Pyatigorsky; Grigory

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pyatigorsky; Grigory.The latest application filed is for "substrate polishing metrology using interference signals".

Company Profile

0.8.3

Pyatigorsky; Grigory - Boise ID US
Pyatigorsky; Grigory - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate polishing metrology using interference signals Grant 8,556,679 - Birang , et al. October 15, 2	2013-10-15
Substrate Polishing Metrology Using Interference Signals App 20120107971 - Birang; Manoocher ; et al.	2012-05-03
Substrate polishing metrology using interference signals Grant 8,092,274 - Birang , et al. January 10, 2	2012-01-10
Substrate Polishing Metrology Using Interference Signals App 20110070808 - Birang; Manoocher ; et al.	2011-03-24
Substrate polishing metrology using interference signals Grant 7,841,926 - Birang , et al. November 30, 2	2010-11-30
Substrate Polishing Metrology Using Interference Signals App 20100240281 - Birang; Manoocher ; et al.	2010-09-23
Substrate polishing metrology using interference signals Grant 7,731,566 - Birang , et al. June 8, 2	2010-06-08
Apparatus and method for in-situ monitoring of chemical mechanical polishing operations Grant 5,964,643 - Birang , et al. October 12, 1	1999-10-12
Releasing a workpiece from an electrostatic chuck Grant 5,612,850 - Birang , et al. March 18, 1	1997-03-18
Releasing a workpiece from an electrostatic chuck Grant 5,459,632 - Birang , et al. October 17, 1	1995-10-17

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