Qin; Shu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Qin; Shu.The latest application filed is for "devices, systems and methods for electrostatic force enhanced semiconductor bonding".

Company Profile

6.50.47

Qin; Shu - Boise ID
Qin; Shu - Taoyuan TW
Qin; Shu - Malden MA
Qin; Shu - Jamaica Plain MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Devices, Systems And Methods For Electrostatic Force Enhanced Semiconductor Bonding App 20210366758 - Qin; Shu ; et al.	2021-11-25
Devices, systems and methods for electrostatic force enhanced semiconductor bonding Grant 11,114,328 - Qin , et al. September 7, 2	2021-09-07
Plasma Doping Of Gap Fill Materials App 20210202243 - Sarkar; Santanu ; et al.	2021-07-01
Integrated Assemblies and Methods of Forming Assemblies App 20210082703 - Hu; Yushi ; et al.	2021-03-18
Methods of forming assemblies including semiconductor material with heavily-doped and lightly-doped regions Grant 10,879,071 - Hu , et al. December 29, 2	2020-12-29
Phase change memory stack with treated sidewalls Grant 10,720,574 - Chan , et al.	2020-07-21
Phase change memory stack with treated sidewalls Grant 10,546,895 - Hu , et al. Ja	2020-01-28
Phase Change Memory Stack With Treated Sidewalls App 20190355902 - Chan; Tsz W. ; et al.	2019-11-21
Integrated Assemblies and Methods of Forming Assemblies App 20190198324 - Hu; Yushi ; et al.	2019-06-27
Phase Change Memory Stack With Treated Sidewalls App 20190140023 - Hu; Yongjun Jeff ; et al.	2019-05-09
Integrated assemblies containing germanium Grant 10,256,098 - Hu , et al.	2019-04-09
Devices, Systems And Methods For Electrostatic Force Enhanced Semiconductor Bonding App 20190096732 - Qin; Shu ; et al.	2019-03-28
Phase Change Memory Stack With Treated Sidewalls App 20190088867 - Chan; Tsz W. ; et al.	2019-03-21
Phase change memory stack with treated sidewalls Grant 10,224,479 - Chan , et al.	2019-03-05
Phase change memory stack with treated sidewalls Grant 10,177,198 - Hu , et al. J	2019-01-08
Devices, systems and methods for electrostatic force enhanced semiconductor bonding Grant 10,153,190 - Qin , et al. Dec	2018-12-11
Phase change memory stack with treated sidewalls Grant 10,079,340 - Chan , et al. September 18, 2	2018-09-18
Phase Change Memory Stack With Treated Sidewalls App 20180166629 - Chan; Tsz W. ; et al.	2018-06-14
Phase Change Memory Stack With Treated Sidewalls App 20170358629 - Hu; Yongjun Jeff ; et al.	2017-12-14
Systems and methods for plasma processing of microfeature workpieces Grant 9,786,475 - Qin , et al. October 10, 2	2017-10-10
Phase change memory stack with treated sidewalls Grant 9,673,256 - Hu , et al. June 6, 2	2017-06-06
Integrated Assemblies and Methods of Forming Assemblies App 20170125426 - Hu; Yushi ; et al.	2017-05-04
Semiconductor devices Grant 9,530,842 - Qin , et al. December 27, 2	2016-12-27
Memory cells and methods of forming memory cells Grant 9,496,495 - Schubert , et al. November 15, 2	2016-11-15
Memory Cells and Methods of Forming Memory Cells App 20160284996 - Schubert; Martin ; et al.	2016-09-29
Phase Change Memory Stack With Treated Sidewalls App 20160218282 - Chan; Tsz W. ; et al.	2016-07-28
Semiconductor Devices, and Methods of Forming Semiconductor Devices App 20160211324 - Qin; Shu ; et al.	2016-07-21
Memory cells and methods of forming memory cells Grant 9,385,317 - Schubert , et al. July 5, 2	2016-07-05
Phase Change Memory Stack With Treated Sidewalls App 20160190209 - Hu; Yongjun Jeff ; et al.	2016-06-30
Phase change memory stack with treated sidewalls Grant 9,306,159 - Chan , et al. April 5, 2	2016-04-05
Phase change memory stack with treated sidewalls Grant 9,281,471 - Hu , et al. March 8, 2	2016-03-08
Methods of forming memory cells having regions containing one or both of carbon and boron Grant 9,257,646 - Schubert , et al. February 9, 2	2016-02-09
Memory Cells and Methods of Forming Memory Cells App 20160035974 - Schubert; Martin ; et al.	2016-02-04
Phase Change Memory Stack With Treated Sidewalls App 20150318467 - Hu; Yongjun Jeff ; et al.	2015-11-05
Phase Change Memory Stack With Treated Sidewalls App 20150318468 - Chan; Tsz W. ; et al.	2015-11-05
Memories and methods of forming thin-film transistors using hydrogen plasma doping Grant 9,136,282 - Qin , et al. September 15, 2	2015-09-15
Devices, Systems And Methods For Electrostatic Force Enhanced Semiconductor Bonding App 20150221540 - Qin; Shu ; et al.	2015-08-06
Methods of forming doped regions in semiconductor substrates Grant 9,093,367 - Liu , et al. July 28, 2	2015-07-28
Memories And Methods Of Forming Thin-film Transistors Using Hydrogen Plasma Doping App 20150206906 - Qin; Shu ; et al.	2015-07-23
Memory Cells and Methods of Forming Memory Cells App 20150179936 - Schubert; Martin ; et al.	2015-06-25
Memory cells having regions containing one or both of carbon and boron Grant 8,981,334 - Schubert , et al. March 17, 2	2015-03-17
Systems and methods for plasma doping microfeature workpieces Grant 8,975,603 - Qin , et al. March 10, 2	2015-03-10
Memories and methods of forming thin-film transistors using hydrogen plasma doping Grant 8,940,592 - Qin , et al. January 27, 2	2015-01-27
Rapid thermal processing systems and methods for treating microelectronic substrates Grant 8,822,877 - Qin September 2, 2	2014-09-02
Memories And Methods Of Forming Thin-film Transistors Using Hydrogen Plasma Doping App 20140197416 - Qin; Shu ; et al.	2014-07-17
Systems And Methods For Plasma Processing Of Microfeature Workpieces App 20140197134 - Qin; Shu ; et al.	2014-07-17
Systems And Methods For Plasma Doping Microfeature Workpieces App 20140144379 - Qin; Shu ; et al.	2014-05-29
Methods of implanting dopant ions Grant 8,709,927 - Qin , et al. April 29, 2	2014-04-29
Systems and methods for plasma processing of microfeature workpieces Grant 8,671,879 - Qin , et al. March 18, 2	2014-03-18
Systems and methods for plasma doping microfeature workpieces Grant 8,642,135 - Qin , et al. February 4, 2	2014-02-04
Methods of Forming Doped Regions in Semiconductor Substrates App 20130288466 - Liu; Lequn Jennifer ; et al.	2013-10-31
Rapid Thermal Processing Systems And Methods For Treating Microelectronic Substrates App 20130233834 - Qin; Shu	2013-09-12
Methods of processing units comprising crystalline materials, and methods of forming semiconductor-on-insulator constructions Grant 8,524,572 - Qin , et al. September 3, 2	2013-09-03
Methods of forming doped regions in semiconductor substrates Grant 8,497,194 - Liu , et al. July 30, 2	2013-07-30
Rapid thermal processing systems and methods for treating microelectronic substrates Grant 8,426,763 - Qin April 23, 2	2013-04-23
Methods of Processing Units Comprising Crystalline Materials, and Methods of Forming Semiconductor-On-Insulator Constructions App 20130089966 - Qin; Shu ; et al.	2013-04-11
Methods of Forming Doped Regions in Semiconductor Substrates App 20130072006 - Liu; Lequn Jennifer ; et al.	2013-03-21
Methods Of Implanting Dopant Ions App 20130012007 - Qin; Shu ; et al.	2013-01-10
Methods of forming doped regions in semiconductor substrates Grant 8,329,567 - Liu , et al. December 11, 2	2012-12-11
Sputtering-less ultra-low energy ion implantation Grant 8,324,088 - Qin , et al. December 4, 2	2012-12-04
Method for fabricating dielectric layer with improved insulating properties Grant 8,293,659 - Qin October 23, 2	2012-10-23
Method For Fabricating Dielectric Layer With Improved Insulating Properties App 20120190213 - Qin; Shu	2012-07-26
Methods Of Forming Doped Regions In Semiconductor Substrates App 20120108042 - Liu; Jennifer Lequn ; et al.	2012-05-03
Sputtering-Less Ultra-Low Energy Ion Implantation App 20110212608 - Qin; Shu ; et al.	2011-09-01
Sputtering-less ultra-low energy ion implantation Grant 7,935,618 - Qin , et al. May 3, 2	2011-05-03
Rapid Thermal Processing Systems And Methods For Treating Microelectronic Substrates App 20100273277 - Qin; Shu	2010-10-28
Method of photoresist strip for plasma doping process of semiconductor manufacturing Grant 7,737,010 - Qin , et al. June 15, 2	2010-06-15
Method of forming elevated photosensor and resulting structure Grant 7,682,930 - Liu , et al. March 23, 2	2010-03-23
Methods for determining a dose of an impurity implanted in a semiconductor substrate Grant 7,592,212 - Qin , et al. September 22, 2	2009-09-22
Systems And Methods For Plasma Processing Of Microfeature Workpieces App 20090120581 - Qin; Shu ; et al.	2009-05-14
Sputtering-Less Ultra-Low Energy Ion Implantation App 20090081858 - Qin; Shu ; et al.	2009-03-26
Systems and methods for plasma processing of microfeature workpieces Grant 7,476,556 - Qin , et al. January 13, 2	2009-01-13
Methods for determining a dose of an impurity implanted in a semiconductor substrate and an apparatus for same App 20080248597 - Qin; Shu ; et al.	2008-10-09
Method of forming elevated photosensor and resulting structure App 20070284686 - Liu; Saijin ; et al.	2007-12-13
Method of photoresist strip for plasma doping process of semiconductor manufacturing App 20070243700 - Qin; Shu ; et al.	2007-10-18
Low-k dielectric process for multilevel interconnection using mircocavity engineering during electric circuit manufacture Grant 7,235,493 - Qin June 26, 2	2007-06-26
Systems and methods for plasma doping microfeature workpieces App 20070048453 - Qin; Shu ; et al.	2007-03-01
Systems and methods for plasma processing of microfeature workpieces App 20070037300 - Qin; Shu ; et al.	2007-02-15
Apparatuses and methods for supporting microelectronic devices during plasma-based fabrication processes App 20060237138 - Qin; Shu	2006-10-26
MEMS based multi-polar electrostatic chuck Grant 7,072,165 - Kellerman , et al. July 4, 2	2006-07-04
Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage Grant 7,072,166 - Qin , et al. July 4, 2	2006-07-04
Low-k dielectric process for multilevel interconnection using microcavity engineering during electric circuit manufacture App 20060084262 - Qin; Shu	2006-04-20
Method of making a MEMS electrostatic chuck Grant 6,946,403 - Kellerman , et al. September 20, 2	2005-09-20
Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage Grant 6,947,274 - Kellerman , et al. September 20, 2	2005-09-20
MEMS based contact conductivity electrostatic chuck Grant 6,905,984 - Kellerman , et al. June 14, 2	2005-06-14
Method Of Making A Mems Electrostatic Chuck App 20050099758 - Kellerman, Peter L. ; et al.	2005-05-12
Mems Based Contact Conductivity Electrostatic Chuck App 20050079737 - Kellerman, Peter L. ; et al.	2005-04-14
Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage App 20050057881 - Qin, Shu ; et al.	2005-03-17
Clamping And De-clamping Semiconductor Wafers On An Electrostatic Chuck Using Wafer Inertial Confinement By Applying A Single-phase Square Wave Ac Clamping Voltage App 20050052817 - Kellerman, Peter L. ; et al.	2005-03-10
Apparatus and method for hydrogenating polysilicon thin film transistors by plasma immersion ion implantation Grant 5,883,016 - Chan , et al. March 16, 1	1999-03-16
Plasma ion implantation hydrogenation process utilizing voltage pulse applied to substrate Grant 5,508,227 - Chan , et al. April 16, 1	1996-04-16