Patent | Date |
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Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS) Grant 10,173,893 - Quevy , et al. J | 2019-01-08 |
Membrane transducer structures and methods of manufacturing same using thin-film encapsulation Grant 10,118,820 - Quevy , et al. November 6, 2 | 2018-11-06 |
Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation Grant 9,988,265 - Quevy , et al. June 5, 2 | 2018-06-05 |
Membrane Transducer Structures And Methods Of Manufacturing Same Using Thin-film Encapsulation App 20170197822 - Quevy; Emmanuel P. ;   et al. | 2017-07-13 |
Membrane transducer structures and methods of manufacturing same using thin-film encapsulation Grant 9,637,371 - Quevy , et al. May 2, 2 | 2017-05-02 |
Temperature compensation for MEMS devices Grant 9,602,026 - Quevy , et al. March 21, 2 | 2017-03-21 |
Methods And Structures For Thin-film Encapsulation And Co-integration Of Same With Microelectronic Devices And Microelectromechanical Systems (mems) App 20160362295 - Quevy; Emmanuel P. ;   et al. | 2016-12-15 |
Trapped Sacrificial Structures And Methods Of Manufacturing Same Using Thin-film Encapsulation App 20160355397 - Quevy; Emmanuel P. ;   et al. | 2016-12-08 |
Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS) Grant 9,428,377 - Quevy , et al. August 30, 2 | 2016-08-30 |
Method for temperature compensation in MEMS resonators with isolated regions of distinct material Grant 9,422,157 - Quevy , et al. August 23, 2 | 2016-08-23 |
Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation Grant 9,422,149 - Quevy , et al. August 23, 2 | 2016-08-23 |
Monolithic body MEMS devices Grant 9,300,227 - Quevy , et al. March 29, 2 | 2016-03-29 |
Technique for forming a MEMS device Grant 9,260,290 - Quevy , et al. February 16, 2 | 2016-02-16 |
Trapped Sacrificial Structures And Methods Of Manufacturing Same Using Thin-Film Encapsulation App 20160025664 - Quevy; Emmanuel P. ;   et al. | 2016-01-28 |
Methods And Structures For Thin-Film Encapsulation And Co-Integration Of Same With Microelectronic Devices and Microelectromechanical Systems (MEMS) App 20160023888 - Quevy; Emmanuel P. ;   et al. | 2016-01-28 |
Membrane Transducer Structures And Methods Of Manufacturing Same Using Thin-Film Encapsulation App 20160023889 - Quevy; Emmanuel P. ;   et al. | 2016-01-28 |
Suspended passive element for MEMS devices Grant 9,246,412 - Quevy , et al. January 26, 2 | 2016-01-26 |
Method For Temperature Compensation In Mems Resonators With Isolated Regions Of Distinct Material App 20150266724 - Quevy; Emmanuel P. ;   et al. | 2015-09-24 |
Gas-diffusion barriers for MEMS encapsulation Grant 9,018,715 - Howe , et al. April 28, 2 | 2015-04-28 |
Integrated MEMS design for manufacturing Grant 9,007,119 - Caffee , et al. April 14, 2 | 2015-04-14 |
Compensation of changes in MEMS capacitive transduction Grant 9,000,833 - Caffee , et al. April 7, 2 | 2015-04-07 |
Technique For Forming A Mems Device App 20150008545 - Quevy; Emmanuel P. ;   et al. | 2015-01-08 |
Suspended Passive Element For Mems Devices App 20140361844 - Quevy; Emmanuel P. ;   et al. | 2014-12-11 |
Temperature Compensation For Mems Devices App 20140361661 - Quevy; Emmanuel P. ;   et al. | 2014-12-11 |
Monolithic Body Mems Devices App 20140361843 - Quevy; Emmanuel P. ;   et al. | 2014-12-11 |
Technique for forming a MEMS device using island structures Grant 8,877,536 - Quevy , et al. November 4, 2 | 2014-11-04 |
MEMS-based magnetic sensor with a Lorentz force actuator used as force feedback Grant 8,878,528 - Quevy November 4, 2 | 2014-11-04 |
Integrated Mems Design For Manufacturing App 20140306623 - Caffee; Aaron J. ;   et al. | 2014-10-16 |
Technique for forming a MEMS device Grant 8,852,984 - Quevy , et al. October 7, 2 | 2014-10-07 |
Compensation Of Changes In Mems Capacitive Transduction App 20140253219 - Caffee; Aaron ;   et al. | 2014-09-11 |
Gas-diffusion Barriers For Mems Encapsulation App 20140151820 - Howe; Roger T. ;   et al. | 2014-06-05 |
MEMS coupler and method to form the same Grant 8,716,815 - Quevy , et al. May 6, 2 | 2014-05-06 |
Highly accurate temperature stable clock based on differential frequency discrimination of oscillators Grant 8,686,806 - Quevy , et al. April 1, 2 | 2014-04-01 |
Out-of-plane resonator Grant 8,674,775 - Motiee , et al. March 18, 2 | 2014-03-18 |
Method for temperature compensation in MEMS resonators with isolated regions of distinct material Grant 8,669,831 - Quevy , et al. March 11, 2 | 2014-03-11 |
Out-of plane MEMS resonator with static out-of-plane deflection Grant 8,629,739 - Quevy , et al. January 14, 2 | 2014-01-14 |
Switchable electrode for power handling Grant 8,471,641 - Quevy , et al. June 25, 2 | 2013-06-25 |
Method for temperature compensation in MEMS resonators with isolated regions of distinct material Grant 8,464,418 - Quevy , et al. June 18, 2 | 2013-06-18 |
Hybrid system having a non-MEMS device and a MEMS device Grant 8,461,935 - McCraith , et al. June 11, 2 | 2013-06-11 |
Dual in-situ mixing for extended tuning range of resonators Grant 8,456,252 - Quevy June 4, 2 | 2013-06-04 |
Hybrid system having a non-MEMS device and a MEMS device Grant 8,436,690 - McCraith , et al. May 7, 2 | 2013-05-07 |
Temperature compensated oscillator including MEMS resonator for frequency control Grant 8,427,251 - Quevy , et al. April 23, 2 | 2013-04-23 |
Encapsulated MEMS device and method to form the same Grant 8,349,635 - Gan , et al. January 8, 2 | 2013-01-08 |
Mems-based Magnetic Sensor With A Lorentz Force Actuator Used As Force Feedback App 20130002244 - Quevy; Emmanuel P. | 2013-01-03 |
Out-of-plane Resonator App 20130002363 - Motiee; Mehrnaz ;   et al. | 2013-01-03 |
Switchable Electrode For Power Handling App 20130002364 - Quevy; Emmanuel P. ;   et al. | 2013-01-03 |
Out-of-plane Mems Resonator With Static Out-of-plane Deflection App 20120329255 - Quevy; Emmanuel P. ;   et al. | 2012-12-27 |
Damascene process for use in fabricating semiconductor structures having micro/nano gaps Grant 8,329,559 - Takeuchi , et al. December 11, 2 | 2012-12-11 |
Planar microshells for vacuum encapsulated devices and damascene method of manufacture Grant 8,313,970 - Quevy , et al. November 20, 2 | 2012-11-20 |
Microshells with integrated getter layer Grant 8,288,835 - Quevy , et al. October 16, 2 | 2012-10-16 |
Planar microshells for vacuum encapsulated devices and damascene method of manufacture Grant 8,273,594 - Quevy , et al. September 25, 2 | 2012-09-25 |
Temperature compensated oscillator including MEMS resonator for frequency control App 20120229220 - Quevy; Emmanuel P. ;   et al. | 2012-09-13 |
Out-of-plane MEMS resonator with static out-of-plane deflection Grant 8,258,893 - Quevy , et al. September 4, 2 | 2012-09-04 |
Damascene Process For Use In Fabricating Semiconductor Structures Having Micro/nano Gaps App 20120171798 - Takeuchi; Hideki ;   et al. | 2012-07-05 |
Mems Stabilized Oscillator App 20120043999 - Quevy; Emmanuel P. ;   et al. | 2012-02-23 |
Dual In-situ Mixing For Extended Tuning Range Of Resonators App 20120007693 - Quevy; Emmanuel P. | 2012-01-12 |
Dual in-situ mixing for extended tuning range of resonators Grant 8,058,940 - Quevy November 15, 2 | 2011-11-15 |
Out-of-plane Mems Resonator With Static Out-of-plane Deflection App 20110260810 - Quevy; Emmanuel P. ;   et al. | 2011-10-27 |
Highly accurate temperature stable clock based on differential frequency discrimination of oscillators App 20110210797 - Quevy; Emmanuel P. ;   et al. | 2011-09-01 |
Out-of plane MEMS resonator with static out-of-plane deflection Grant 7,999,635 - Quevy , et al. August 16, 2 | 2011-08-16 |
Highly accurate temperature stable clock based on differential frequency discrimination of oscillators Grant 7,982,550 - Quevy , et al. July 19, 2 | 2011-07-19 |
MEMS structure having a stress inverter temperature-compensated resonator member Grant 7,956,517 - Motiee , et al. June 7, 2 | 2011-06-07 |
Planar Microshells For Vacuum Encapsulated Devices And Damascene Method Of Manufacture App 20110121412 - Quevy; Emmanuel P. ;   et al. | 2011-05-26 |
Planar Microshells For Vacuum Encapsulated Devices And Damascene Method Of Manufacture App 20110121415 - Quevy; Emmanuel P. ;   et al. | 2011-05-26 |
Planar Microshells For Vacuum Encapsulated Devices And Damascene Method Of Manufacture App 20110121416 - Quevy; Emmanuel P. ;   et al. | 2011-05-26 |
Hybrid system having a non-mems device and a mems device App 20110095835 - McCraith; Andrew D. ;   et al. | 2011-04-28 |
Method For Temperature Compensation In MEMS Resonators With Isolated Regions Of Distinct Material App 20110084781 - Quevy; Emmanuel P. ;   et al. | 2011-04-14 |
Planar microshells for vacuum encapsulated devices and damascene method of manufacture Grant 7,923,790 - Quevy , et al. April 12, 2 | 2011-04-12 |
Hybrid system having a non-MEMS device and a MEMS device App 20110074517 - McCraith; Andrew D. ;   et al. | 2011-03-31 |
Mems coupler and method to form the same App 20110068422 - Quevy; Emmanuel P. ;   et al. | 2011-03-24 |
Hybrid system having a non-MEMS device and a MEMS device Grant 7,876,167 - McCraith , et al. January 25, 2 | 2011-01-25 |
MEMS coupler and method to form the same Grant 7,858,422 - Quevy , et al. December 28, 2 | 2010-12-28 |
Method to form a MEMS structure having a suspended portion Grant 7,816,166 - Quevy October 19, 2 | 2010-10-19 |
Thin film microshells incorporating a getter layer Grant 7,736,929 - Monadgemi , et al. June 15, 2 | 2010-06-15 |
Method For Temperature Compensation In Mems Resonators With Isolated Regions Of Distinct Material App 20100093125 - Quevy; Emmanuel P. ;   et al. | 2010-04-15 |
Microshells for multi-level vacuum cavities Grant 7,659,150 - Monadgemi , et al. February 9, 2 | 2010-02-09 |
Method for temperature compensation in MEMS resonators with isolated regions of distinct material Grant 7,639,104 - Quevy , et al. December 29, 2 | 2009-12-29 |
Low stress thin film microshells Grant 7,595,209 - Monadgemi , et al. September 29, 2 | 2009-09-29 |
MEMS structure having a compensated resonating member Grant 7,591,201 - Bernstein , et al. September 22, 2 | 2009-09-22 |
IC-compatible MEMS structure Grant 7,514,760 - Quevy April 7, 2 | 2009-04-07 |
MEMS structure having a stress inverter temperature-compensated resonating member Grant 7,514,853 - Howe , et al. April 7, 2 | 2009-04-07 |
Damascene process for use in fabricating semiconductor structures having micro/nano gaps Grant 7,256,107 - Takeuchi , et al. August 14, 2 | 2007-08-14 |
Temperature compensated oscillator including MEMS resonator for frequency control Grant 7,211,926 - Quevy , et al. May 1, 2 | 2007-05-01 |
Temperature compensated oscillator including MEMS resonator for frequency control App 20060261703 - Quevy; Emmanuel P. ;   et al. | 2006-11-23 |
Damascene process for use in fabricating semiconductor structures having micro/nano gaps App 20050250236 - Takeuchi, Hideki ;   et al. | 2005-11-10 |