Prabhu; Gopalakrishna B.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Prabhu; Gopalakrishna B..The latest application filed is for "parameter sensing and computer modeling for gas delivery health monitoring".
Company Profile
0.24.31
- Prabhu; Gopalakrishna B. - San Jose CA
- Prabhu; Gopalakrishna B. - Sunnyvale CA
- Prabhu; Gopalakrishna B. - San Francisco CA
Patent Activity
| Patent | Date |
|---|---|
| Parameter Sensing And Computer Modeling For Gas Delivery Health Monitoring App 20220092241 - Moradian; Ala ; et al. | 2022-03-24 |
| Method Of Forming Polishing Sheet App 20140237905 - Bonner; Benjamin A. ; et al. | 2014-08-28 |
| Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles Grant 8,694,145 - Shanmugasundram , et al. April 8, 2 | 2014-04-08 |
| Retaining ring with shaped profile Grant 8,388,412 - Prabhu , et al. March 5, 2 | 2013-03-05 |
| Solar panel edge deletion module Grant 8,231,431 - Gajaria , et al. July 31, 2 | 2012-07-31 |
| Feedback Control Of A Chemical Mechanical Polishing Device Providing Manipulation Of Removal Rate Profiles App 20120053721 - Shanmugasundram; Arulkumar P. ; et al. | 2012-03-01 |
| Retaining Ring With Shaped Profile App 20120028548 - Prabhu; Gopalakrishna B. ; et al. | 2012-02-02 |
| Real-time Monitoring Of Retaining Ring Thickness And Lifetime App 20120021671 - McReynolds; Peter ; et al. | 2012-01-26 |
| Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles Grant 8,070,909 - Shanmugasundram , et al. December 6, 2 | 2011-12-06 |
| Retaining ring with shaped profile Grant 8,033,895 - Prabhu , et al. October 11, 2 | 2011-10-11 |
| Method for forming an electrical connection Grant 7,908,743 - Li , et al. March 22, 2 | 2011-03-22 |
| Polishing article with integrated window stripe Grant 7,841,925 - Menk , et al. November 30, 2 | 2010-11-30 |
| Monolithic Linear Polishing Sheet App 20100112919 - Bonner; Benjamin A. ; et al. | 2010-05-06 |
| Method For Forming An Electrical Connection App 20090277006 - Li; Zhiyong ; et al. | 2009-11-12 |
| Polishing apparatus with grooved subpad Grant 7,601,050 - Zuniga , et al. October 13, 2 | 2009-10-13 |
| Polishing Article With Integrated Window Stripe App 20090253358 - Menk; Gregory E. ; et al. | 2009-10-08 |
| Solar Panel Edge Deletion Module App 20090221217 - GAJARIA; DHRUV ; et al. | 2009-09-03 |
| Polishing article with integrated window stripe Grant 7,553,214 - Menk , et al. June 30, 2 | 2009-06-30 |
| Leader And Trailer For Linear Polishing Sheet App 20090088051 - Menk; Gregory E. ; et al. | 2009-04-02 |
| Retaining Ring with Shaped Profile App 20090021024 - Prabhu; Gopalakrishna B. ; et al. | 2009-01-22 |
| Materials for chemical mechanical polishing Grant 7,429,210 - Bonner , et al. September 30, 2 | 2008-09-30 |
| Selective Chemistry For Fixed Abrasive Cmp App 20080182413 - MENK; GREGORY E. ; et al. | 2008-07-31 |
| Smart polishing media assembly for planarizing substrates App 20070212976 - McReynolds; Peter ; et al. | 2007-09-13 |
| Polishing article with window stripe App 20070197145 - Menk; Gregory E. ; et al. | 2007-08-23 |
| Polishing apparatus with grooved subpad App 20070197141 - Zuniga; Steven M. ; et al. | 2007-08-23 |
| Polishing system with spiral-grooved subpad App 20070197147 - Rondum; Erik S. ; et al. | 2007-08-23 |
| Dechuck using subpad with recess App 20070197132 - Menk; Gregory E. ; et al. | 2007-08-23 |
| Polishing article with integrated window stripe App 20070197134 - Menk; Gregory E. ; et al. | 2007-08-23 |
| Polishing article with integrated window stripe App 20070197133 - Menk; Gregory E. ; et al. | 2007-08-23 |
| Materials For Chemical Mechanical Polishing App 20070117500 - BONNER; BENJAMIN A. ; et al. | 2007-05-24 |
| Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles App 20070102116 - Shanmugasundram; Arulkumar P. ; et al. | 2007-05-10 |
| Materials for chemical mechanical polishing Grant 7,179,159 - Bonner , et al. February 20, 2 | 2007-02-20 |
| Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles Grant 7,160,739 - Shanmugasundram , et al. January 9, 2 | 2007-01-09 |
| Materials for chemical mechanical polishing App 20060246831 - Bonner; Benjamin A. ; et al. | 2006-11-02 |
| Polishing processes for shallow trench isolation substrates Grant 7,063,597 - Prabhu , et al. June 20, 2 | 2006-06-20 |
| Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers Grant 7,040,966 - Salfelder , et al. May 9, 2 | 2006-05-09 |
| Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers App 20050042877 - Salfelder, Joseph F. ; et al. | 2005-02-24 |
| Polishing processes for shallow trench isolation substrates App 20040142640 - Prabhu, Gopalakrishna B. ; et al. | 2004-07-22 |
| Platen with patterned surface for chemical mechanical polishing App 20040072518 - Prabhu, Gopalakrishna B. ; et al. | 2004-04-15 |
| CMP platen with patterned surface App 20040053566 - Tolles, Robert D. ; et al. | 2004-03-18 |
| Methods and compositions for chemical mechanical polishing Grant 6,677,239 - Hsu , et al. January 13, 2 | 2004-01-13 |
| CMP platen with patterned surface Grant 6,592,438 - Tolles , et al. July 15, 2 | 2003-07-15 |
| CMP polishing pad Grant 6,575,825 - Tolles , et al. June 10, 2 | 2003-06-10 |
| Methods and compositions for chemical mechanical polishing App 20030040182 - Hsu, Wei-Yung ; et al. | 2003-02-27 |
| Method and apparatus for chemical mechanical polishing App 20030013384 - Donohue, Timothy James ; et al. | 2003-01-16 |
| Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles App 20020197745 - Shanmugasundram, Arulkumar P. ; et al. | 2002-12-26 |
| Method of chemical mechanical polishing with edge control Grant 6,361,420 - Zuniga , et al. March 26, 2 | 2002-03-26 |
| CMP polishing pad App 20010008830 - Tolles, Robert D. ; et al. | 2001-07-19 |
| CMP platen with patterned surface App 20010005667 - Tolles, Robert D. ; et al. | 2001-06-28 |
| CMP platen with patterned surface Grant 6,220,942 - Tolles , et al. April 24, 2 | 2001-04-24 |
| Method of post CMP defect stability improvement Grant 6,220,941 - Fishkin , et al. April 24, 2 | 2001-04-24 |
| CMP polishing pad Grant 6,217,426 - Tolles , et al. April 17, 2 | 2001-04-17 |
| Carrier head with edge control for chemical mechanical polishing Grant 6,132,298 - Zuniga , et al. October 17, 2 | 2000-10-17 |
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