;   et al. | 2003-11-06 |
Sealing porous structures App 20030143839 - Raaijmakers, Ivo ;   et al. | 2003-07-31 |
Pyrometer calibrated wafer temperature estimator Grant 6,596,973 - Donald , et al. July 22, 2 | 2003-07-22 |
Controlled conformality with alternating layer deposition App 20030134508 - Raaijmakers, Ivo ;   et al. | 2003-07-17 |
Method of depositing silicon with high step coverage App 20030129811 - Raaijmakers, Ivo ;   et al. | 2003-07-10 |
Graded thin films App 20030129826 - Werkhoven, Christiaan J. ;   et al. | 2003-07-10 |
Method and apparatus of growing a thin film App 20030121469 - Lindfors, Sven ;   et al. | 2003-07-03 |
Apparatus and method for growth of a thin film App 20030101927 - Raaijmakers, Ivo | 2003-06-05 |
Apparatus and method for growth of a thin film App 20030089308 - Raaijmakers, Ivo | 2003-05-15 |
Atomic layer deposition reactor App 20030075273 - Kilpela, Olli ;   et al. | 2003-04-24 |
In situ growth of oxide and silicon layers App 20030073293 - Ferro, Armand ;   et al. | 2003-04-17 |
High temperature drop-off of a substrate App 20030070758 - Jacobson, Paul ;   et al. | 2003-04-17 |
In situ dielectric stacks Grant 6,544,900 - Raaijmakers , et al. April 8, 2 | 2003-04-08 |
Method of forming ultrathin oxide layer App 20030060057 - Raaijmakers, Ivo ;   et al. | 2003-03-27 |
Protective layers prior to alternating layer deposition App 20030054631 - Raaijmakers, Ivo ;   et al. | 2003-03-20 |
Method of forming graded thin films using alternating pulses of vapor phase reactants Grant 6,534,395 - Werkhoven , et al. March 18, 2 | 2003-03-18 |
Graded thin films App 20030032281 - Werkhoven, Christiaan J. ;   et al. | 2003-02-13 |
Self-centering wafer support system App 20030029571 - Goodman, Matthew G. ;   et al. | 2003-02-13 |
Apparatus and method for growth of a thin film Grant 6,511,539 - Raaijmakers January 28, 2 | 2003-01-28 |
Trench isolation for integrated circuit App 20030015764 - Raaijmakers, Ivo ;   et al. | 2003-01-23 |
Construction of a film on a semiconductor wafer Grant 6,500,742 - Chern , et al. December 31, 2 | 2002-12-31 |
Thin Films and Methods of Making Them App 20020197831 - Todd , Michael A. ;   et al. | 2002-12-26 |
Copper interconnect structure having stuffed diffusion barrier App 20020187631 - Kim, Ki-Bum ;   et al. | 2002-12-12 |
Method of forming ultrathin oxide layer Grant 6,492,283 - Raaijmakers , et al. December 10, 2 | 2002-12-10 |
Protective layers prior to alternating layer deposition Grant 6,482,733 - Raaijmakers , et al. November 19, 2 | 2002-11-19 |
Wafer buffering system App 20020153578 - Aggarwal, Ravinder ;   et al. | 2002-10-24 |
High temperature drop-off of a substrate App 20020155669 - Jacobson, Paul ;   et al. | 2002-10-24 |
Low mass wafer support system Grant 6,454,865 - Goodman , et al. September 24, 2 | 2002-09-24 |
Construction of a film on a semiconductor wafer Grant 6,444,036 - Chern , et al. September 3, 2 | 2002-09-03 |
Dual arm linear hand-off wafer transfer assembly Grant 6,435,809 - Goodwin , et al. August 20, 2 | 2002-08-20 |
Thin films for magnetic device App 20020076837 - Hujanen, Juha ;   et al. | 2002-06-20 |
Quartz wafer processing chamber Grant 6,383,330 - Raaijmakers May 7, 2 | 2002-05-07 |
In situ dielectric stacks App 20020052124 - Raaijmakers, Ivo ;   et al. | 2002-05-02 |
Low mass wafer support system App 20020043337 - Goodman, Matthew G. ;   et al. | 2002-04-18 |
Quartz wafer processing chamber App 20020033232 - Raaijmakers, Ivo | 2002-03-21 |
Water lift mechanism with electrostatic pickup and method for transferring a workpiece Grant 6,354,791 - Wytman , et al. March 12, 2 | 2002-03-12 |
Situ dielectric stacks Grant 6,348,420 - Raaijmakers , et al. February 19, 2 | 2002-02-19 |
Protective layers prior to alternating layer deposition App 20010054769 - Raaijmakers, Ivo ;   et al. | 2001-12-27 |
Long life high temperature process chamber Grant 6,325,858 - Wengert , et al. December 4, 2 | 2001-12-04 |
Graded thin films App 20010041250 - Werkhoven, Christian J. ;   et al. | 2001-11-15 |
Method of forming ultrathin oxide layer App 20010031562 - Raaijmakers, Ivo ;   et al. | 2001-10-18 |
Conformal thin films over textured capacitor electrodes App 20010024387 - Raaijmakers, Ivo ;   et al. | 2001-09-27 |
Construction of a film on a semiconductor wafer App 20010025205 - Chern, Chyi ;   et al. | 2001-09-27 |
Method of depositing silicon with high step coverage App 20010020712 - Raaijmakers, Ivo ;   et al. | 2001-09-13 |
Method of processing wafers with low mass support Grant 6,284,048 - Van Bilsen , et al. September 4, 2 | 2001-09-04 |
Degassing method using simultaneous dry gas flux pressure and vacuum Grant 6,263,587 - Raaijmakers , et al. July 24, 2 | 2001-07-24 |
Wafer holder Grant 6,242,718 - Ferro , et al. June 5, 2 | 2001-06-05 |
Dual arm linear hand-off wafer transfer assembly App 20010001277 - Goodwin, Dennis L. ;   et al. | 2001-05-17 |
Method of depositing silicon with high step coverage Grant 6,232,196 - Raaijmakers , et al. May 15, 2 | 2001-05-15 |
Dual arm linear hand-off wafer transfer assembly App 20010000720 - Goodwin, Dennis L. ;   et al. | 2001-05-03 |
Apparatus for cooling substrates Grant 6,209,220 - Raaijmakers April 3, 2 | 2001-04-03 |
Dual arm linear hand-off wafer transfer assembly Grant 6,183,183 - Goodwin , et al. February 6, 2 | 2001-02-06 |
Wafer carrier and method for handling of wafers with minimal contact Grant 6,158,951 - Carr , et al. December 12, 2 | 2000-12-12 |
Method of processing wafers with low mass support Grant 6,121,061 - Van Bilsen , et al. September 19, 2 | 2000-09-19 |
Degassing method and apparatus Grant 6,113,698 - Raaijmakers , et al. September 5, 2 | 2000-09-05 |
Method of cooling wafers Grant 6,108,937 - Raaijmakers August 29, 2 | 2000-08-29 |
Substrate transfer system for semiconductor processing equipment Grant 6,068,441 - Raaijmakers , et al. May 30, 2 | 2000-05-30 |
Particle trap in a magnetron sputtering chamber Grant 6,013,159 - Adams , et al. January 11, 2 | 2000-01-11 |
Construction of a tantalum nitride film on a semiconductor wafer Grant 5,989,999 - Levine , et al. November 23, 1 | 1999-11-23 |
Method and apparatus for improving the conformality of sputter deposited films Grant 5,827,408 - Raaijmakers October 27, 1 | 1998-10-27 |
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