| Patent | Date |
|---|
Epitaxial deposition reactor with reflector external to the reaction chamber and cooling method of a susceptor and substrates
Grant 11,377,754 - Preti , et al. July 5, 2 | 2022-07-05 |
Heating Method For A Reactor For Epitaxial Deposition And Reactor For Epitaxial Deposition
App 20210332498 - OGLIARI; Vincenzo ; et al. | 2021-10-28 |
Susceptor with supporting element
Grant 10,697,087 - Corea , et al. | 2020-06-30 |
Epitaxial Deposition Reactor With Reflector External To The Reaction Chamber And Cooling Method Of A Susceptor And Substrates
App 20200024768 - PRETI; Silvio ; et al. | 2020-01-23 |
Reaction chamber for epitaxial growth with a loading/unloading device and reactor
Grant 10,392,723 - Corea , et al. A | 2019-08-27 |
Heating Method For A Reactor For Epitaxial Deposition And Reactor For Epitaxial Deposition
App 20190256999 - OGLIARI; Vincenzo ; et al. | 2019-08-22 |
Tool for manipulating substrates, manipulation method and epitaxial reactor
Grant 10,211,085 - Ogliari , et al. Feb | 2019-02-19 |
Susceptor With Asymmetric Recesses, Reactor For Epitaxial Deposition And Production Method
App 20170121846 - OGLIARI; Vincenzo ; et al. | 2017-05-04 |
Tool For Manipulating Substrates, Manipulation Method And Epitaxial Reactor
App 20170103912 - OGLIARI; Vincenzo ; et al. | 2017-04-13 |
Reaction Chamber For Epitaxial Growth With A Loading/unloading Device And Reactor
App 20160312382 - COREA; Francesco ; et al. | 2016-10-27 |
Susceptor With Supporting Element
App 20160201219 - COREA; Francesco ; et al. | 2016-07-14 |
Reaction chamber of an epitaxial reactor and reactor that uses said chamber
Grant 9,382,642 - Yarlagadda , et al. July 5, 2 | 2016-07-05 |
Reaction Chamber of an Epitaxial Reactor and Reactor That Uses Said Chamber
App 20120027646 - Yarlagadda; Srinivas ; et al. | 2012-02-02 |
Differentiated-temperature Reaction Chamber
App 20100037825 - Valente; Gianluca ; et al. | 2010-02-18 |
Reactor For Growing Crystals
App 20100031885 - Pelosi; Claudio ; et al. | 2010-02-11 |
Susceptor system
Grant 7,615,121 - Maccalli , et al. November 10, 2 | 2009-11-10 |
Epitaxial Reactor With Susceptor Controlled Positioning
App 20090107404 - Ogliari; Vincenzo ; et al. | 2009-04-30 |
Susceptor system
Grant 7,488,922 - Maccalli , et al. February 10, 2 | 2009-02-10 |
System for Supporting and Rotating a Susceptor Inside a Treatment Chamber of a Wafer Treating Apparatus
App 20080210169 - Pozzetti; Vittorio ; et al. | 2008-09-04 |
Device For Introducing Reaction Gases Into A Reaction Chamber And Epitaxial Reactor Which Uses Said Device
App 20080202424 - Pozzetti; Vittorio ; et al. | 2008-08-28 |
Vacuum System For Wafer Handling
App 20080199281 - Ogliari; Vincenzo ; et al. | 2008-08-21 |
Susceptor for Expitaxial Reactors and Tool for the Handling Thereof
App 20080190357 - Karlsson; Ingemar ; et al. | 2008-08-14 |
Support system for a treatment apparatus
Grant 7,387,687 - Speciale , et al. June 17, 2 | 2008-06-17 |
Reaction chamber for an epitaxial reactor
Grant 7,314,526 - Preti , et al. January 1, 2 | 2008-01-01 |
Epitaxial Reactor Cooling Method and Reactor Cooled Thereby
App 20070295275 - Ogliari; Vincenzo ; et al. | 2007-12-27 |
Cleaining Process and Operating Process for a Cvd Reactor
App 20070264807 - Leone; Stefano ; et al. | 2007-11-15 |
Susceptor with epitaxial growth control devices and epitaxial reactor using the same
Grant 7,153,368 - Preti , et al. December 26, 2 | 2006-12-26 |
System for growing silicon carbide crystals
App 20060283389 - Valente; GianLuca ; et al. | 2006-12-21 |
Susceptor system
App 20060118048 - Maccalli; Giacomo Nicolao ; et al. | 2006-06-08 |
Susceptor system
App 20060081187 - Maccalli; Giacomo Nicolao ; et al. | 2006-04-20 |
Tool for handling wafers and epitaxial growth station
Grant 6,991,420 - Preti , et al. January 31, 2 | 2006-01-31 |
Susceptor provided with indentations and an epitaxial reactor which uses the same
App 20050051099 - Preti, Franco ; et al. | 2005-03-10 |
Susceptor with epitaxial growth control devices and epitaxial reactor using the same
App 20050005858 - Preti, Franco ; et al. | 2005-01-13 |
Tool for handling wafers and epitaxial growth station
App 20040191029 - Preti, Franco ; et al. | 2004-09-30 |
Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction
Grant 6,648,974 - Ogliari , et al. November 18, 2 | 2003-11-18 |
Chemical vapor deposition epitaxial reactor having two reaction chambers alternatively actuated and actuating method thereof
Grant 6,579,361 - Preti June 17, 2 | 2003-06-17 |
Chemical vapour deposition epitaxial reactor having two reaction chambers alternatively actuated and actuating method thereof
App 20020112661 - Preti, Franco | 2002-08-22 |
Epitaxial reactors
Grant 4,858,557 - Pozzetti , et al. August 22, 1 | 1989-08-22 |
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