Prabhakar; Vinay
Patent Applications and Registrations
Patent applications and USPTO patent grants for Prabhakar; Vinay.The latest application filed is for "chamber configurations and processes for particle control".
- Prabhakar; Vinay - Cupertino CA
- Prabhakar; Vinay - Fremont CA
| Patent | Date |
|---|---|
| Chamber Configurations And Processes For Particle Control App 20220122823 - Wu; Fei ; et al. | 2022-04-21 |
| Bottom Purge For Semiconductor Processing System App 20210320017 - Pathak; Nitin ; et al. | 2021-10-14 |
| Thermally Controlled Lid Stack Components App 20210320018 - Chandrasekar; Siva ; et al. | 2021-10-14 |
| Targeted Heat Control Systems App 20210202218 - Parimi; Venkata Sharat Chandra ; et al. | 2021-07-01 |
| Radiation Shield Modification For Improving Substrate Temperature Uniformity App 20210166921 - Neville; Elizabeth ; et al. | 2021-06-03 |
| Semiconductor Processing Chamber And Methods For Cleaning The Same App 20210035781 - Pandey; Vishwas Kumar ; et al. | 2021-02-04 |
| Electrostatic Chuck For Damage-free Substrate Processing App 20210025056 - KULSHRESHTHA; Prashant Kumar ; et al. | 2021-01-28 |
| Multi-lid Structure For Semiconductor Processing System App 20210013069 - Kalsekar; Viren ; et al. | 2021-01-14 |
| Bevel etch profile control Grant 10,629,427 - Su , et al. | 2020-04-21 |
| Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components Grant 10,599,043 - Ogiso , et al. | 2020-03-24 |
| Patterned chuck for substrate processing Grant 10,446,430 - Bluck , et al. Oc | 2019-10-15 |
| Bevel Etch Profile Control App 20190214249 - SU; Zonghui ; et al. | 2019-07-11 |
| Bevel etch profile control Grant 10,276,364 - Su , et al. | 2019-04-30 |
| Bevel Etch Profile Control App 20180323062 - SU; Zonghui ; et al. | 2018-11-08 |
| Critical Methodology In Vacuum Chambers To Determine Gap And Leveling Between Wafer And Hardware Components App 20180046088 - OGISO; Hiroyuki ; et al. | 2018-02-15 |
| Substrate processing system and method Grant 9,875,922 - Pederson , et al. January 23, 2 | 2018-01-23 |
| Patterned Chuck For Substrate Processing App 20170236740 - Bluck; Terry ; et al. | 2017-08-17 |
| Grid for plasma ion implant Grant 9,583,661 - Prabhakar , et al. February 28, 2 | 2017-02-28 |
| Implant masking and alignment system with rollers Grant 9,543,114 - Adibi , et al. January 10, 2 | 2017-01-10 |
| Substrate Processing System And Method App 20160233122 - Pederson; Terry ; et al. | 2016-08-11 |
| Grid For Plasma Ion Implant App 20160204295 - Prabhakar; Vinay ; et al. | 2016-07-14 |
| Substrate processing system and method Grant 9,324,598 - Pederson , et al. April 26, 2 | 2016-04-26 |
| Grid for plasma ion implant Grant 9,318,332 - Prabhakar , et al. April 19, 2 | 2016-04-19 |
| Implant Masking And Alignment App 20160042913 - Adibi; Babak ; et al. | 2016-02-11 |
| Grid For Plasma Ion Implant App 20140170795 - Prabhakar; Vinay ; et al. | 2014-06-19 |
| Substrate Processing System And Method App 20130115764 - Pederson; Terry ; et al. | 2013-05-09 |
| Wafer Electroplating Apparatus For Reducing Edge Defects App 20120181170 - Prabhakar; Vinay ; et al. | 2012-07-19 |
| Wafer electroplating apparatus for reducing edge defects Grant 8,172,992 - Prabhakar , et al. May 8, 2 | 2012-05-08 |
| Wafer Electroplating Apparatus For Reducing Edge Defects App 20100155254 - Prabhakar; Vinay ; et al. | 2010-06-24 |
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