Purohit; Ashwin M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Purohit; Ashwin M..The latest application filed is for "multi-resistivity johnsen-rahbek electrostatic clamp".
- Purohit; Ashwin M. - Gloucester MA US
| Patent | Date |
|---|---|
| Vapor compression refrigeration chuck for ion implanters Grant 9,558,980 - Lee , et al. January 31, 2 | 2017-01-31 |
| Multi-resistivity Johnsen-Rahbek electrostatic clamp Grant 9,281,227 - Lee , et al. March 8, 2 | 2016-03-08 |
| Matched coefficient of thermal expansion for an electrostatic chuck Grant 9,048,276 - Lee , et al. June 2, 2 | 2015-06-02 |
| Heated electrostatic chuck including mechanical clamp capability at high temperature Grant 8,941,968 - Justesen , et al. January 27, 2 | 2015-01-27 |
| Multi-Resistivity Johnsen-Rahbek Electrostatic Clamp App 20150002983 - Lee; William D. ; et al. | 2015-01-01 |
| Electrostatic chuck ground punch Grant 8,902,560 - Smith , et al. December 2, 2 | 2014-12-02 |
| Heated annulus chuck Grant 8,797,706 - Lee , et al. August 5, 2 | 2014-08-05 |
| Annulus clamping and backside gas cooled electrostatic chuck Grant 8,422,193 - Tao , et al. April 16, 2 | 2013-04-16 |
| De-clamping wafers from an electrostatic chuck Grant 8,270,142 - Lee , et al. September 18, 2 | 2012-09-18 |
| Non-condensing thermos chuck Grant 8,241,425 - Lee , et al. August 14, 2 | 2012-08-14 |
| Variable frequency electrostatic clamping Grant 8,228,658 - Purohit July 24, 2 | 2012-07-24 |
| Heated Electrostatic Chuck Including Mechanical Clamp Capability At High Temperature App 20110299217 - Justesen; Perry J.I. ; et al. | 2011-12-08 |
| Heated Annulus Chuck App 20110299218 - Lee; William Davis ; et al. | 2011-12-08 |
| Electrostatic chuck with compliant coat Grant 8,023,247 - Purohit , et al. September 20, 2 | 2011-09-20 |
| Wafer grounding method for electrostatic clamps Grant 7,952,851 - LaFontaine , et al. May 31, 2 | 2011-05-31 |
| Non-condensing Thermos Chuck App 20100187447 - Lee; William D. ; et al. | 2010-07-29 |
| Vapor Compression Refridgeration Chuck for Ion Implanters App 20100171044 - Lee; William D. ; et al. | 2010-07-08 |
| Sliding wafer release gripper/wafer peeling gripper Grant 7,751,172 - Purohit , et al. July 6, 2 | 2010-07-06 |
| De-clamping Wafers From An Electrostatic Chuck App 20100142113 - Lee; William D. ; et al. | 2010-06-10 |
| Electrostatic Chuck With Compliant Coat App 20100142114 - Purohit; Ashwin M. ; et al. | 2010-06-10 |
| Wafer Grounding Method For Electrostatic Clamps App 20100110603 - LaFontaine; Marvin R. ; et al. | 2010-05-06 |
| Electrostatic Chuck Ground Punch App 20100110604 - Smith; David B. ; et al. | 2010-05-06 |
| Variable frequency electrostatic clamping App 20080192405 - Purohit; Ashwin M. | 2008-08-14 |
| Annulus clamping and backside gas cooled electrostatic chuck App 20080144251 - Tao; Teng Chao D. ; et al. | 2008-06-19 |
| Offset phase operation on a multiphase AC electrostatic clamp Grant 7,385,799 - Purohit June 10, 2 | 2008-06-10 |
| Sliding wafer release gripper / wafer peeling gripper App 20080100983 - Purohit; Ashwin M. ; et al. | 2008-05-01 |
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