Purdy; Matthew A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Purdy; Matthew A..The latest application filed is for "fault detection through feedback".

Company Profile

0.31.5

Purdy; Matthew A. - Austin TX
Purdy; Matthew A. - Autin TX
Purdy; Matthew A. - Reynoldsburg OH

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Adjusting weighting of a parameter relating to fault detection based on a detected fault Grant 8,676,538 - Purdy March 18, 2	2014-03-18
Method and apparatus for predicting yield parameters based on fault classification Grant 7,849,366 - Purdy December 7, 2	2010-12-07
Method and apparatus for scheduling a plurality of processing tools Grant 7,715,941 - Purdy May 11, 2	2010-05-11
Method and apparatus for modifying process selectivities based on process state information Grant 7,695,986 - Purdy , et al. April 13, 2	2010-04-13
Method and apparatus for controlling a film formation process with multiple objectives Grant 7,473,566 - Purdy , et al. January 6, 2	2009-01-06
Method and apparatus for selecting wafers for sampling Grant 7,460,968 - Good , et al. December 2, 2	2008-12-02
Method and apparatus for scheduling metrology based on a jeopardy count Grant 7,299,106 - Nicksic , et al. November 20, 2	2007-11-20
Method and system for dynamically selecting wafer lots for metrology processing Grant 7,296,103 - Purdy , et al. November 13, 2	2007-11-13
Method and apparatus for calibrating degradable components using process state data Grant 7,153,709 - Purdy , et al. December 26, 2	2006-12-26
Standing weightlifting apparatus Grant 7,131,937 - Skilken , et al. November 7, 2	2006-11-07
Method and apparatus for fault classification based on residual vectors Grant 7,100,081 - Purdy , et al. August 29, 2	2006-08-29
Method and system for dynamically adjusting metrology sampling based upon available metrology capacity Grant 7,076,321 - Purdy July 11, 2	2006-07-11
Controlling cumulative wafer effects Grant 7,069,103 - Bode , et al. June 27, 2	2006-06-27
Method and system for prioritizing material to clear exception conditions Grant 7,069,098 - Purdy June 27, 2	2006-06-27
Method and apparatus for implementing competing control models Grant 7,067,333 - Pasadyn , et al. June 27, 2	2006-06-27
Fault detection through feedback App 20060095232 - Purdy; Matthew A.	2006-05-04
Methods of controlling optical properties of a capping insulating layer on memory devices, and system for performing same Grant 7,026,170 - Purdy April 11, 2	2006-04-11
Method And System For Dynamically Adjusting Metrology Sampling Based Upon Available Metrology Capacity App 20060074503 - Purdy; Matthew A.	2006-04-06
Method And System For Prioritizing Material To Clear Exception Conditions App 20060025879 - Purdy; Matthew A.	2006-02-02
Fault detection spanning multiple processes Grant 6,991,945 - Castle , et al. January 31, 2	2006-01-31
Verifying a fault detection result based on a process control state Grant 6,988,225 - Purdy , et al. January 17, 2	2006-01-17
Dynamic metrology sampling methods, and system for performing same Grant 6,988,045 - Purdy January 17, 2	2006-01-17
Matching data related to multiple metrology tools Grant 6,978,189 - Bode , et al. December 20, 2	2005-12-20
Method of controlling stepper process parameters based upon optical properties of incoming anti-reflecting coating layers, and system for accomplishing same Grant 6,967,068 - Purdy , et al. November 22, 2	2005-11-22
Prioritizing an application of correction in a multi-input control system Grant 6,912,436 - Jones , et al. June 28, 2	2005-06-28
Updating process controller based upon fault detection analysis Grant 6,871,114 - Green , et al. March 22, 2	2005-03-22
Standing weightlifting apparatus App 20050054493 - Skilken, Stephen A. ; et al.	2005-03-10
Dynamic metrology sampling methods, and system for performing same App 20050033467 - Purdy, Matthew A.	2005-02-10
Method and apparatus for integrating dispatch and process control actions Grant 6,790,686 - Purdy , et al. September 14, 2	2004-09-14
Methods of controlling VSS implants on memory devices, and system for performing same Grant 6,790,752 - Purdy September 14, 2	2004-09-14
Determination of a process flow based upon fault detection analysis Grant 6,740,534 - Adams, III , et al. May 25, 2	2004-05-25
Method and apparatus for run-to-run control of trench profiles Grant 6,728,591 - Hussey, Jr. , et al. April 27, 2	2004-04-27
Method and apparatus for wafer-to-wafer control with partial measurement data Grant 6,708,129 - Pasadyn , et al. March 16, 2	2004-03-16
Method and apparatus for detecting processing faults using scatterometry measurements Grant 6,639,663 - Markle , et al. October 28, 2	2003-10-28
Method of controlling metal etch processes, and system for accomplishing same Grant 6,562,635 - Lensing , et al. May 13, 2	2003-05-13

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