Patent | Date |
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Optical component and method for the production of same Grant 11,420,364 - Puetz , et al. August 23, 2 | 2022-08-23 |
Device For Mounting Spherical Optical Components App 20220214518 - Prochnau; Jens ;   et al. | 2022-07-07 |
Optical element for the beam guidance of imaging light in projection lithography Grant 11,029,606 - Prochnau , et al. June 8, 2 | 2021-06-08 |
Optical arrangement, in particular lithography system Grant 10,809,636 - Gellrich , et al. October 20, 2 | 2020-10-20 |
Optical arrangement, in particular lithography system, with a transport lock Grant 10,761,436 - Zweering , et al. Sep | 2020-09-01 |
Lens arrangement, in particular a spectacle glass arrangement and method for producing a lens arrangement Grant 10,690,941 - Puetz , et al. | 2020-06-23 |
Optical component and method for coating optical component Grant 10,670,777 - Prochnau , et al. | 2020-06-02 |
Optical Element For The Beam Guidance Of Imaging Light In Projection Lithography App 20200150544 - Prochnau; Jens ;   et al. | 2020-05-14 |
Mounting arrangement for an optical imaging arrangement Grant 10,520,838 - Schaffer , et al. Dec | 2019-12-31 |
Optical Arrangement, In Particular Lithography System, With A Transport Lock App 20190339625 - Zweering; Ralf ;   et al. | 2019-11-07 |
Optical Arrangement, In Particular Lithography System App 20190339626 - Gellrich; Bernhard ;   et al. | 2019-11-07 |
Optical Component And Method For The Production Of Same App 20190105811 - PUETZ; Joerg ;   et al. | 2019-04-11 |
Mounting Arrangement For An Optical Imaging Arrangement App 20190086823 - Schaffer; Dirk ;   et al. | 2019-03-21 |
Optical Component And Method For Coating Optical Component App 20190079215 - PROCHNAU; Jens ;   et al. | 2019-03-14 |
Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same Grant 10,095,126 - Prochnau , et al. October 9, 2 | 2018-10-09 |
Lens Arrangement, In Particular A Spectacle Glass Arrangement And Method For Producing A Lens Arrangement App 20180259792 - PUETZ; Joerg ;   et al. | 2018-09-13 |
Optical arrangement of a microlithographic projection exposure apparatus Grant 10,007,186 - Prochnau , et al. June 26, 2 | 2018-06-26 |
Mirror module, in particular for a microlithographic projection exposure appararatus Grant 9,996,015 - Prochnau , et al. June 12, 2 | 2018-06-12 |
Moveably Mounted Component Of Projection Exposure System, As Well As Device And Method For Movement Limitation For Same App 20170357164 - Prochnau; Jens ;   et al. | 2017-12-14 |
Optical imaging arrangement with simplified manufacture Grant 9,804,500 - Kugler , et al. October 31, 2 | 2017-10-31 |
Optical Arrangement Of A Microlithographic Projection Exposure Apparatus App 20170192360 - Prochnau; Jens ;   et al. | 2017-07-06 |
Mirror Module, In Particular For A Microlithographic Projection Exposure Appararatus App 20170153552 - Prochnau; Jens ;   et al. | 2017-06-01 |
Arrangement and lithography apparatus with arrangement Grant 9,632,421 - Nefzi , et al. April 25, 2 | 2017-04-25 |
Arrangement And Lithography Apparatus With Arrangement App 20160216611 - Nefzi; Marwene ;   et al. | 2016-07-28 |
Optical Imaging Arrangement With Simplified Manufacture App 20160179013 - Kugler; Jens ;   et al. | 2016-06-23 |