Patent | Date |
---|
Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid Grant 8,828,143 - Simons , et al. September 9, 2 | 2014-09-09 |
Apparatus And Method For The Rapid Thermal Control Of A Work Piece In Liquid Or Supercritical Fluid App 20130210235 - Simons; John P. ;   et al. | 2013-08-15 |
Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid Grant 8,388,758 - Simons , et al. March 5, 2 | 2013-03-05 |
Apparatus And Method For The Rapid Thermal Control Of A Work Piece In Liquid Or Supercritical Fluid App 20090235955 - Simons; John P. ;   et al. | 2009-09-24 |
Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition Grant 7,332,436 - Cotte , et al. February 19, 2 | 2008-02-19 |
Method for the rapid thermal control of a work piece in liquid or supercritical fluid Grant 7,288,155 - Simons , et al. October 30, 2 | 2007-10-30 |
Supercritical Fluid Delivery System For Semiconductor Wafer Processing App 20070012341 - Douglas; Stephen B. ;   et al. | 2007-01-18 |
Method to build a microfilter Grant 7,081,208 - McCullough , et al. July 25, 2 | 2006-07-25 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid Grant 6,997,197 - Simons , et al. February 14, 2 | 2006-02-14 |
Process of removing residue from a precision surface using liquid or supercritical critical carbon dioxide composition App 20050224748 - Cotte, John Michael ;   et al. | 2005-10-13 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid App 20050211269 - Simons, John P. ;   et al. | 2005-09-29 |
Method and system for maintaining a solution of a sparingly soluble additive in a process fluid App 20050183743 - Pope, Keith R. | 2005-08-25 |
Method of in situ monitoring of supercritical fluid process conditions Grant 6,927,393 - Cotte , et al. August 9, 2 | 2005-08-09 |
Process of removing residue material from a precision surface Grant 6,890,855 - Cotte , et al. May 10, 2 | 2005-05-10 |
Process for removing impurities from low dielectric constant films disposed on semiconductor devices App 20050087490 - Chace, Mark S. ;   et al. | 2005-04-28 |
Liquid or supercritical carbon dioxide composition Grant 6,838,015 - Cotte , et al. January 4, 2 | 2005-01-04 |
Method of insitu monitoring of supercritical fluid process conditions App 20040113079 - Cotte, John M. ;   et al. | 2004-06-17 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid App 20040112402 - Simons, John P. ;   et al. | 2004-06-17 |
Method to build a microfilter App 20040112865 - McCullough, Kenneth J. ;   et al. | 2004-06-17 |
Apparatus for cleaning filters Grant 6,739,346 - Cotte , et al. May 25, 2 | 2004-05-25 |
Turbine part mount for supercritical fluid processor Grant 6,736,906 - Cotte , et al. May 18, 2 | 2004-05-18 |
Process of removing ion-implanted photoresist from a workpiece Grant 6,683,008 - Cotte , et al. January 27, 2 | 2004-01-27 |
Process of providing a semiconductor device with electrical interconnection capability Grant 6,653,233 - Cotte , et al. November 25, 2 | 2003-11-25 |
Process and apparatus for contacting a precision surface with liquid or supercritical carbon dioxide App 20030196679 - Cotte, John Michael ;   et al. | 2003-10-23 |
Turbine part mount for supercritical fluid processor App 20030192575 - Cotte, John M. ;   et al. | 2003-10-16 |
Liquid or supercritical carbon dioxide composition and process of removing residue from a precision surface using same App 20030045117 - Cotte, John Michael ;   et al. | 2003-03-06 |
Process of providing a semiconductor device with electrical interconnection capability App 20030003746 - Cotte, John Michael ;   et al. | 2003-01-02 |
Process of removing residue material from a precision surface App 20030003762 - Cotte, John Michael ;   et al. | 2003-01-02 |
Apparatus for cleaning filters App 20030000556 - Cotte, John Michael ;   et al. | 2003-01-02 |
Process of drying semiconductor wafers using liquid or supercritical carbon dioxide Grant 6,398,875 - Cotte , et al. June 4, 2 | 2002-06-04 |
Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing Grant 6,251,787 - Edelstein , et al. June 26, 2 | 2001-06-26 |
Removal of dielectric oxides Grant 6,200,891 - Jagannathan , et al. March 13, 2 | 2001-03-13 |
Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing Grant 6,153,043 - Edelstein , et al. November 28, 2 | 2000-11-28 |
Removal of silicon oxide Grant 6,117,796 - Gale , et al. September 12, 2 | 2000-09-12 |
Etching of silicon nitride Grant 6,066,267 - Rath , et al. May 23, 2 | 2000-05-23 |
Non-destructure method of performing electrical burn-in testing of semiconductor chips Grant 5,007,163 - Pope , et al. April 16, 1 | 1991-04-16 |