Patent | Date |
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Inspection tool, inspection method and computer program product Grant 11,442,368 - Quintanilha , et al. September 13, 2 | 2022-09-13 |
Methods and apparatus for calculating electromagnetic scattering properties of a structure Grant 11,347,151 - Van Kraaij , et al. May 31, 2 | 2022-05-31 |
Inspection Tool, Inspection Method And Computer Program Product App 20210232052 - QUINTANILHA; Richard ;   et al. | 2021-07-29 |
Optical detector Grant 10,976,265 - Roobol , et al. April 13, 2 | 2021-04-13 |
Inspection Apparatus And Inspection Method App 20200348244 - KUMAR; Nitish ;   et al. | 2020-11-05 |
Determining edge roughness parameters Grant 10,634,490 - Jak , et al. | 2020-04-28 |
Metrology methods, radiation source, metrology apparatus and device manufacturing method Grant 10,555,407 - Polyakov , et al. Fe | 2020-02-04 |
Methods and Apparatus for Calculating Electromagnetic Scattering Properties of a Structure App 20190346775 - VAN KRAAIJ; Markus Gerardus Martinus Maria ;   et al. | 2019-11-14 |
Metrology Methods, Radiation Source, Metrology Apparatus and Device Manufacturing Method App 20190246480 - POLYAKOV; Alexey Olegovich ;   et al. | 2019-08-08 |
Metrology methods, radiation source, metrology apparatus and device manufacturing method Grant 10,342,108 - Polyakov , et al. | 2019-07-02 |
Metrology methods, metrology apparatus and device manufacturing method Grant 10,254,644 - Quintanilha , et al. | 2019-04-09 |
Metrology method, metrology apparatus and device manufacturing method Grant 10,222,709 - Quintanilha | 2019-03-05 |
Optical Detector App 20190049393 - ROOBOL; Sander Bas ;   et al. | 2019-02-14 |
Determining Edge Roughness Parameters App 20180364036 - JAK; Martin Jacobus Johan ;   et al. | 2018-12-20 |
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method Grant 10,146,140 - Pisarenco , et al. De | 2018-12-04 |
Metrology methods, metrology apparatus and device manufacturing method Grant 10,101,671 - Quintanilha , et al. October 16, 2 | 2018-10-16 |
Metrology methods, metrology apparatus and device manufacturing method Grant 10,067,074 - Quintanilha , et al. September 4, 2 | 2018-09-04 |
Metrology Methods, Radiation Source, Metrology Apparatus and Device Manufacturing Method App 20180220518 - POLYAKOV; Alexey Olegovich ;   et al. | 2018-08-02 |
Inspection apparatus and methods, lithographic system and device manufacturing method Grant 10,036,962 - Quintanilha July 31, 2 | 2018-07-31 |
Substrate and patterning device for use in metrology, metrology method and device manufacturing method Grant 9,915,879 - Quintanilha , et al. March 13, 2 | 2018-03-13 |
Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 9,904,181 - Quintanilha February 27, 2 | 2018-02-27 |
Metrology Methods, Metrology Apparatus and Device Manufacturing Method App 20170357155 - QUINTANILHA; Richard ;   et al. | 2017-12-14 |
Inspection apparatus, inspection method and manufacturing method Grant 9,823,586 - Quintanilha November 21, 2 | 2017-11-21 |
Metrology Methods, Metrology Apparatus and Device Manufacturing Method App 20170184981 - QUINTANILHA; Richard ;   et al. | 2017-06-29 |
Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection method Grant 9,632,424 - Quintanilha April 25, 2 | 2017-04-25 |
Methods and Apparatus for Simulating Interaction of Radiation with Structures, Metrology Methods and Apparatus, Device Manufacturing Method App 20170102623 - PISARENCO; Maxim ;   et al. | 2017-04-13 |
Inspection Apparatus, Inspection Method and Manufacturing Method App 20170045823 - QUINTANILHA; Richard | 2017-02-16 |
Lithographic apparatus, substrate and device manufacturing method Grant 9,563,131 - Quintanilha February 7, 2 | 2017-02-07 |
Inspection Apparatus and Method, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20160377990 - QUINTANILHA; Richard | 2016-12-29 |
Inspection Apparatus and Methods, Lithographic System and Device Manufacturing Method App 20160320711 - QUINTANILHA; Richard | 2016-11-03 |
Metrology Methods, Metrology Apparatus and Device Manufacturing Method App 20160282282 - QUINTANILHA; Richard ;   et al. | 2016-09-29 |
Metrology Method, Metrology Apparatus And Device Manufacturing Method App 20160223476 - QUINTANILHA; Richard | 2016-08-04 |
Lithographic Apparatus, Substrate And Device Manufacturing Method App 20160062247 - QUINTANILHA; Richard | 2016-03-03 |
Lithographic apparatus, substrate and device manufacturing method Grant 9,261,772 - Quintanilha February 16, 2 | 2016-02-16 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method App 20150331336 - QUINTANILHA; Richard ;   et al. | 2015-11-19 |
Illumination Source for use in Inspection Methods and/or Lithography; Inspection and Lithographic Apparatus and Inspection Method App 20150042999 - QUINTANILHA; Richard | 2015-02-12 |
Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection method Grant 8,876,346 - Quintanilha November 4, 2 | 2014-11-04 |
Lithographic Apparatus, Substrate and Device Manufacturing Method App 20130271740 - QUINTANILHA; Richard | 2013-10-17 |
Illumination Source for use in Inspection Methods and/or Lithography; Inspection and Lithographic Apparatus and Inspection Method App 20130141730 - QUINTANILHA; Richard | 2013-06-06 |