Patent | Date |
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Method for fabricating a nitrided silicon-oxide gate dielectric Grant 8,709,887 - Burnham , et al. April 29, 2 | 2014-04-29 |
Selective Nitridation Of Gate Oxides App 20100187614 - BURNHAM; Jay S. ;   et al. | 2010-07-29 |
Selective nitridation of gate oxides Grant 7,759,260 - Burnham , et al. July 20, 2 | 2010-07-20 |
CMOS transistor with a polysilicon gate electrode having varying grain size Grant 7,714,366 - Ballantine , et al. May 11, 2 | 2010-05-11 |
Method For Fabricating A Nitrided Silicon-oxide Gate Dielectric App 20080014692 - Burnham; Jay S. ;   et al. | 2008-01-17 |
Method for fabricating a nitrided silicon-oxide gate dielectric Grant 7,291,568 - Burnham , et al. November 6, 2 | 2007-11-06 |
Selective Nitridation Of Gate Oxides App 20060281265 - BURNHAM; Jay S. ;   et al. | 2006-12-14 |
Selective nitridation of gate oxides Grant 7,138,691 - Burnham , et al. November 21, 2 | 2006-11-21 |
Nitrided ultra thin gate dielectrics Grant 7,109,559 - Khare , et al. September 19, 2 | 2006-09-19 |
Silicon dioxide removing method Grant 6,967,167 - Geiss , et al. November 22, 2 | 2005-11-22 |
Selective Nitridation Of Gate Oxides App 20050164444 - Burnham, Jay S. ;   et al. | 2005-07-28 |
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors Grant 6,909,157 - Burnham , et al. June 21, 2 | 2005-06-21 |
Cmos Transistor With A Polysilicon Gate Electrode Having Varying Grain Size App 20050110096 - Ballantine, Arne W. ;   et al. | 2005-05-26 |
Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size Grant 6,893,948 - Ballantine , et al. May 17, 2 | 2005-05-17 |
Method for improved plasma nitridation of ultra thin gate dielectrics Grant 6,893,979 - Khare , et al. May 17, 2 | 2005-05-17 |
Nitrided ultrathin gate dielectrics App 20050087822 - Khare, Mukesh V. ;   et al. | 2005-04-28 |
Silicon Dioxide Removing Method App 20050070101 - Geiss, Peter J. ;   et al. | 2005-03-31 |
Method For Fabricating A Nitrided Silicon-oxide Gate Dielectric App 20050048705 - Burnham, Jay S. ;   et al. | 2005-03-03 |
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors App 20050040480 - Burnham, Jay S. ;   et al. | 2005-02-24 |
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors Grant 6,706,644 - Burnham , et al. March 16, 2 | 2004-03-16 |
Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size App 20040023476 - Ballantine, Arne W. ;   et al. | 2004-02-05 |
Thermal Nitrogen Distribution Method To Improve Uniformity Of Highly Doped Ultra-thin Gate Capacitors App 20040018688 - Burnham, Jay S. ;   et al. | 2004-01-29 |
Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size Grant 6,670,263 - Ballantine , et al. December 30, 2 | 2003-12-30 |
Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size App 20020149064 - Ballantine, Arne W. ;   et al. | 2002-10-17 |
Method For Forming A Liner In A Trench App 20020106906 - Ballantine, Arne W. ;   et al. | 2002-08-08 |