Poslavsky; Leonid

Patent Applications and Registrations

Patent applications and USPTO patent grants for Poslavsky; Leonid.The latest application filed is for "metrology system calibration refinement".

Company Profile

9.62.38

Poslavsky; Leonid - Belmont CA US
Poslavsky; Leonid - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Automatic wavelength or angle pruning for optical metrology Grant 11,175,589 - Lee , et al. November 16, 2	2021-11-16
Automatic selection of sample values for optical metrology Grant 10,895,810 - Cao , et al. January 19, 2	2021-01-19
Dispersion model for band gap tracking Grant 10,770,362 - Malkova , et al. Sep	2020-09-08
Library expansion system, method, and computer program product for metrology Grant 10,648,793 - Poslavsky , et al.	2020-05-12
Metrology system calibration refinement Grant 10,605,722 - Kwak , et al.	2020-03-31
Automatic determination of fourier harmonic order for computation of spectral information for diffraction structures Grant 10,481,088 - Backues , et al. Nov	2019-11-19
Dispersion model for band gap tracking Grant 10,410,935 - Malkova , et al. Sept	2019-09-10
System, method, and computer program product for automatically determining a parameter causing an abnormal semiconductor metrology measurement Grant 10,393,647 - Zhao , et al. A	2019-08-27
Dynamic removal of correlation of highly correlated parameters for optical metrology Grant 10,386,729 - Lee , et al. A	2019-08-20
Model based measurement systems with improved electromagnetic solver performance Grant 10,345,095 - Pandev , et al. July 9, 2	2019-07-09
Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing Grant 10,190,868 - Lee , et al. Ja	2019-01-29
Signal response metrology based on measurements of proxy structures Grant 10,151,986 - Shchegrov , et al. Dec	2018-12-11
Spectral matching based calibration Grant 10,088,413 - Kwak , et al. October 2, 2	2018-10-02
Calculated electrical performance metrics for process monitoring and yield management Grant 10,079,183 - Gao , et al. September 18, 2	2018-09-18
Confined illumination for small spot size metrology Grant 10,006,865 - Shaughnessy , et al. June 26, 2	2018-06-26
Metrology System Calibration Refinement App 20180100796 - Kwak; Hidong ; et al.	2018-04-12
Optimized spatial modeling for optical CD metrology Grant 9,915,522 - Jiang , et al. March 13, 2	2018-03-13
Feed forward of metrology data in a metrology system Grant 9,903,711 - Levy , et al. February 27, 2	2018-02-27
Metrology system calibration refinement Grant 9,857,291 - Kwak , et al. January 2, 2	2018-01-02
Confined illumination for small spot size metrology Grant 9,719,932 - Shaughnessy , et al. August 1, 2	2017-08-01
Multi-oscillator, continuous Cody-Lorentz model of optical dispersion Grant 9,664,734 - Malkova , et al. May 30, 2	2017-05-30
Calculation method for local film stress measurements using local film thickness values Grant 9,625,823 - Kaack , et al. April 18, 2	2017-04-18
Accurate and fast neural network training for library-based critical dimension (CD) metrology Grant 9,607,265 - Jin , et al. March 28, 2	2017-03-28
Dispersion model for band gap tracking Grant 9,595,481 - Malkova , et al. March 14, 2	2017-03-14
Metrology through use of feed forward feed sideways and measurement cell re-use Grant 9,559,019 - Adel , et al. January 31, 2	2017-01-31
Semiconductor device models including re-usable sub-structures Grant 9,553,033 - Iloreta , et al. January 24, 2	2017-01-24
Multi-Oscillator, Continuous Cody-Lorentz Model Of Optical Dispersion App 20160341792 - Malkova; Natalia ; et al.	2016-11-24
Multi-model Metrology App 20160322267 - Kim; In-Kyo ; et al.	2016-11-03
Metrology System, Method, And Computer Program Product Employing Automatic Transitioning Between Utilizing A Library And Utilizing Regression For Measurement Processing App 20160320315 - Lee; Liequan ; et al.	2016-11-03
Feed Forward of Metrology Data in a Metrology System App 20160290796 - Levy; Ady ; et al.	2016-10-06
Measurement of composition for thin films Grant 9,442,063 - Di , et al. September 13, 2	2016-09-13
Model for optical dispersion of high-K dielectrics including defects Grant 9,405,290 - Malkova , et al. August 2, 2	2016-08-02
Meta-model based measurement refinement Grant 9,347,872 - Poslavsky , et al. May 24, 2	2016-05-24
Secondary target design for optical measurements Grant 9,311,431 - Yoo , et al. April 12, 2	2016-04-12
Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection Grant 9,291,554 - Kuznetsov , et al. March 22, 2	2016-03-22
Method of determining an asymmetric property of a structure Grant 9,239,522 - Shih , et al. January 19, 2	2016-01-19
Signal Response Metrology Based On Measurements Of Proxy Structures App 20160003609 - Shchegrov; Andrei V. ; et al.	2016-01-07
Library Expansion System, Method, And Computer Program Product For Metrology App 20150330770 - Poslavsky; Leonid ; et al.	2015-11-19
Techniques for optimized scatterometry Grant 9,127,927 - Iloreta , et al. September 8, 2	2015-09-08
Semiconductor Device Models Including Re-Usable Sub-Structures App 20150199463 - Iloreta; Jonathan ; et al.	2015-07-16
Multi-analyzer angle spectroscopic ellipsometry Grant 9,046,474 - Kwak , et al. June 2, 2	2015-06-02
Automatic Selection Of Sample Values For Optical Metrology App 20150142395 - Cao; Meng ; et al.	2015-05-21
Metrology Through Use Of Feed Forward Feed Sideways And Measurement Cell Re-use App 20150112624 - Adel; Michael ; et al.	2015-04-23
Multi-model Metrology App 20150058813 - Kim; In-Kyo ; et al.	2015-02-26
Metrology through use of feed forward feed sideways and measurement cell re-use Grant 8,930,156 - Adel , et al. January 6, 2	2015-01-06
Calculated Electrical Performance Metrics For Process Monitoring And Yield Management App 20150006097 - Gao; Xiang ; et al.	2015-01-01
Automatic Determination Of Fourier Harmonic Order For Computation Of Spectral Information For Diffraction Structures App 20140358476 - Backues; Mark ; et al.	2014-12-04
Dynamic Removal Of Correlation Of Highly Correlated Parameters For Optical Metrology App 20140358488 - Lee; Lie-Quan ; et al.	2014-12-04
Automatic Wavelength Or Angle Pruning For Optical Metrology App 20140358485 - Lee; Lie-Quan ; et al.	2014-12-04
Metrology System Calibration Refinement App 20140340682 - Kwak; Hidong ; et al.	2014-11-20
Method Of Electromagnetic Modeling Of Finite Structures And Finite Illumination For Metrology And Inspection App 20140222380 - Kuznetsov; Alexander ; et al.	2014-08-07
Optical system polarizer calibration Grant 8,797,534 - de Veer , et al. August 5, 2	2014-08-05
High throughput thin film characterization and defect detection Grant 8,711,349 - Gao , et al. April 29, 2	2014-04-29
Optical System Polarizer Calibration App 20140043608 - de Veer; Johannes D. ; et al.	2014-02-13
Accurate And Fast Neural Network Training For Library-based Critical Dimension (cd) Metrology App 20140032463 - Jin; Wen ; et al.	2014-01-30
Accurate and fast neural network training for library-based critical dimension (CD) metrology Grant 8,577,820 - Jin , et al. November 5, 2	2013-11-05
Optical system polarizer calibration Grant 8,570,514 - de Veer , et al. October 29, 2	2013-10-29
Library Generation With Derivatives In Optical Metrology App 20130158957 - Lee; Lie-Quan ; et al.	2013-06-20
Techniques For Optimized Scatterometry App 20130158948 - Iloreta; Jonathan ; et al.	2013-06-20
Spectral Matching Based Calibration App 20130132021 - Kwak; Hidong ; et al.	2013-05-23
Secondary Target Design for Optical Measurements App 20130116978 - Yoo; Sungchul ; et al.	2013-05-09
High Throughput Thin Film Characterization And Defect Detection App 20130083320 - Gao; Xiang ; et al.	2013-04-04
Multi-analyzer Angle Spectroscopic Ellipsometry App 20130010296 - Kwak; Hidong ; et al.	2013-01-10
Measurement Of Composition For Thin Films App 20130006539 - Di; Ming ; et al.	2013-01-03
Optical System Polarizer Calibration App 20120320377 - de Veer; Johannes D. ; et al.	2012-12-20
Accurate and Fast Neural network Training for Library-Based Critical Dimension (CD) Metrology App 20120226644 - Jin; Wen ; et al.	2012-09-06
Method Of Determining An Asymmetric Property Of A Structure App 20120086940 - Shih; Meng-Fu ; et al.	2012-04-12
Bright and dark field scatterometry systems for line roughness metrology Grant 8,045,179 - Zhuang , et al. October 25, 2	2011-10-25
Generating a model using global node optimization Grant 7,801,713 - Ygartua , et al. September 21, 2	2010-09-21
Film measurement Grant 7,760,358 - Aoyagi , et al. July 20, 2	2010-07-20
Metrology Through Use Of Feed Forward Feed Sideways And Measurement Cell Re-use App 20100017005 - Adel; Michael ; et al.	2010-01-21
Modal method modeling of binary gratings with improved eigenvalue computation Grant 7,375,828 - Aoyagi , et al. May 20, 2	2008-05-20
Film measurement using reflectance computation Grant 7,362,686 - Aoyagi , et al. April 22, 2	2008-04-22
Film measurement Grant 7,345,761 - Aoyagi , et al. March 18, 2	2008-03-18
Optical metrology on patterned samples Grant 7,321,426 - Poslavsky , et al. January 22, 2	2008-01-22
Film measurement Grant 7,190,453 - Aoyagi , et al. March 13, 2	2007-03-13
Method and apparatus for measuring etch uniformity of a semiconductor wafer Grant 6,649,075 - Buie , et al. November 18, 2	2003-11-18
Apparatus and method for endpoint control and plasma monitoring Grant 6,535,779 - Birang , et al. March 18, 2	2003-03-18

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