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Patent applications and USPTO patent grants for Pratt; Wayne.The latest application filed is for "methods and apparatus for measuring and dispensing processing solutions to a cmp machine".
Patent | Date |
---|---|
Methods and apparatus for measuring and dispensing processing solutions to a CMP machine Grant 5,857,893 - Olsen , et al. January 12, 1 | 1999-01-12 |
Mass flow measuring device Grant 5,551,307 - Kane , et al. * September 3, 1 | 1996-09-03 |
Mass flow measuring device Grant 5,423,221 - Kane , et al. June 13, 1 | 1995-06-13 |
Coriolis mass flow meter adapted for low flow rates Grant 5,115,683 - Pratt May 26, 1 | 1992-05-26 |
Method for cryogenic treatment of Coriolis mass flow meter structures Grant 5,073,208 - Wong , et al. December 17, 1 | 1991-12-17 |
Method and apparatus for measuring mass flow Grant 4,782,711 - Pratt November 8, 1 | 1988-11-08 |
Mass flow meter Grant 4,733,569 - Kelsey , et al. March 29, 1 | 1988-03-29 |
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