Qin; Huichao

Patent Applications and Registrations

Patent applications and USPTO patent grants for Qin; Huichao.The latest application filed is for "coarse motion and fine motion integrated reticle stage driven by planar motor".

Company Profile

0.3.5

Qin; Huichao - Beijing CN
Qin; Huichao - Haidian District Beijing CN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Three-DOF heterodyne grating interferometer displacement measurement system Grant 9,903,704 - Zhu , et al. February 27, 2	2018-02-27
Coarse motion and fine motion integrated reticle stage driven by planar motor Grant 9,904,183 - Zhu , et al. February 27, 2	2018-02-27
Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor Grant 9,791,789 - Zhang , et al. October 17, 2	2017-10-17
Coarse Motion And Fine Motion Integrated Reticle Stage Driven By Planar Motor App 20170115580 - ZHU; Yu ; et al.	2017-04-27
Magnetically Suspended Coarse Motion And Fine Motion Integrated Reticle Stage Driven By Planar Motor App 20170052461 - ZHANG; Ming ; et al.	2017-02-23
Three-dof Heterodyne Grating Interferometer Displacement Measurement System App 20160153764 - ZHU; Yu ; et al.	2016-06-02
Two-dof Heterodyne Grating Interferometer Displacement Measurement System App 20160138903 - ZHANG; Ming ; et al.	2016-05-19
Wafer Stage Having Function of Anti-Collision App 20150311099 - Zhu; Yu ; et al.	2015-10-29

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