| Patent | Date |
|---|
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20220275504 - SHANBHAG; Damodar Rajaram ; et al. | 2022-09-01 |
Ex situ coating of chamber components for semiconductor processing
Grant 11,365,479 - Shanbhag , et al. June 21, 2 | 2022-06-21 |
Minimizing Radical Recombination Using Ald Silicon Oxide Surface Coating With Intermittent Restoration Plasma
App 20220145459 - VARADARAJAN; Bhadri N. ; et al. | 2022-05-12 |
Method Of Depositing Silicon Nitride Films
App 20210384028 - SIMS; James S. ; et al. | 2021-12-09 |
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Plasma Film Deposition
App 20210371982 - BATZER; Rachel ; et al. | 2021-12-02 |
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
Grant 11,101,164 - Batzer , et al. August 24, 2 | 2021-08-24 |
Radio Frequency (rf) Signal Source Supplying Rf Plasma Generator And Remote Plasma Generator
App 20210257188 - JUCO; Eller Y. ; et al. | 2021-08-19 |
Temperature controlled spacer for use in a substrate processing chamber
Grant 11,004,662 - Tan , et al. May 11, 2 | 2021-05-11 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20200347497 - Shanbhag; Damodar ; et al. | 2020-11-05 |
Ex situ coating of chamber components for semiconductor processing
Grant 10,760,158 - Shanbhag , et al. Sep | 2020-09-01 |
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
Grant 10,604,841 - Batzer , et al. | 2020-03-31 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20190185999 - Shanbhag; Damodar ; et al. | 2019-06-20 |
Wafer Level Uniformity Control In Remote Plasma Film Deposition
App 20180251893 - Hohn; Geoffrey ; et al. | 2018-09-06 |
Temperature Controlled Spacer For Use In A Substrate Processing Chamber
App 20180233326 - Tan; Taide ; et al. | 2018-08-16 |
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Plasma Film Deposition
App 20180163305 - Batzer; Rachel ; et al. | 2018-06-14 |
Minimizing Radical Recombination Using Ald Silicon Oxide Surface Coating With Intermittent Restoration Plasma
App 20180044791 - Varadarajan; Bhadri N. ; et al. | 2018-02-15 |
Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
Grant 9,828,672 - Varadarajan , et al. November 28, 2 | 2017-11-28 |
Plasma generator systems and methods of forming plasma
Grant 9,591,738 - Qiu , et al. March 7, 2 | 2017-03-07 |
Minimizing Radical Recombination Using Ald Silicon Oxide Surface Coating With Intermittent Restoration Plasma
App 20160281230 - Varadarajan; Bhadri N. ; et al. | 2016-09-29 |
Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes
Grant 9,209,000 - Qiu , et al. December 8, 2 | 2015-12-08 |
Continuous plasma and RF bias to regulate damage in a substrate processing system
Grant 9,194,045 - Wu , et al. November 24, 2 | 2015-11-24 |
Plasma Process Etch-to-deposition Ratio Modulation Via Ground Surface Design
App 20140127912 - Wu; Liqi ; et al. | 2014-05-08 |
Continuous Plasma And Rf Bias To Regulate Damage In A Substrate Processing System
App 20130260057 - Wu; Liqi ; et al. | 2013-10-03 |
High density plasma etchback process for advanced metallization applications
Grant 8,431,033 - Zhou , et al. April 30, 2 | 2013-04-30 |
Ashing method
Grant 8,273,259 - Qiu , et al. September 25, 2 | 2012-09-25 |
Creation Of Magnetic Field (vector Potential) Well For Improved Plasma Deposition And Resputtering Uniformity
App 20120228125 - Wu; Liqi ; et al. | 2012-09-13 |
High Density Plasma Etchback Process For Advanced Metallization Applications
App 20120152896 - Zhou; Chunming ; et al. | 2012-06-21 |
Gas Flow Distribution Receptacles, Plasma Generator Systems, And Methods For Performing Plasma Stripping Processes
App 20120097331 - Qiu; Huatan ; et al. | 2012-04-26 |
Creation Of Magnetic Field (vector Potential) Well For Improved Plasma Deposition And Resputtering Uniformity
App 20120070589 - Wu; Liqi ; et al. | 2012-03-22 |
Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes
Grant 8,110,068 - Qiu , et al. February 7, 2 | 2012-02-07 |
Plasma Generator Systems And Methods Of Forming Plasma
App 20090250334 - Qiu; Huatan ; et al. | 2009-10-08 |
Gas Flow Distribution Receptacles, Plasma Generator Systems, And Methods For Performing Plasma Stripping Processes
App 20090236313 - QIU; Huatan ; et al. | 2009-09-24 |
Submicron particle removal
Grant 7,528,386 - Ruzic , et al. May 5, 2 | 2009-05-05 |
Submicron particle removal
App 20060237667 - Ruzic; David N. ; et al. | 2006-10-26 |
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