Patent | Date |
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Inductive plasma source with metallic shower head using b-field concentrator Grant 11,450,509 - Lai , et al. September 20, 2 | 2022-09-20 |
Inductive Plasma Source With Metallic Shower Head Using B-field Concentrator App 20200144027 - LAI; Canfeng ;   et al. | 2020-05-07 |
Inductive plasma source with metallic shower head using B-field concentrator Grant 10,529,541 - Lai , et al. J | 2020-01-07 |
Demagnetization of magnetic media by C doping for HDD patterned media application Grant 10,233,538 - Hilkene , et al. | 2019-03-19 |
Resist Fortification For Magnetic Media Patterning App 20170206922 - BENCHER; Christopher Dennis ;   et al. | 2017-07-20 |
Inductive Plasma Source With Metallic Shower Head Using B-field Concentrator App 20170194128 - LAI; Canfeng ;   et al. | 2017-07-06 |
Resist fortification for magnetic media patterning Grant 9,646,642 - Bencher , et al. May 9, 2 | 2017-05-09 |
Methods for repairing low-k dielectrics using carbon plasma immersion Grant 9,478,437 - Yao , et al. October 25, 2 | 2016-10-25 |
Demagnetization Of Magnetic Media By C Doping For Hdd Patterned Media Application App 20160305013 - HILKENE; Martin A. ;   et al. | 2016-10-20 |
Demagnetization of magnetic media by C doping for HDD patterned media application Grant 9,376,746 - Hilkene , et al. June 28, 2 | 2016-06-28 |
Plasma immersion ion implantation reactor with extended cathode process ring Grant 8,900,405 - Porshnev , et al. December 2, 2 | 2014-12-02 |
Methods to adjust threshold voltage in semiconductor devices Grant 8,802,522 - Ward , et al. August 12, 2 | 2014-08-12 |
Resist Fortification For Magnetic Media Patterning App 20140147700 - BENCHER; Christopher Dennis ;   et al. | 2014-05-29 |
Resist fortification for magnetic media patterning Grant 8,658,242 - Bencher , et al. February 25, 2 | 2014-02-25 |
Temperature control of a substrate during a plasma ion implantation process for patterned disc media applications Grant 8,586,952 - Hilkene , et al. November 19, 2 | 2013-11-19 |
Methods and apparatus for conformal doping Grant 8,501,605 - Santhanam , et al. August 6, 2 | 2013-08-06 |
Methods for quantitative measurement of a plasma immersion process Grant 8,492,177 - Yao , et al. July 23, 2 | 2013-07-23 |
Demagnetization Of Magnetic Media By C Doping For Hdd Patterned Media Application App 20130164455 - Hilkene; Martin A. ;   et al. | 2013-06-27 |
Methods For Quantitative Measurement Of A Plasma Immersion Process App 20130137197 - YAO; DAPING ;   et al. | 2013-05-30 |
Methods For Implanting Dopant Species In A Substrate App 20130095643 - SANTHANAM; KARTIK ;   et al. | 2013-04-18 |
Methods And Apparatus For Controlling Power Distribution In Substrate Processing Systems App 20130017315 - LAI; CANFENG ;   et al. | 2013-01-17 |
Methods And Apparatus For Controlling Power Distribution In Substrate Processing Systems App 20130014894 - LAI; CANFENG ;   et al. | 2013-01-17 |
Method for removing implanted photo resist from hard disk drive substrates Grant 8,354,035 - Hilkene , et al. January 15, 2 | 2013-01-15 |
Methods For Repairing Low-k Dielectrics Using Carbon Plasma Immersion App 20120309114 - YAO; DAPING ;   et al. | 2012-12-06 |
Pre Or Post-implant Plasma Treatment For Plasma Immersed Ion Implantation Process App 20120302048 - Santhanam; Kartik ;   et al. | 2012-11-29 |
Surface Dose Retention Of Dopants By Pre-amorphization And Post Implant Passivation Treatments App 20120289036 - Santhanam; Kartik ;   et al. | 2012-11-15 |
Doping profile modification in P3I process Grant 8,288,257 - Scotney-Castle , et al. October 16, 2 | 2012-10-16 |
Methods And Apparatus For Conformal Doping App 20120238074 - SANTHANAM; KARTIK ;   et al. | 2012-09-20 |
Resist Fortification For Magnetic Media Patterning App 20120196155 - Bencher; Christopher D. ;   et al. | 2012-08-02 |
Methods To Adjust Threshold Voltage In Semiconductor Devices App 20120171855 - WARD; MICHAEL G. ;   et al. | 2012-07-05 |
Integrated Platform For In-situ Doping And Activation Of Substrates App 20120088356 - SANTHANAM; KARTIK ;   et al. | 2012-04-12 |
Conformal doping in P3I chamber Grant 8,129,261 - Porshnev , et al. March 6, 2 | 2012-03-06 |
Inductive Plasma Source With Metallic Shower Head Using B-field Concentrator App 20110278260 - Lai; Canfeng ;   et al. | 2011-11-17 |
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking Grant 8,003,500 - Vellaikal , et al. August 23, 2 | 2011-08-23 |
Reducing photoresist layer degradation in plasma immersion ion implantation Grant 7,968,401 - Hilkene , et al. June 28, 2 | 2011-06-28 |
Chamber For Processing Hard Disk Drive Substrates App 20110127156 - Foad; Majeed A. ;   et al. | 2011-06-02 |
Temperature Control Of A Substrate During A Plasma Ion Implantation Process For Patterned Disc Media Applications App 20110101247 - Hilkene; Martin A. ;   et al. | 2011-05-05 |
Method For Removing Implanted Photo Resist From Hard Disk Drive Substrates App 20110006034 - Hilkene; Martin A. ;   et al. | 2011-01-13 |
Reducing Photoresist Layer Degradation In Plasma Immersion Ion Implantation App 20100190324 - HILKENE; MARTIN A. ;   et al. | 2010-07-29 |
Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition Grant 7,723,219 - Santhanam , et al. May 25, 2 | 2010-05-25 |
Doping Profile Modification In P3i Process App 20100112794 - Scotney-Castle; Matthew D. ;   et al. | 2010-05-06 |
Conformal Doping In P3i Chamber App 20100112793 - Porshnev; Peter I. ;   et al. | 2010-05-06 |
Plasma immersion ion implantation using an electrode with edge-effect suppression by a downwardly curving edge Grant 7,674,723 - Porshnev , et al. March 9, 2 | 2010-03-09 |
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking Grant 7,659,184 - Vellaikal , et al. February 9, 2 | 2010-02-09 |
Method and system for point of use recycling of ECMP fluids Grant 7,651,384 - Golden , et al. January 26, 2 | 2010-01-26 |
Plasma Immersion Ion Implantation Process With Chamber Seasoning And Seasoning Layer Plasma Discharging For Wafer Dechucking App 20090280628 - Vellaikal; Manoj ;   et al. | 2009-11-12 |
Plasma Immersion Ion Implantation Process With Chamber Seasoning And Seasoning Layer Plasma Discharging For Wafer Dechucking App 20090215251 - Vellaikal; Manoj ;   et al. | 2009-08-27 |
Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition App 20090215250 - Santhanam; Kartik ;   et al. | 2009-08-27 |
Plasma immersion ion implantation using an electrode with edge-effect suppression by a downwardly curving edge App 20090197010 - Porshnev; Peter I. ;   et al. | 2009-08-06 |
Abatement Of Effluent Gas App 20090175771 - Tsai; Kenneth Chien-Quen ;   et al. | 2009-07-09 |
Plasma immersion ion implantation reactor with extended cathode process ring App 20090120367 - Porshnev; Peter I. ;   et al. | 2009-05-14 |
Method and System for Point of Use Recycling of ECMP Fluids App 20080166958 - Golden; Josh H. ;   et al. | 2008-07-10 |
Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas Grant 6,863,019 - Shamouilian , et al. March 8, 2 | 2005-03-08 |
Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas App 20030036272 - Shamouilian, Shamouil ;   et al. | 2003-02-20 |