| Patent | Date |
|---|
Lithographic apparatus and device manufacturing method involving a heater
Grant 11,378,893 - Cadee , et al. July 5, 2 | 2022-07-05 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater
App 20210063898 - CADEE; Theodorus Petrus Maria ; et al. | 2021-03-04 |
Lithographic apparatus and device manufacturing method involving a heater
Grant 10,838,310 - Cadee , et al. November 17, 2 | 2020-11-17 |
Optical interference measuring device
Grant 10,794,688 - Motohashi , et al. October 6, 2 | 2020-10-06 |
Method and system for calculating a height map of a surface of an object from an image stack in scanning optical 2.5D profiling of the surface by an optical system
Grant 10,636,157 - Quaedackers | 2020-04-28 |
Method for measuring a height map of multiple fields of view and combining them to a composite height map with minimized sensitivity to instrument drift
Grant 10,563,974 - Quaedackers , et al. Feb | 2020-02-18 |
Optical Interference Measuring Device
App 20190277628 - MOTOHASHI; Ken ; et al. | 2019-09-12 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater
App 20190235397 - CADEE; Theodorus Petrus Maria ; et al. | 2019-08-01 |
Method And System For Measuring A Height Map Of A Surface Of An Object, And Computer Program Therefor
App 20190219380 - QUAEDACKERS; Johannes Anna | 2019-07-18 |
Method for calculating a height map of a body of transparent material having an inclined or curved surface
Grant 10,302,415 - Quaedackers | 2019-05-28 |
Lithographic apparatus and device manufacturing method involving a heater
Grant 10,254,663 - Cadee , et al. | 2019-04-09 |
Method And System For Calculating A Height Map Of A Surface Of An Object From An Image Stack In Scanning Optical 2.5d Profiling Of The Surface By An Optical System
App 20180315207 - Quaedackers; Johannes Anna | 2018-11-01 |
Interference measuring device and method of measurement using the same device
Grant 10,024,648 - Nagahama , et al. July 17, 2 | 2018-07-17 |
Interferometer System Having A Continuously Variable Broadband Reflector And Method To Generate An Interference Signal Of A Surface Of A Sample
App 20180031415 - HAITJEMA; Han ; et al. | 2018-02-01 |
Method for measuring a high accuracy height map of a test surface
Grant 9,881,400 - Zuiderweg , et al. January 30, 2 | 2018-01-30 |
Interference Measuring Device And Method Of Measurement Using The Same Device
App 20170363411 - Nagahama; Tatsuya ; et al. | 2017-12-21 |
Method For Measuring A Height Map Of Multiple Fields Of View And Combining Them To A Composite Height Map With Minimized Sensitivity To Instrument Drift
App 20170052018 - QUAEDACKERS; Johannes Anna ; et al. | 2017-02-23 |
Lithographic focus and dose measurement using a 2-D target
Grant 9,436,099 - Leewis , et al. September 6, 2 | 2016-09-06 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor
Grant 9,268,242 - Cadee , et al. February 23, 2 | 2016-02-23 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater
App 20160048085 - CADEE; Theodorus Petrus Maria ; et al. | 2016-02-18 |
Method For Measuring A High Accuracy Height Map Of A Test Surface
App 20160027194 - ZUIDERWEG; Adriaan Tiemen ; et al. | 2016-01-28 |
Method For Calculating A Height Map Of A Body Of Transparent Material Having An Inclined Or Curved Surface
App 20150362309 - QUAEDACKERS; Johannes Anna | 2015-12-17 |
Lithographic apparatus and device manufacturing method involving a heater
Grant 9,188,880 - Cadee , et al. November 17, 2 | 2015-11-17 |
Method and apparatus for determining a property of a surface
Grant 9,103,651 - Haitjema , et al. August 11, 2 | 2015-08-11 |
Method and apparatus for overlay measurement
Grant 8,982,328 - Megens , et al. March 17, 2 | 2015-03-17 |
Interferometer System And Method To Generate An Interference Signal Of A Surface Of A Sample
App 20140362383 - HAITJEMA; Han ; et al. | 2014-12-11 |
Lithographic focus and dose measurement using a 2-D target
Grant 8,891,061 - Leewis , et al. November 18, 2 | 2014-11-18 |
Lithographic Focus and Dose Measurement Using A 2-D Target
App 20140247434 - LEEWIS; Christian Marinus ; et al. | 2014-09-04 |
Method of Measuring a Characteristic
App 20140199634 - QUAEDACKERS; Johannes Anna ; et al. | 2014-07-17 |
Method of measuring a characteristic
Grant 8,685,626 - Quaedackers , et al. April 1, 2 | 2014-04-01 |
Method And Apparatus For Determining A Property Of A Surface
App 20130335747 - HAITJEMA; Han ; et al. | 2013-12-19 |
Method of determining a characteristic
Grant 8,502,955 - Megens , et al. August 6, 2 | 2013-08-06 |
Method of inspecting a substrate and method of preparing a substrate for lithography
Grant 8,435,593 - Vangheluwe , et al. May 7, 2 | 2013-05-07 |
Lithographic Apparatus And Device Manufacturing Method
App 20120113402 - CADEE; Theodorus Petrus Maria ; et al. | 2012-05-10 |
Lithographic method
Grant 8,119,333 - Van Der Heijden , et al. February 21, 2 | 2012-02-21 |
Lithographic Focus and Dose Measurement Using A 2-D Target
App 20110249244 - Leewis; Christian Marinus ; et al. | 2011-10-13 |
Overlay measurement on double patterning substrate
Grant 7,992,115 - Van Der Heijden , et al. August 2, 2 | 2011-08-02 |
Method and Apparatus for Overlay Measurement
App 20110141450 - MEGENS; Henricus Johannes Lambertus ; et al. | 2011-06-16 |
Producing a Marker Pattern and Measurement of an Exposure-Related Property of an Exposure Apparatus
App 20100328636 - Quaedackers; Johannes Anna ; et al. | 2010-12-30 |
Lithographic Apparatus And Device Manufacturing Method
App 20100321650 - CADEE; THEODORUS PETRUS MARIA ; et al. | 2010-12-23 |
Lithographic apparatus and device manufacturing method having liquid evaporation control
Grant 7,804,575 - Cadee , et al. September 28, 2 | 2010-09-28 |
Method of Measuring a Characteristic
App 20100227280 - Quaedackers; Johannes Anna ; et al. | 2010-09-09 |
Method of Determining a Characteristic
App 20100165312 - Megens; Henricus Johannes Lambertus ; et al. | 2010-07-01 |
Method for exposing a substrate and lithographic projection apparatus
Grant 7,670,731 - Finders , et al. March 2, 2 | 2010-03-02 |
Device manufacturing method and computer program product
Grant 7,596,420 - Kiers , et al. September 29, 2 | 2009-09-29 |
Lithographic Method
App 20090148796 - VAN DER HEIJDEN; Eddy Cornelis Antonius ; et al. | 2009-06-11 |
Overlay Measurement on Double Patterning Substrate
App 20090100391 - VAN DER HEIJDEN; Eddy Cornelis Antonius ; et al. | 2009-04-16 |
Method of inspecting a substrate and method of preparing a substrate for lithography
App 20080292780 - Vangheluwe; Rik Teodoor ; et al. | 2008-11-27 |
Lithographic device manufacturing method, lithographic cell, and computer program product
App 20080160458 - Van Ingen Schenau; Koen ; et al. | 2008-07-03 |
Lithographic apparatus and device manufacturing method
Grant 7,382,438 - Van Der Laan , et al. June 3, 2 | 2008-06-03 |
Device manufacturing method and computer program product
App 20070293973 - Kiers; Antoine Gaston Marie ; et al. | 2007-12-20 |
Lithographic apparatus, device manufacturing method and substrate
Grant 7,307,687 - Quaedackers , et al. December 11, 2 | 2007-12-11 |
Lithographic apparatus, device manufacturing method and substrate
App 20070216883 - Quaedackers; Johannes Anna ; et al. | 2007-09-20 |
Method for exposing a substrate and lithographic projection apparatus
App 20070099100 - Finders; Jozef Maria ; et al. | 2007-05-03 |
Lithographic apparatus and device manufacturing method
App 20070046920 - Laan; Hans Van Der ; et al. | 2007-03-01 |
Lithographic apparatus and device manufacturing method
App 20060033898 - Cadee; Theodorus Petrus Maria ; et al. | 2006-02-16 |
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