Pril; Wouter Onno

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pril; Wouter Onno.The latest application filed is for "interferometric stage positioning apparatus".

Company Profile

2.11.11

Pril; Wouter Onno - Geldrop NL
PRIL; Wouter Onno - Veldhoven NL
Pril; Wouter Onno - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Encoder, position measurement system and lithographic apparatus involving an enclosing device Grant 10,768,025 - Pril , et al. Sep	2020-09-08
Interferometric Stage Positioning Apparatus App 20200234911 - BAGGEN; Marcel Koenraad Marie ; et al.	2020-07-23
Encoder, Position Measurement System And Lithographic Apparatus App 20170343390 - PRIL; Wouter Onno ; et al.	2017-11-30
Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Grant 9,177,219 - Tel , et al. November 3, 2	2015-11-03
Method Of Calibrating A Lithographic Apparatus, Device Manufacturing Method and Associated Data Processing Apparatus and Computer Program Product App 20120008127 - TEL; Wim Tjibbo ; et al.	2012-01-12
Position measurement system and lithographic apparatus Grant 7,599,043 - Pril , et al. October 6, 2	2009-10-06
Lithographic apparatus and interferometer system Grant 7,535,578 - Pril May 19, 2	2009-05-19
Position measurement system and lithographic apparatus Grant 7,348,574 - Pril , et al. March 25, 2	2008-03-25
Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness Grant 7,333,174 - Koenen , et al. February 19, 2	2008-02-19
Lithographic apparatus and position measuring method Grant 7,310,130 - Eussen , et al. December 18, 2	2007-12-18
Lithographic apparatus, interferometer and device manufacturing method Grant 7,251,042 - Pril July 31, 2	2007-07-31
Position measurement system and lithographic apparatus App 20070051160 - Pril; Wouter Onno ; et al.	2007-03-08
Position measurement system and lithographic apparatus App 20070052976 - Pril; Wouter Onno ; et al.	2007-03-08
Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness App 20060170892 - Koenen; Willem Herman Gertruda Anna ; et al.	2006-08-03
Lithographic apparatus and position measuring method App 20060072089 - Eussen; Emiel Jozef Melanie ; et al.	2006-04-06
Enhanced lithographic displacement measurement system Grant 6,987,557 - Pril , et al. January 17, 2	2006-01-17
Lithographic apparatus, interferometer and device manufacturing method App 20050179879 - Pril, Wouter Onno	2005-08-18
Lithographic apparatus and interferometer system App 20050078288 - Pril, Wouter Onno	2005-04-14
Enhanced lithographic displacement measurement system App 20040169837 - Pril, Wouter Onno ; et al.	2004-09-02
Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition Grant 6,747,729 - Pril , et al. June 8, 2	2004-06-08
Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition App 20020045113 - Pril, Wouter Onno ; et al.	2002-04-18

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