Quiles; Efrain
Patent Applications and Registrations
Patent applications and USPTO patent grants for Quiles; Efrain.The latest application filed is for "wafer transfer microclimate techniques and apparatuses, including horizontal slot implementations and/or travelling showerheads".
- Quiles; Efrain - San Jose CA
- Quiles; Efrain - San Lorenzo CA
| Patent | Date |
|---|---|
| Substrate processing system, valve assembly, and processing method Grant 10,665,476 - Quiles , et al. | 2020-05-26 |
| Multi-station tool with wafer transfer microclimate systems Grant 10,515,834 - Salek , et al. Dec | 2019-12-24 |
| Wafer Transfer Microclimate Techniques And Apparatuses, Including Horizontal Slot Implementations And/or Travelling Showerheads App 20170125272 - van Gogh; James Stephen ; et al. | 2017-05-04 |
| Substrate Processing System, Valve Assembly, And Processing Method App 20150013771 - Quiles; Efrain ; et al. | 2015-01-15 |
| Processing system with the dual end-effector handling Grant 8,796,589 - Quiles , et al. August 5, 2 | 2014-08-05 |
| Batch Processing Platform For Ald And Cvd App 20110041764 - Webb; Aaron ; et al. | 2011-02-24 |
| Batch processing platform for ALD and CVD Grant 7,833,351 - Webb , et al. November 16, 2 | 2010-11-16 |
| Batch Processing Platform For ALD and CVD App 20070295274 - Webb; Aaron ; et al. | 2007-12-27 |
| Tire Lifting Bars App 20070210595 - Quiles; Efrain ; et al. | 2007-09-13 |
| Processing system App 20050072716 - Quiles, Efrain ; et al. | 2005-04-07 |
| Plasma reactor with a tri-magnet plasma confinement apparatus Grant 6,562,189 - Quiles , et al. May 13, 2 | 2003-05-13 |
| Chuck having pressurized zones of heat transfer gas Grant 6,320,736 - Shamouilian , et al. November 20, 2 | 2001-11-20 |
| Temperature control system for semiconductor process chamber Grant 6,015,465 - Kholodenko , et al. January 18, 2 | 2000-01-18 |
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