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Process and apparatus for processing a nitride structure without silica deposition
Grant 10,916,440 - Bassett , et al. February 9, 2 | 2021-02-09 |
Colloidal silica growth inhibitor and associated method and system
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Process and apparatus for processing a nitride structure without silica deposition
Grant 10,515,820 - Bassett , et al. Dec | 2019-12-24 |
Systems and methodologies for vapor phase hydroxyl radical processing of substrates
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Photo-sensitized chemically amplified resist (PS-CAR) simulation
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Colloidal Silica Growth Inhibitor And Associated Method And System
App 20190237338 - Rotondaro; Antonio L.P. ; et al. | 2019-08-01 |
Process And Apparatus For Processing A Nitride Structure Without Silica Deposition
App 20190237339 - Bassett; Derek ; et al. | 2019-08-01 |
Colloidal silica growth inhibitor and associated method and system
Grant 10,325,779 - Rotondaro , et al. | 2019-06-18 |
Cover plate for wind mark control in spin coating process
Grant 10,262,880 - Bassett , et al. | 2019-04-16 |
Method of treating a microelectronic substrate using dilute TMAH
Grant 10,256,163 - Printz , et al. | 2019-04-09 |
Method and apparatus for dynamic control of the temperature of a wet etch process
Grant 10,096,480 - Rotondaro , et al. October 9, 2 | 2018-10-09 |
Chemical fluid processing apparatus and chemical fluid processing method
Grant 10,062,586 - Bassett , et al. August 28, 2 | 2018-08-28 |
Etch system and method for single substrate processing
Grant 9,852,920 - Brown , et al. December 26, 2 | 2017-12-26 |
Process and Apparatus for Processing a Nitride Structure Without Silica Deposition
App 20170287726 - Bassett; Derek ; et al. | 2017-10-05 |
Colloidal Silica Growth Inhibitor and Associated Method and System
App 20170287725 - Rotondaro; Antonio L.P. ; et al. | 2017-10-05 |
Systems And Methodologies For Vapor Phase Hydroxyl Radical Processing Of Substrates
App 20170263436 - BROWN; Ian J. ; et al. | 2017-09-14 |
Photo-sensitized Chemically Amplified Resist (PS-CAR) simulation
App 20170242342 - Carcasi; Michael ; et al. | 2017-08-24 |
Controlling cleaning of a layer on a substrate using nozzles
Grant 9,735,026 - Brown , et al. August 15, 2 | 2017-08-15 |
Method Of Treating A Microelectronic Substrate Using Dilute Tmah
App 20170141005 - Printz; Wallace P. ; et al. | 2017-05-18 |
Method And Apparatus For Dynamic Control Of The Temperature Of A Wet Etch Process
App 20170092550 - Rotondaro; Antonio Luis Pacheco ; et al. | 2017-03-30 |
Method And Apparatus For Drying Semiconductor Substrates Using Liquid Carbon Dioxide
App 20170092484 - Brown; Ian J. ; et al. | 2017-03-30 |
Techniques for Spin-on-Carbon Planarization
App 20160358786 - Hooge; Joshua S. ; et al. | 2016-12-08 |
Method and system of process chemical temperature control using an injection nozzle
Grant 9,513,556 - Brown , et al. December 6, 2 | 2016-12-06 |
Etch System And Method For Single Substrate Processing
App 20160155647 - Brown; Ian J. ; et al. | 2016-06-02 |
Etch system and method for single substrate processing
Grant 9,257,292 - Brown , et al. February 9, 2 | 2016-02-09 |
Sequential stage mixing for a resist batch strip process
Grant 9,075,318 - Brown , et al. July 7, 2 | 2015-07-07 |
Chemical Fluid Processing Apparatus and Chemical Fluid Processing Method
App 20150031214 - Bassett; Derek W ; et al. | 2015-01-29 |
Cover Plate For Wind Mark Control In Spin Coating Process
App 20140235070 - Bassett; Derek W. ; et al. | 2014-08-21 |
Controlling Cleaning Of A Layer On A Substrate Using Nozzles
App 20140144463 - Brown; Ian J. ; et al. | 2014-05-29 |
Method And System Of Process Chemical Temperature Control Using An Injection Nozzle
App 20140137892 - Brown; Ian J. ; et al. | 2014-05-22 |
Dual tone development with a photo-activated acid enhancement component in lithographic applications
Grant 8,574,810 - Fonseca , et al. November 5, 2 | 2013-11-05 |
Flood exposure process for dual tone development in lithographic applications
Grant 8,568,964 - Fonseca , et al. October 29, 2 | 2013-10-29 |
Etch System And Method For Single Substrate Processing
App 20120247505 - BROWN; IAN J. ; et al. | 2012-10-04 |
Increasing Masking Layer Etch Rate And Selectivity
App 20120248061 - BROWN; IAN J. ; et al. | 2012-10-04 |
Technique To Form A Self-aligned Double Pattern
App 20120045722 - Printz; Wallace P. ; et al. | 2012-02-23 |
Method For Forming A Self-aligned Double Pattern
App 20120045721 - Printz; Wallace P. ; et al. | 2012-02-23 |
Dual tone development with plural photo-acid generators in lithographic applications
Grant 7,829,269 - Fonseca , et al. November 9, 2 | 2010-11-09 |
Dual tone development with plural photo-acid generators in lithographic applications
App 20100273111 - FONSECA; Carlos A. ; et al. | 2010-10-28 |
Dual tone development with a photo-activated acid enhancement component in lithographic applications
App 20100273107 - FONSECA; Carlos A. ; et al. | 2010-10-28 |
System and Method For Rinse Optimization
App 20100154826 - Printz; Wallace P. | 2010-06-24 |
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