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Patent applications and USPTO patent grants for Pyatigorsky; Grigory.The latest application filed is for "substrate polishing metrology using interference signals".
Patent | Date |
---|---|
Substrate polishing metrology using interference signals Grant 8,556,679 - Birang , et al. October 15, 2 | 2013-10-15 |
Substrate Polishing Metrology Using Interference Signals App 20120107971 - Birang; Manoocher ;   et al. | 2012-05-03 |
Substrate polishing metrology using interference signals Grant 8,092,274 - Birang , et al. January 10, 2 | 2012-01-10 |
Substrate Polishing Metrology Using Interference Signals App 20110070808 - Birang; Manoocher ;   et al. | 2011-03-24 |
Substrate polishing metrology using interference signals Grant 7,841,926 - Birang , et al. November 30, 2 | 2010-11-30 |
Substrate Polishing Metrology Using Interference Signals App 20100240281 - Birang; Manoocher ;   et al. | 2010-09-23 |
Substrate polishing metrology using interference signals Grant 7,731,566 - Birang , et al. June 8, 2 | 2010-06-08 |
Apparatus and method for in-situ monitoring of chemical mechanical polishing operations Grant 5,964,643 - Birang , et al. October 12, 1 | 1999-10-12 |
Releasing a workpiece from an electrostatic chuck Grant 5,612,850 - Birang , et al. March 18, 1 | 1997-03-18 |
Releasing a workpiece from an electrostatic chuck Grant 5,459,632 - Birang , et al. October 17, 1 | 1995-10-17 |
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