Patent | Date |
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Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units Grant 11,226,202 - Pruetz , et al. January 18, 2 | 2022-01-18 |
Inertial sensor for measuring a rate of rotation and/or acceleration Grant 11,016,112 - Pruetz May 25, 2 | 2021-05-25 |
Micromechanical rotational rate sensor system and corresponding production method Grant 10,900,785 - Bode , et al. January 26, 2 | 2021-01-26 |
Rotation-rate Sensor, Method For Producing A Rotation-rate Sensor App 20200378761 - Liewald; Jan-Timo ;   et al. | 2020-12-03 |
Three-axis Micromechanical Rotation Rate Sensor System Including Linearly And Rotatorily Drivable Sensor Units App 20200355500 - Pruetz; Odd-Axel ;   et al. | 2020-11-12 |
Inertial Sensor For Measuring A Rate Of Rotation And/or Acceleration App 20200309806 - Pruetz; Odd-Axel | 2020-10-01 |
Micromechanical yaw rate sensor and method for the production thereof Grant 10,753,743 - Neul , et al. A | 2020-08-25 |
Micromechanical yaw rate sensor and method for operating same Grant 10,753,742 - Neul , et al. A | 2020-08-25 |
Micromechanical spring device and method for manufacturing a micromechanical spring device Grant 10,737,930 - Grutzeck , et al. A | 2020-08-11 |
Micromechanical component Grant 10,519,029 - Pruetz Dec | 2019-12-31 |
Micromechanical Rotational Rate Sensor System And Corresponding Production Method App 20190078887 - Bode; Niels ;   et al. | 2019-03-14 |
Micromechanical Yaw Rate Sensor and Method for Operating Same App 20190056226 - Neul; Reinhard ;   et al. | 2019-02-21 |
OMM rotation rate sensor including a drive, without stationary electrodes Grant 10,139,424 - Reinmuth , et al. Nov | 2018-11-27 |
Micromechanical Yaw Rate Sensor and Method for the Production Thereof App 20180321039 - Neul; Reinhard ;   et al. | 2018-11-08 |
Micromechanical Spring Device And Method For Manufacturing A Micromechanical Spring Device App 20180155185 - GRUTZECK; Helmut ;   et al. | 2018-06-07 |
Rotation rate sensor and method for operating a rotation rate sensor Grant 9,915,531 - Pruetz , et al. March 13, 2 | 2018-03-13 |
Micromechanical Component App 20180057352 - Pruetz; Odd-Axel | 2018-03-01 |
Combination Electrode For Drive, Drive Detection, Coriolis Detection, And Quadrature Compensation App 20170059323 - HATTASS; Mirko ;   et al. | 2017-03-02 |
Omm Rotation Rate Sensor Including A Drive, Without Stationary Electrodes App 20170016928 - Reinmuth; Jochen ;   et al. | 2017-01-19 |
Rotation rate sensor and method for operating a rotation rate sensor Grant 9,500,481 - Pruetz November 22, 2 | 2016-11-22 |
Rotation rate sensor and method for operating a rotation rate sensor App 20160223330 - Pruetz; Odd-Axel ;   et al. | 2016-08-04 |
Micromechanical spring mechanism App 20160138667 - PRUETZ; Odd-Axel ;   et al. | 2016-05-19 |
Micromechanical spring for an inertial sensor App 20160138666 - HOEPPNER; Christian ;   et al. | 2016-05-19 |
Rotation rate sensor and method for operating a rotation rate sensor App 20140373627 - PRUETZ; Odd-Axel | 2014-12-25 |
Yaw rate sensor and method for operating a yaw rate sensor Grant 8,408,059 - Pruetz April 2, 2 | 2013-04-02 |
Yaw rate sensor and method for operating a yaw rate sensor App 20110041603 - PRUETZ; Odd-Axel | 2011-02-24 |
Micromechanical inertial sensor having reduced sensitivity to the influence of drifting surface charges, and method suited for operation thereof Grant 7,721,604 - Pruetz May 25, 2 | 2010-05-25 |
Micromechanical inertial sensor having reduced sensitivity to the influence of drifting surface charges, and method suited for operation thereof App 20080134785 - Pruetz; Odd-Axel | 2008-06-12 |
Gas sensor and method for the production thereof App 20070062812 - Weber; Heribert ;   et al. | 2007-03-22 |