Patent | Date |
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Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences Grant 8,183,062 - Funk , et al. May 22, 2 | 2012-05-22 |
Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures Grant 8,019,458 - Funk , et al. September 13, 2 | 2011-09-13 |
Multi-layer/multi-input/multi-output (MLMIMO) models and method for using Grant 7,967,995 - Funk , et al. June 28, 2 | 2011-06-28 |
Method and apparatus for creating a gate optimization evaluation library Grant 7,899,637 - Yamashita , et al. March 1, 2 | 2011-03-01 |
Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures Grant 7,894,927 - Funk , et al. February 22, 2 | 2011-02-22 |
Method and apparatus for optimizing a gate channel Grant 7,713,758 - Yamashita , et al. May 11, 2 | 2010-05-11 |
Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models for Metal-Gate Structures App 20100036518 - Funk; Merritt ;   et al. | 2010-02-11 |
Creating Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models for Metal-Gate Structures App 20100036514 - Funk; Merritt ;   et al. | 2010-02-11 |
Multi-Layer/Multi-Input/Multi-Output (MLMIMO) Models and Method for Using App 20090242513 - Funk; Merritt ;   et al. | 2009-10-01 |
Feature dimension deviation correction system, method and program product Grant 7,502,660 - Horak , et al. March 10, 2 | 2009-03-10 |
Method and Apparatus for Creating a Gate Optimization Evaluation Library App 20080311688 - Yamashita; Asao ;   et al. | 2008-12-18 |
Method and Apparatus for Optimizing a Gate Channel App 20080311687 - Yamashita; Asao ;   et al. | 2008-12-18 |
Optical metrology model optimization for process control Grant 7,395,132 - Prager , et al. July 1, 2 | 2008-07-01 |
Iso/nested control for soft mask processing Grant 7,328,418 - Yamashita , et al. February 5, 2 | 2008-02-05 |
Feature Dimension Deviation Correction System, Method And Program Product App 20080027577 - Horak; David V. ;   et al. | 2008-01-31 |
Using a virtual profile library Grant 7,305,322 - Funk , et al. December 4, 2 | 2007-12-04 |
Feature dimension deviation correction system, method and program product Grant 7,289,864 - Horak , et al. October 30, 2 | 2007-10-30 |
Using a virtual profile library App 20070233426 - Funk; Merritt ;   et al. | 2007-10-04 |
Iso/nested cascading trim control with model feedback updates Grant 7,209,798 - Yamashita , et al. April 24, 2 | 2007-04-24 |
Parametric optimization of optical metrology model Grant 7,126,700 - Bao , et al. October 24, 2 | 2006-10-24 |
Iso/nested control for soft mask processing App 20060195218 - Yamashita; Asao ;   et al. | 2006-08-31 |
Iso/nested cascading trim control with model feedback updates App 20060064193 - Yamashita; Asao ;   et al. | 2006-03-23 |
Feature Dimension Deviation Correction System, Method And Program Product App 20060007453 - Horak; David V. ;   et al. | 2006-01-12 |
Parametric optimization of optical metrology model App 20050128489 - Bao, Junwei ;   et al. | 2005-06-16 |