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System and method for measurement of alignment Grant 11,249,404 - Schmitt-Weaver , et al. February 15, 2 | 2022-02-15 |
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Grant 11,150,565 - Queens , et al. October 19, 2 | 2021-10-19 |
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,845,719 - Queens , et al. November 24, 2 | 2020-11-24 |
Method for adjusting actuation of a lithographic apparatus Grant 10,684,557 - Queens , et al. | 2020-06-16 |
System and Method for Measurement of Alignment App 20200133144 - SCHMITT-WEAVER; Emil Peter ;   et al. | 2020-04-30 |
Methods For Controlling Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20200081355 - QUEENS; Rene Marinus Gerardus Johan | 2020-03-12 |
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,558,130 - Queens , et al. Feb | 2020-02-11 |
Methods For Controlling Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190384188 - QUEENS; Rene Marinus Gerardus Johan ;   et al. | 2019-12-19 |
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,503,087 - Queens , et al. Dec | 2019-12-10 |
Methods For Controlling Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190212664 - Queens; Rene Marinus Gerardus Johan ;   et al. | 2019-07-11 |
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,274,849 - Queens , et al. | 2019-04-30 |
Method For Adjusting Actuation Of A Lithographic Apparatus App 20190094713 - QUEENS; Rene Marinus Gerardus Johan ;   et al. | 2019-03-28 |
Methods For Controlling Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20180239267 - QUEENS; Rene Marinus Gerardus Johan ;   et al. | 2018-08-23 |
Methods For Controlling Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20180210351 - QUEENS; Rene Marinus Gerardus Johan ;   et al. | 2018-07-26 |
Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby Grant 7,646,471 - Teunissen , et al. January 12, 2 | 2010-01-12 |
Level sensor for lithographic apparatus Grant 7,265,364 - Teunissen , et al. September 4, 2 | 2007-09-04 |
Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby Grant 7,248,337 - Teunissen , et al. July 24, 2 | 2007-07-24 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,987,555 - Teunissen , et al. January 17, 2 | 2006-01-17 |
Level sensor for lithographic apparatus App 20050274909 - Teunissen, Paulus Antonius Andreas ;   et al. | 2005-12-15 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,906,785 - Queens , et al. June 14, 2 | 2005-06-14 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050030507 - Teunissen, Paulus Antonius Andreas ;   et al. | 2005-02-10 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20030218141 - Queens, Rene Marinus Gerardus Johan ;   et al. | 2003-11-27 |