Puggl; Michael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Puggl; Michael.The latest application filed is for "spin chuck with concentrated center and radial heating".

Company Profile

3.11.12

Puggl; Michael - Villach AU
Puggl; Michael - Eitweg AT
Puggl; Michael - Sankt Stefan N/A AT
Puggl; Michael - Eltweg N/A AT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Spin chuck with concentrated center and radial heating Grant 10,658,204 - Hill , et al.	2020-05-19
Spin Chuck With Concentrated Center And Radial Heating App 20190051541 - Hill; Bridget ; et al.	2019-02-14
Dual Mode Chamber For Processing Wafer-shaped Articles App 20160376702 - HOHENWARTER; Karl-Heinz ; et al.	2016-12-29
Device for holding wafer shaped articles Grant 9,130,002 - Frank , et al. September 8, 2	2015-09-08
Method and apparatus for liquid treatment of wafer shaped articles Grant 8,997,764 - Puggl April 7, 2	2015-04-07
Method and device for wet treatment of plate-like articles Grant 8,945,341 - Matsushita , et al. February 3, 2	2015-02-03
Apparatus and method for wet treatment of disc-like articles Grant 8,821,681 - Puggl , et al. September 2, 2	2014-09-02
Method And Apparatus For Liquid Treatment Of Wafer Shaped Articles App 20140041803 - KOSHIZAWA; Takehito ; et al.	2014-02-13
Method And Apparatus For Liquid Treatment Of Wafer-shaped Articles App 20140026926 - SEMMELROCK; Christoph ; et al.	2014-01-30
Device and process for liquid treatment of a wafer shaped article Grant 8,596,623 - Frank , et al. December 3, 2	2013-12-03
Method And Device For Wet Treatment Of Plate-like Articles App 20130048607 - MATSUSHITA; Masaichiro Ken ; et al.	2013-02-28
Method And Apparatus For Liquid Treatment Of Wafer Shaped Articles App 20120298149 - PUGGL; Michael	2012-11-29
Device And Process For Liquid Treatment Of Wafer Shaped Articles App 20120286481 - PUGGL; Michael ; et al.	2012-11-15
Device For Holding Wafer Shaped Articles App 20110272874 - FRANK; Dieter ; et al.	2011-11-10
Device And Process For Liquid Treatment Of A Wafer Shaped Article App 20110151675 - FRANK; Dieter ; et al.	2011-06-23

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